Epi2 update 1/28/10

maurice stevens maurice at stanford.edu
Thu Jan 28 07:17:29 PST 2010

 From Elmer:

-------- Original Message --------
Subject: 	Comment epi2 SNF 2010-01-27 17:13:38: Update HCl
Date: 	Wed, 27 Jan 2010 17:13:38 -0800
From: 	eenriquez at snf.stanford.edu
To: 	epi2-pcs at snf.stanford.edu

HCl line has a leak at the last VCR fitting before it exits the gas cabinet.  Need to plan for how we can replace this fitting.

maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278

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