epi2 SNF 2010-05-24 15:55:03: update]

maurice stevens maurice at stanford.edu
Mon May 24 16:01:33 PDT 2010


We have made some progress.  We hope to report more progress tomorrow.
Coral update below:

-------- Original Message --------
Subject: 	Comment epi2 SNF 2010-05-24 15:55:03: update
Date: 	Mon, 24 May 2010 15:55:04 -0700
From: 	maurice at snf.stanford.edu
To: 	epi2-pcs at snf.stanford.edu



Elmer and Sean flushed cooling water loop over the weekend.  Flow through the system is much better.  We have been able to run 5 etches so far without any water flow problems.  
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But we did have one chamber overpressure on the 3rd etch.  This was one of the problems we were addressing before the water issue.
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Also, we currently can't load wafers from either loadlock.  Sean was calibrating the loading when the water shut system down.
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-- 
maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278

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