From maurice at stanford.edu Tue Jun 1 17:32:25 2010 From: maurice at stanford.edu (maurice stevens) Date: Tue, 01 Jun 2010 17:32:25 -0700 Subject: epi2 update Message-ID: <4C05A699.4070403@stanford.edu> Sean from AMAT came in over holiday weekend and calibrated loadlock A wafer loading. - We ran several etches in the morning and had no water issues. After lunch, system cut off 6 times for low water. The last two times were after Elmer bypassed the filter in the process cooling line. We still need to solve this one. - Also, after system aborted itself we had to home and calibrate the pressure control valve. The pressure swings wildly if it is not homed. - We did a 20kw test to check lamps and we are seeing the top temp fluctuate about 10 degrees. It looks like the wafer is not centered in the pocket. We will center wafer tomorrow. -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From maurice at stanford.edu Thu Jun 3 17:54:51 2010 From: maurice at stanford.edu (maurice stevens) Date: Thu, 03 Jun 2010 17:54:51 -0700 Subject: Epi2 up Message-ID: <4C084EDB.4060005@stanford.edu> We think we have resolve the last of the issue preventing the system from running (see the latest coral update below). The system is still yellow lighted because only load lock A is working and we are still monitoring the water flow. -------- Original Message -------- Subject: Comment epi2 SNF 2010-06-03 16:24:10: update Date: Thu, 3 Jun 2010 16:24:11 -0700 From: maurice at snf.stanford.edu To: epi2-pcs at snf.stanford.edu Elmer and Mike rebuilt flow meter. They found a magnet dragging on the plastic housing. - After the rebuild, we ran all day without a water fault. - We will continue to monitor the water flow. -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From maurice at stanford.edu Wed Jun 9 11:00:14 2010 From: maurice at stanford.edu (maurice stevens) Date: Wed, 09 Jun 2010 11:00:14 -0700 Subject: Epi2 free thurs 10am-2pm Message-ID: <4C0FD6AE.9010501@stanford.edu> moved training to the afternoon -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From junil.park at besang.com Wed Jun 9 11:32:26 2010 From: junil.park at besang.com (Junil Park) Date: Wed, 9 Jun 2010 11:32:26 -0700 Subject: Epi2 reservation (6/10 19:30~ ) released -- moved to another day Message-ID: <006001cb0802$1d6bec40$5843c4c0$@park@besang.com> -------------- next part -------------- An HTML attachment was scrubbed... URL: From maurice at snf.stanford.edu Fri Jun 11 15:38:16 2010 From: maurice at snf.stanford.edu (Maurice Stevens) Date: Fri, 11 Jun 2010 15:38:16 -0700 Subject: Tool free now until 6:00pm Message-ID: <4C12BAD8.70601@snf.stanford.edu> Finished training early. -m From junil.park at besang.com Fri Jun 11 23:44:03 2010 From: junil.park at besang.com (Junil Park) Date: Fri, 11 Jun 2010 23:44:03 -0700 Subject: epi2 reservation ( 6/14 20:30~ ) released. Sample not ready. Message-ID: <002301cb09fa$a6015410$f203fc30$@park@besang.com> -------------- next part -------------- An HTML attachment was scrubbed... URL: From ginel at stanford.edu Mon Jun 14 16:27:42 2010 From: ginel at stanford.edu (Ginel Hill) Date: Mon, 14 Jun 2010 16:27:42 -0700 (PDT) Subject: reservation done early Message-ID: <930443829.73934.1276558062634.JavaMail.root@zm06.stanford.edu> Will be done very soon; tool then free until 8pm From josep at stanford.edu Thu Jun 17 11:35:56 2010 From: josep at stanford.edu (Jose Padovani) Date: Thu, 17 Jun 2010 11:35:56 -0700 Subject: 12-2pm reservation released Message-ID: 12-2PM reservation released. Wafers not ready. -------------- next part -------------- An HTML attachment was scrubbed... URL: