epi2 update 5/4/10

maurice stevens maurice at stanford.edu
Tue May 4 15:52:02 PDT 2010


 From Elmer:

-------- Original Message --------
Subject: 	Comment epi2 SNF 2010-05-04 14:51:17: Update
Date: 	Tue, 4 May 2010 14:51:18 -0700
From: 	eenriquez at snf.stanford.edu
To: 	epi2-pcs at snf.stanford.edu



Resolved the manometer reading problem.  Found one of the connector was loose.  Placed the chamber online and ran the Big Etch recipe.  Process faulted for Ch.A overpressure during the clean.  
AMAT field service told me that there is a good chance that they will be here tomorrow.



-- 
maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278




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