Pressure fluctuation

Szu-Lin Cheng slcheng at stanford.edu
Fri Jul 16 19:53:19 PDT 2010


To Epi users

 

I found a pressure fluctuation when operating at near 100torr range (higher
than 50 torr).

I try to modify the PID gain a little bit and get it back to stable again.

However, I am not convinced that the problem is completely solved.

Therefore, you might want to check the pressure stability before you run
your process.

If the pressure of your deposition step is lower than 50 torr, the pressure
should be stable at that step.

 

Szulin 

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