From slcheng at stanford.edu Wed Mar 3 16:27:07 2010 From: slcheng at stanford.edu (Szu-Lin Cheng) Date: Wed, 3 Mar 2010 16:27:07 -0800 Subject: EPI free 6pm to 12am Message-ID: <000601cabb31$6c7f3cb0$457db610$@edu> Sorry for the late notice. Samples not ready Szulin -------------- next part -------------- An HTML attachment was scrubbed... URL: From jrjain at stanford.edu Thu Mar 4 21:25:29 2010 From: jrjain at stanford.edu (Raja Jain) Date: Thu, 4 Mar 2010 21:25:29 -0800 Subject: epi2 free at midnight Message-ID: <017201cabc24$45a423f0$d0ec6bd0$@edu> In-sequence tool is shut down (TEL). Stanford University Department of Electrical Engineering Allen Center for Integrated Systems 420 Via Palou Stanford, CA 94305 (650) 248-0770 -------------- next part -------------- An HTML attachment was scrubbed... URL: From jasonlin at stanford.edu Fri Mar 5 10:42:24 2010 From: jasonlin at stanford.edu (J. Jason Lin) Date: Fri, 5 Mar 2010 10:42:24 -0800 Subject: epi2 released tonight midnight - 3am Message-ID: <7bbc53f81003051042i66b3bd6ctb2bc86150c71d154@mail.gmail.com> -------------- next part -------------- An HTML attachment was scrubbed... URL: From slcheng at stanford.edu Fri Mar 5 22:28:46 2010 From: slcheng at stanford.edu (Szu-Lin Cheng) Date: Fri, 5 Mar 2010 22:28:46 -0800 Subject: Problems on EPI 2 Message-ID: <000601cabcf6$46ac3cb0$d404b610$@edu> Fault message: Transfer Robot TOP/EXT axis I think the stepper is off. Can't manually or automatically move the transfer arm right now. Also try to home the transfer arm and it shows the same fault message again. Therefore, I will release my reservation. Szulin -------------- next part -------------- An HTML attachment was scrubbed... URL: From bwchui at yahoo.com Sun Mar 7 09:16:14 2010 From: bwchui at yahoo.com (Benjamin Chui) Date: Sun, 7 Mar 2010 09:16:14 -0800 (PST) Subject: Epi2 available Monday 1200-2000 Message-ID: <813324.8236.qm@web36503.mail.mud.yahoo.com> Epi2 available Monday 1200-2000 From jrjain at stanford.edu Thu Mar 11 21:54:20 2010 From: jrjain at stanford.edu (Raja Jain) Date: Thu, 11 Mar 2010 21:54:20 -0800 Subject: epi2 free at midnight Message-ID: <006b01cac1a8$76385430$62a8fc90$@edu> -------------- next part -------------- An HTML attachment was scrubbed... URL: From slcheng at stanford.edu Sat Mar 27 11:25:39 2010 From: slcheng at stanford.edu (Szu-Lin Cheng) Date: Sat, 27 Mar 2010 11:25:39 -0700 Subject: EPI 2 updates Message-ID: <000301cacdda$e760dd10$b6229730$@edu> I tried to run the system today and found the same heater problem during Ge Etch Coat process as reported in CORAL. I also found other information which might be related to this heater problem. The failure happened at the high temp etching step at temperature of 1190C. The outer and inner lamp power at this step are 19KW and 6KW respectively. This looks abnormal to me. The previous Outer power is much lower at about 12KW and inner power should be higher than 6KW. 19KW looks way to high to me. There is definitely something wrong on the heater power or pyrometer. Therefore, running Ge Etch Coat should be avoided. BTW, the temperature in active idle mode is 580C right now(normally 650 ). It also takes much longer time than before to ramp up the temperature. I didn't report shutdown since some users like cursive wants to do low temperature (400C) and thin deposition. That can still be done in this machine without using Ge Etch Coat. However, if you need thick deposition or high temperature, this machine cannot work. Szulin -------------- next part -------------- An HTML attachment was scrubbed... URL: