No Mixed dopants
maurice stevens
maurice at stanford.edu
Thu Jul 8 09:12:42 PDT 2010
The mixed dopant MFC (the inject MFC) is not controlling. Dop1 and Dop2
share the same Inject MFC so we can't control P or N type mixed gases
right now. Elmer is ordering a new MFC and we will let you know the
delivery date when know it.
The direct dopants are still working normally.
-m
--
maurice at stanford.edu
Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA 94305
P. (650)725-3660
F. (650)725.6278
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