From cfchiang at stanford.edu  Thu Sep  2 17:02:27 2010
From: cfchiang at stanford.edu (Chia-Fang Chiang)
Date: Thu, 2 Sep 2010 17:02:27 -0700 (PDT)
Subject: epi2 reservation release from now to 8pm
Message-ID: <1783441676.536426.1283472147176.JavaMail.root@zm06.stanford.edu>

My process needs DCS whose flow deviated wildly thus I couldn't proceed.


From zeyuan at stanford.edu  Thu Sep  2 20:25:03 2010
From: zeyuan at stanford.edu (Ze Yuan)
Date: Thu, 2 Sep 2010 20:25:03 -0700 (PDT)
Subject: epi2 reservation release from now to midnight
In-Reply-To: <2888_1283472148_4C803B13_2888_206_2_1783441676.536426.1283472147176.JavaMail.root@zm06.stanford.edu>
Message-ID: <1201192650.482203.1283484303761.JavaMail.root@zm03.stanford.edu>

Due to the DCS deviation, Ge Coat Etch program cannot go through. I cannot do the run though my recipe doesn't have DCS.
Left with Inert Idle.

Best Regards

Ze Yuan

----- Original Message -----
From: "Chia-Fang Chiang" <cfchiang at stanford.edu>
To: epi2 at snf.stanford.edu
Sent: Thursday, September 2, 2010 5:02:27 PM
Subject: epi2 reservation release from now to 8pm

My process needs DCS whose flow deviated wildly thus I couldn't proceed.


From grahamab at stanford.edu  Sun Sep  5 14:41:49 2010
From: grahamab at stanford.edu (Andrew Blake Graham)
Date: Sun, 5 Sep 2010 14:41:49 -0700 (PDT)
Subject: epi2 free now until 10pm
Message-ID: <1952012812.576650.1283722909534.JavaMail.root@zm06.stanford.edu>

DCS flow is varying wildly once again so I can't use the tool.  


From cfchiang at stanford.edu  Thu Sep  9 16:04:37 2010
From: cfchiang at stanford.edu (Chia-Fang Chiang)
Date: Thu, 9 Sep 2010 16:04:37 -0700 (PDT)
Subject: Reservation released: tomorrow 9am-1pm
Message-ID: <642418069.672276.1284073477934.JavaMail.root@zm06.stanford.edu>

Finished early.


From maurice at stanford.edu  Tue Sep 14 09:49:47 2010
From: maurice at stanford.edu (maurice stevens)
Date: Tue, 14 Sep 2010 09:49:47 -0700
Subject: [Fwd: GEH4 is empty]
Message-ID: <4C8FA7AB.2020909@stanford.edu>



-------- Original Message --------
Subject: 	GEH4 is empty
Date: 	Tue, 14 Sep 2010 09:49:02 -0700
From: 	Ted Berg <tberg at stanford.edu>
To: 	epi2-pcs at snf.stanford.edu



 Hello Epi users GEh4 is empty and we are replacing it. It will be in 
leak check for 24 hours. ted


-- 
maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278



From jasonlin at stanford.edu  Tue Sep 14 10:35:21 2010
From: jasonlin at stanford.edu (J. Jason Lin)
Date: Tue, 14 Sep 2010 10:35:21 -0700
Subject: epi2 released tonight midnight
Message-ID: <AANLkTin95Moq9xGDy+eSJn1UR0=NWATDEa6khBx3dhSQ@mail.gmail.com>

need GeH4
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From maurice at stanford.edu  Wed Sep 22 16:11:35 2010
From: maurice at stanford.edu (maurice stevens)
Date: Wed, 22 Sep 2010 16:11:35 -0700
Subject: Fwd: Comment epi2 SNF 2010-09-22 16:08:28: Update scrubber fault
Message-ID: <4C9A8D27.5020102@stanford.edu>

  Elmer hopes we can have Epi2 up Friday afternoon.

-------- Original Message --------
Subject: 	Comment epi2 SNF 2010-09-22 16:08:28: Update scrubber fault
Date: 	Wed, 22 Sep 2010 16:08:28 -0700
From: 	eenriquez at snf.stanford.edu
To: 	epi2-pcs at snf.stanford.edu



Found scrubber's bottom tray was full of water.  Need to troubleshoot and determine source of leak.


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From maurice at stanford.edu  Thu Sep 23 15:29:03 2010
From: maurice at stanford.edu (maurice stevens)
Date: Thu, 23 Sep 2010 15:29:03 -0700
Subject: Epi2 up!!/ scrubber fault fixed
Message-ID: <4C9BD4AF.3090909@stanford.edu>

  Elmer has found the scrubber leak and run the etch program.  System 
back up!

The tool is free until 12 midnight.

-m

-------- Original Message --------
Subject: 	Re: Comment epi2 SNF 2010-09-22 16:08:28: Update scrubber fault
Date: 	Thu, 23 Sep 2010 14:12:12 -0700
From: 	eenriquez at snf.stanford.edu
To: 	epi2-pcs at snf.stanford.edu



Retightened leaky fitting.


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From audet at stanford.edu  Fri Sep 24 14:42:41 2010
From: audet at stanford.edu (Ross Audet)
Date: Fri, 24 Sep 2010 14:42:41 -0700
Subject: epi2 free now through Sat 1:30p
Message-ID: <002801cb5c31$69fcd000$3df67000$@stanford.edu>

Releasing this afternoon's epi2 reservation.



From jasonlin at stanford.edu  Tue Sep 28 12:21:09 2010
From: jasonlin at stanford.edu (J. Jason Lin)
Date: Tue, 28 Sep 2010 12:21:09 -0700
Subject: epi2 released midnight - 5am
Message-ID: <AANLkTi=3VNSHA_Q41taONG1JeDkfJjHqAq1qB_U7Zwv-@mail.gmail.com>


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From cfchiang at stanford.edu  Thu Sep 30 11:09:55 2010
From: cfchiang at stanford.edu (Chia-Fang Chiang)
Date: Thu, 30 Sep 2010 11:09:55 -0700 (PDT)
Subject: epi2 available from now to 2pm
Message-ID: <2052277676.542795.1285870195906.JavaMail.root@zm06.stanford.edu>

The previous user canceled the reservation so we started earlier.