Epi2 up

[maurice stevens]

We think we have resolve the last of the issue preventing the system 
from running (see the latest coral update below). 

The  system is still yellow lighted because only load lock A is working 
and we are still monitoring the water flow.



-------- Original Message --------
Subject: 	Comment epi2 SNF 2010-06-03 16:24:10: update
Date: 	Thu, 3 Jun 2010 16:24:11 -0700
From: 	maurice at snf.stanford.edu
To: 	epi2-pcs at snf.stanford.edu



Elmer and Mike rebuilt flow meter.  They found a magnet dragging on the plastic housing.
-
After the rebuild, we ran all day without a water fault.
- 
We will continue to monitor the water flow.



-- 
maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278