Fwd: EPI2 status update: dome/ weekend shutdown
maurice at stanford.edu
Wed Nov 10 15:48:02 PST 2010
-------- Original Message --------
Subject: EPI2 status
Date: Tue, 09 Nov 2010 16:52:11 -0800
From: maurice <maurice at stanford.edu>
To: epi2 at snf.stanford.edu
After may etches, the lower temp is reading 883 c but the upper is only
reading 865 (both should be reading 885c). So it looks like the lower
dome cleared but we can see the upper dome is still coated.
The system is purging with N2 overnight and we'll pull the upper dome
After the dome is replaced it usually takes a day or so before we can
get haze free deposition.
Also, facilities is planning to shut off the process cooling water in
CISX. The process cooling water for EPI2 is supplied from CISX...so
EPI2 will be down this weekend.
It looks like the lower dome got coated.
I ran the 20KW temp test and the lower zone was reading 870c (should be
885) The upper zone was reading 849 (should be 885).
After running some long constant power/ low slitH2 etches the lower is
879 and the upper 856.
I'll continue etching and running temp tests tomorrow.
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