epi2 update 5/5/10

maurice stevens maurice at stanford.edu
Wed May 5 22:11:22 PDT 2010


From Elmer:

Begin forwarded message:

> From: eenriquez at snf.stanford.edu
> Date: May 5, 2010 7:03:03 PM PDT
> To: epi2-pcs at snf.stanford.edu
> Subject: Comment epi2 SNF 2010-05-05 19:03:02: Update
> 
> Field service repaired lamp problem.  He replaced 2 burnt fuses located in the upper electrical chasis.  Now faulting chamber over pressure when running the Big Etch recipe.  Field service will be back tomorrow.
> 

-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/epi2/attachments/20100505/3dc27fcf/attachment.html>


More information about the epi2 mailing list