Epi2 afternoon update 5/17

maurice stevens maurice at stanford.edu
Mon May 17 18:09:51 PDT 2010


Elmer and Sean (AMAT field service) found that bypassing the inline 
filter in the process cooling line on the Epi2 leg dramatically 
increased water flow to the tool.  Elmer will talk to facilities in the 
morning about this.

Additionally, they found restricted water flow in the upper lamp cooling 
shield and in the lower lamp cooling loop quick disconnects.  The upper 
shield will be pulled from the system tomorrow to be flushed out.  New 
quick disconnect fittings are being ordered.

-m

-- 
maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278




More information about the epi2 mailing list