Epi2 is up!

maurice stevens maurice at stanford.edu
Fri May 7 07:23:32 PDT 2010


 From Elmer:

-------- Original Message --------
Subject: 	Re: Shutdown epi2 SNF 2010-04-15 08:21:09: error: Chamber A 
bulb failed in UPPER INNER zone
Date: 	Thu, 6 May 2010 14:15:45 -0700
From: 	eenriquez at snf.stanford.edu
To: 	epi2-pcs at snf.stanford.edu



system is up and ready to run a qualification run.  Field service replaced 2 burnt fuses in the upper facility cabinet to fix the lamp problem. 
He also adjusted the pressure PID values to fix the pressure problem.  



-- 
maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278




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