EPI2 status

maurice maurice at stanford.edu
Tue Nov 9 16:52:11 PST 2010


It looks  like the lower dome got coated.

I ran the 20KW temp test and the lower zone was reading 870c (should be 
885)  The upper zone was reading 849 (should be 885).

After running some long constant power/ low slitH2 etches the lower is 
879 and the upper 856.

I'll continue etching and running temp tests tomorrow.

-m
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