From kcbalram at stanford.edu  Mon Nov  1 13:29:14 2010
From: kcbalram at stanford.edu (Krishna Coimbatore Balram)
Date: Mon, 1 Nov 2010 13:29:14 -0700 (PDT)
Subject: System free from midnight to 7 AM tomorrow
Message-ID: <834153003.237160.1288643354757.JavaMail.root@zm06.stanford.edu>

Picked up a slot later in the week.....

Krishna


From cfchiang at stanford.edu  Mon Nov  1 14:30:04 2010
From: cfchiang at stanford.edu (Chia-Fang Chiang)
Date: Mon, 1 Nov 2010 14:30:04 -0700 (PDT)
Subject: epi2 reservation released now to 5:30pm and tomorrow 10:30am-2pm
Message-ID: <156866017.240262.1288647004799.JavaMail.root@zm06.stanford.edu>

was able to start early


From jasonlin at stanford.edu  Fri Nov  5 12:18:45 2010
From: jasonlin at stanford.edu (J. Jason Lin)
Date: Fri, 5 Nov 2010 12:18:45 -0700
Subject: epi2 released 1pm
Message-ID: <AANLkTikQBt-kjFtb5ysBR8JT_E_HBYUV5eD+x-5zGGuR@mail.gmail.com>

machine seems to be free till 6pm
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From maurice at stanford.edu  Tue Nov  9 16:52:11 2010
From: maurice at stanford.edu (maurice)
Date: Tue, 09 Nov 2010 16:52:11 -0800
Subject: EPI2 status
Message-ID: <4CD9ECBB.6070102@stanford.edu>

It looks  like the lower dome got coated.

I ran the 20KW temp test and the lower zone was reading 870c (should be 
885)  The upper zone was reading 849 (should be 885).

After running some long constant power/ low slitH2 etches the lower is 
879 and the upper 856.

I'll continue etching and running temp tests tomorrow.

-m
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From maurice at stanford.edu  Wed Nov 10 15:48:02 2010
From: maurice at stanford.edu (maurice stevens)
Date: Wed, 10 Nov 2010 15:48:02 -0800
Subject: Fwd: EPI2 status update: dome/ weekend shutdown
Message-ID: <4CDB2F32.4030101@stanford.edu>












-------- Original Message --------
Subject: 	EPI2 status
Date: 	Tue, 09 Nov 2010 16:52:11 -0800
From: 	maurice <maurice at stanford.edu>
To: 	epi2 at snf.stanford.edu



After may etches, the lower temp is reading 883 c but the upper is only 
reading 865 (both should be reading 885c).  So it looks like the lower 
dome cleared but we can see the upper dome is still coated.
The system is purging with N2 overnight and we'll pull the upper dome 
tomorrow.
After the dome is replaced it usually takes a day or so before we can 
get haze free deposition.

Also, facilities is planning to shut off the process cooling water in 
CISX.  The process cooling water for EPI2 is supplied from CISX...so 
EPI2 will be down this weekend.


-m












It looks  like the lower dome got coated.

I ran the 20KW temp test and the lower zone was reading 870c (should be 
885)  The upper zone was reading 849 (should be 885).

After running some long constant power/ low slitH2 etches the lower is 
879 and the upper 856.

I'll continue etching and running temp tests tomorrow.

-m
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From junam at stanford.edu  Mon Nov 15 15:48:28 2010
From: junam at stanford.edu (Ju Hyung Nam)
Date: Mon, 15 Nov 2010 15:48:28 -0800 (PST)
Subject: epi2 released from now to 6pm
Message-ID: <1041040339.516490.1289864908011.JavaMail.root@zm07.stanford.edu>

Chamber A in "isolated" state.
"Chamber A is not ready to go online yet - Retry again"

Ju Hyung


From shott at stanford.edu  Sun Nov 28 09:40:50 2010
From: shott at stanford.edu (John Shott)
Date: Sun, 28 Nov 2010 09:40:50 -0800
Subject: Epi2 DCS flow ...
Message-ID: <4CF29422.4070305@stanford.edu>

Epi2 users:

Over the weekend, a couple of folks have reported a DCS flow error.  
This is likely due to the excess flow switch on that line that has 
"tripped" so that it shuts off the DCS source at the bottle.  We believe 
that this is due to a failed or failing excess flow switch.  We have 
ordered a replacement.  I don't know whether it has arrived, but when it 
does arrive, we will shutdown the DCS line so that we can replace this 
switch.

In the meantime, I've reset the DCS flow switch and confirmed that the 
pressure in the line increases from -8.0 PSIG to approximately 4.5 
PSIG.  I believe that you should be able to use DCS under these 
conditiions, but caution everyone to keep a close eye on the DCS flow.

I'm not clearing the problems that report this ... because we haven't 
addreressed the underlying problem ... but believe that with close 
monitoring of the DCS flow, you should be OK to process.

Happy processing,
John