epi2 SNF 2010-05-24 15:55:03: update]

maurice stevens maurice at stanford.edu
Mon May 24 16:01:33 PDT 2010

We have made some progress.  We hope to report more progress tomorrow.
Coral update below:

-------- Original Message --------
Subject: 	Comment epi2 SNF 2010-05-24 15:55:03: update
Date: 	Mon, 24 May 2010 15:55:04 -0700
From: 	maurice at snf.stanford.edu
To: 	epi2-pcs at snf.stanford.edu

Elmer and Sean flushed cooling water loop over the weekend.  Flow through the system is much better.  We have been able to run 5 etches so far without any water flow problems.  
But we did have one chamber overpressure on the 3rd etch.  This was one of the problems we were addressing before the water issue.
Also, we currently can't load wafers from either loadlock.  Sean was calibrating the loading when the water shut system down.

maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278

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