No Mixed dopants

maurice stevens maurice at
Thu Jul 8 09:12:42 PDT 2010

The mixed dopant MFC (the inject MFC) is not controlling.  Dop1 and Dop2 
share the same Inject MFC so we can't control P or N type mixed gases 
right now.  Elmer is ordering a new MFC and we will let you know the 
delivery date when know it.

The direct dopants are still working normally.


maurice at

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278

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