Epi2 is up!

maurice stevens maurice at stanford.edu
Fri May 7 07:23:32 PDT 2010

 From Elmer:

-------- Original Message --------
Subject: 	Re: Shutdown epi2 SNF 2010-04-15 08:21:09: error: Chamber A 
bulb failed in UPPER INNER zone
Date: 	Thu, 6 May 2010 14:15:45 -0700
From: 	eenriquez at snf.stanford.edu
To: 	epi2-pcs at snf.stanford.edu

system is up and ready to run a qualification run.  Field service replaced 2 burnt fuses in the upper facility cabinet to fix the lamp problem. 
He also adjusted the pressure PID values to fix the pressure problem.  

maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278

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