Dopant flow off 47sccm

maurice stevens maurice at stanford.edu
Thu Jul 22 17:05:54 PDT 2010


see below coral message:

-------- Original Message --------
Subject: 	Problem epi2 SNF 2010-07-22 16:59:37: Dopant flow off 47sccm
Date: 	Thu, 22 Jul 2010 16:59:37 -0700
From: 	maurice at snf.stanford.edu
To: 	epi2-pcs at snf.stanford.edu



The new MFC with the MFC adaptor plug combination we have in the system for Dop1 and Dop2 shows a flow that is 47sccm off from zero.
-
This means if you want a flow of 100sccm (for example) you must put in a value of 147sccm.
-
Our old MFC has been sent out for calibration and we expect it back in two weeks.  When it returns from calibration it will be put back into the system.



-- 
maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278

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