Epi2 update 1/28/10

maurice stevens maurice at stanford.edu
Thu Jan 28 07:17:29 PST 2010


 From Elmer:

-------- Original Message --------
Subject: 	Comment epi2 SNF 2010-01-27 17:13:38: Update HCl
Date: 	Wed, 27 Jan 2010 17:13:38 -0800
From: 	eenriquez at snf.stanford.edu
To: 	epi2-pcs at snf.stanford.edu



HCl line has a leak at the last VCR fitting before it exits the gas cabinet.  Need to plan for how we can replace this fitting.



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maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
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