From maurice at stanford.edu Tue May 4 15:52:02 2010 From: maurice at stanford.edu (maurice stevens) Date: Tue, 04 May 2010 15:52:02 -0700 Subject: epi2 update 5/4/10 Message-ID: <4BE0A512.2070505@stanford.edu> From Elmer: -------- Original Message -------- Subject: Comment epi2 SNF 2010-05-04 14:51:17: Update Date: Tue, 4 May 2010 14:51:18 -0700 From: eenriquez at snf.stanford.edu To: epi2-pcs at snf.stanford.edu Resolved the manometer reading problem. Found one of the connector was loose. Placed the chamber online and ran the Big Etch recipe. Process faulted for Ch.A overpressure during the clean. AMAT field service told me that there is a good chance that they will be here tomorrow. -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From maurice at stanford.edu Wed May 5 22:11:22 2010 From: maurice at stanford.edu (maurice stevens) Date: Wed, 5 May 2010 22:11:22 -0700 Subject: epi2 update 5/5/10 References: <20100506020303.2D38F178201@smtp.stanford.edu> Message-ID: <555628C7-E565-435F-BE9D-9448924C6E1E@stanford.edu> From Elmer: Begin forwarded message: > From: eenriquez at snf.stanford.edu > Date: May 5, 2010 7:03:03 PM PDT > To: epi2-pcs at snf.stanford.edu > Subject: Comment epi2 SNF 2010-05-05 19:03:02: Update > > Field service repaired lamp problem. He replaced 2 burnt fuses located in the upper electrical chasis. Now faulting chamber over pressure when running the Big Etch recipe. Field service will be back tomorrow. > -------------- next part -------------- An HTML attachment was scrubbed... URL: From maurice at stanford.edu Fri May 7 07:23:32 2010 From: maurice at stanford.edu (maurice stevens) Date: Fri, 07 May 2010 07:23:32 -0700 Subject: Epi2 is up! Message-ID: <4BE42264.8000403@stanford.edu> From Elmer: -------- Original Message -------- Subject: Re: Shutdown epi2 SNF 2010-04-15 08:21:09: error: Chamber A bulb failed in UPPER INNER zone Date: Thu, 6 May 2010 14:15:45 -0700 From: eenriquez at snf.stanford.edu To: epi2-pcs at snf.stanford.edu system is up and ready to run a qualification run. Field service replaced 2 burnt fuses in the upper facility cabinet to fix the lamp problem. He also adjusted the pressure PID values to fix the pressure problem. -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From maurice at stanford.edu Wed May 12 11:54:14 2010 From: maurice at stanford.edu (maurice stevens) Date: Wed, 12 May 2010 11:54:14 -0700 Subject: epi based research papers Message-ID: <4BEAF956.6090405@stanford.edu> Hello All, It has been suggested that we compile a list of papers that were written by our users using the epi. This would be a great resource for new researchers. Please send me papers, names of papers or links to papers that you have written (or you are familiar with if group members have left) and I will put them on the SNF wiki. thanks in advance -m -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From maurice at stanford.edu Thu May 13 16:04:15 2010 From: maurice at stanford.edu (maurice stevens) Date: Thu, 13 May 2010 16:04:15 -0700 Subject: epi2 SNF 2010-05-13 update] Message-ID: <4BEC856F.7050701@stanford.edu> From Elmer: -------- Original Message -------- Subject: Comment epi2 SNF 2010-05-13 15:35:53: update Date: Thu, 13 May 2010 15:35:54 -0700 From: eenriquez at snf.stanford.edu To: epi2-pcs at snf.stanford.edu Field service is here troubleshooting the water flow problem -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From maurice at stanford.edu Fri May 14 15:56:58 2010 From: maurice at stanford.edu (Maurice Stevens) Date: Fri, 14 May 2010 15:56:58 -0700 Subject: epi2 SNF 2010-05-14 14:58:16: Update Message-ID: <4BEDD53A.4090805@stanford.edu> System will be down over the weekend and also on Monday. -------- Original Message -------- Subject: Comment epi2 SNF 2010-05-14 14:58:16: Update Date: Fri, 14 May 2010 14:58:17 -0700 From: eenriquez at snf.stanford.edu To: epi2-pcs at snf.stanford.edu Insufficient water flow through the chamber. We are only getting about 0.5 gpm through all three chamber loop. System requires a minimum of one gpm. Still trying to determine if we are supplying enough water to the whole system or that the chamber loops are restricted. We need additional water fittings to determine the source of the restriction. We should have the fittings on Monday. -------------- next part -------------- An HTML attachment was scrubbed... URL: From maurice at stanford.edu Mon May 17 18:09:51 2010 From: maurice at stanford.edu (maurice stevens) Date: Mon, 17 May 2010 18:09:51 -0700 Subject: Epi2 afternoon update 5/17 Message-ID: <4BF1E8DF.5000400@stanford.edu> Elmer and Sean (AMAT field service) found that bypassing the inline filter in the process cooling line on the Epi2 leg dramatically increased water flow to the tool. Elmer will talk to facilities in the morning about this. Additionally, they found restricted water flow in the upper lamp cooling shield and in the lower lamp cooling loop quick disconnects. The upper shield will be pulled from the system tomorrow to be flushed out. New quick disconnect fittings are being ordered. -m -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From maurice at stanford.edu Tue May 18 15:12:04 2010 From: maurice at stanford.edu (maurice stevens) Date: Tue, 18 May 2010 15:12:04 -0700 Subject: epi2 SNF 2010-05-18 14:42:08: update Message-ID: <4BF310B4.4000001@stanford.edu> Cooling water flow restriction updated on coral: -------- Original Message -------- Subject: Comment epi2 SNF 2010-05-18 14:42:08: update Date: Tue, 18 May 2010 14:42:08 -0700 From: maurice at snf.stanford.edu To: epi2-pcs at snf.stanford.edu Upper lamp shield pulled ...it was clean. Flow reduction looks to be at the quick disconnect fittings. A full set of quick disconnect fittings ordered...they should be here Thur -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From maurice at stanford.edu Fri May 21 15:56:55 2010 From: maurice at stanford.edu (maurice stevens) Date: Fri, 21 May 2010 15:56:55 -0700 Subject: epi2 SNF 2010-05-21 14:10:15: update Message-ID: <4BF70FB7.6060506@stanford.edu> The new Quick Disconnect fitting for the epi2 cooling water have arrived...they will be installed Monday -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From maurice at stanford.edu Mon May 24 16:01:33 2010 From: maurice at stanford.edu (maurice stevens) Date: Mon, 24 May 2010 16:01:33 -0700 Subject: epi2 SNF 2010-05-24 15:55:03: update] Message-ID: <4BFB054D.8010706@stanford.edu> We have made some progress. We hope to report more progress tomorrow. Coral update below: -------- Original Message -------- Subject: Comment epi2 SNF 2010-05-24 15:55:03: update Date: Mon, 24 May 2010 15:55:04 -0700 From: maurice at snf.stanford.edu To: epi2-pcs at snf.stanford.edu Elmer and Sean flushed cooling water loop over the weekend. Flow through the system is much better. We have been able to run 5 etches so far without any water flow problems. - But we did have one chamber overpressure on the 3rd etch. This was one of the problems we were addressing before the water issue. - Also, we currently can't load wafers from either loadlock. Sean was calibrating the loading when the water shut system down. - -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 -------------- next part -------------- An HTML attachment was scrubbed... URL: