Dopant flow off 47sccm

maurice stevens maurice at
Thu Jul 22 17:05:54 PDT 2010

see below coral message:

-------- Original Message --------
Subject: 	Problem epi2 SNF 2010-07-22 16:59:37: Dopant flow off 47sccm
Date: 	Thu, 22 Jul 2010 16:59:37 -0700
From: 	maurice at
To: 	epi2-pcs at

The new MFC with the MFC adaptor plug combination we have in the system for Dop1 and Dop2 shows a flow that is 47sccm off from zero.
This means if you want a flow of 100sccm (for example) you must put in a value of 147sccm.
Our old MFC has been sent out for calibration and we expect it back in two weeks.  When it returns from calibration it will be put back into the system.

maurice at

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278

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