From gthareja at stanford.edu Wed Jul 7 22:44:57 2010 From: gthareja at stanford.edu (Gaurav Thareja) Date: Wed, 7 Jul 2010 22:44:57 -0700 (PDT) Subject: epi2 free Fri morning. Message-ID: <754133591.352443.1278567897505.JavaMail.root@zm06.stanford.edu> From maurice at stanford.edu Thu Jul 8 09:12:42 2010 From: maurice at stanford.edu (maurice stevens) Date: Thu, 08 Jul 2010 09:12:42 -0700 Subject: No Mixed dopants Message-ID: <4C35F8FA.5090600@stanford.edu> The mixed dopant MFC (the inject MFC) is not controlling. Dop1 and Dop2 share the same Inject MFC so we can't control P or N type mixed gases right now. Elmer is ordering a new MFC and we will let you know the delivery date when know it. The direct dopants are still working normally. -m -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From maurice at stanford.edu Thu Jul 15 14:29:55 2010 From: maurice at stanford.edu (maurice) Date: Thu, 15 Jul 2010 14:29:55 -0700 Subject: Fwd: Comment epi2 SNF 2010-07-15 14:03:05: Update dopant MFC Message-ID: <4C3F7DD3.60001@stanford.edu> Update from Elmer: -------- Original Message -------- Subject: Comment epi2 SNF 2010-07-15 14:03:05: Update dopant MFC Date: Thu, 15 Jul 2010 14:03:05 -0700 From: eenriquez at snf.stanford.edu To: epi2-pcs at snf.stanford.edu The new dopant MFC should be here tomorrow afternoon. We will plan to install it on Monday. -------------- next part -------------- An HTML attachment was scrubbed... URL: From slcheng at stanford.edu Fri Jul 16 19:53:19 2010 From: slcheng at stanford.edu (Szu-Lin Cheng) Date: Fri, 16 Jul 2010 19:53:19 -0700 Subject: Pressure fluctuation Message-ID: <000001cb255b$3694e390$a3beaab0$@edu> To Epi users I found a pressure fluctuation when operating at near 100torr range (higher than 50 torr). I try to modify the PID gain a little bit and get it back to stable again. However, I am not convinced that the problem is completely solved. Therefore, you might want to check the pressure stability before you run your process. If the pressure of your deposition step is lower than 50 torr, the pressure should be stable at that step. Szulin -------------- next part -------------- An HTML attachment was scrubbed... URL: From ginel at stanford.edu Thu Jul 22 15:33:59 2010 From: ginel at stanford.edu (Ginel Hill) Date: Thu, 22 Jul 2010 15:33:59 -0700 (PDT) Subject: up and available now Message-ID: <1536737939.168848.1279838039531.JavaMail.root@zm06.stanford.edu> released reservation as tool came up halfway through and there is not enough time left... maybe someone else can take advantage of it. From maurice at stanford.edu Thu Jul 22 17:05:54 2010 From: maurice at stanford.edu (maurice stevens) Date: Thu, 22 Jul 2010 17:05:54 -0700 Subject: Dopant flow off 47sccm Message-ID: <4C48DCE2.4020802@stanford.edu> see below coral message: -------- Original Message -------- Subject: Problem epi2 SNF 2010-07-22 16:59:37: Dopant flow off 47sccm Date: Thu, 22 Jul 2010 16:59:37 -0700 From: maurice at snf.stanford.edu To: epi2-pcs at snf.stanford.edu The new MFC with the MFC adaptor plug combination we have in the system for Dop1 and Dop2 shows a flow that is 47sccm off from zero. - This means if you want a flow of 100sccm (for example) you must put in a value of 147sccm. - Our old MFC has been sent out for calibration and we expect it back in two weeks. When it returns from calibration it will be put back into the system. -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 -------------- next part -------------- An HTML attachment was scrubbed... URL: From maurice at stanford.edu Mon Jul 26 13:59:01 2010 From: maurice at stanford.edu (maurice stevens) Date: Mon, 26 Jul 2010 13:59:01 -0700 Subject: Epi2: Update scrubber Message-ID: <4C4DF715.1010200@stanford.edu> From Elmer: -------- Original Message -------- Subject: Comment epi2 SNF 2010-07-26 11:30:51: Update scrubber Date: Mon, 26 Jul 2010 11:30:52 -0700 From: eenriquez at snf.stanford.edu To: epi2-pcs at snf.stanford.edu Scrubber exhaust output seems to be clogged up. Need to clean up the scrubber and unclog the exhaust. Also need to replace all the corroded exhaust lines. System should be ready by Friday. -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278