epi2 reservation release from now to midnight

Ze Yuan zeyuan at stanford.edu
Thu Sep 2 20:25:03 PDT 2010


Due to the DCS deviation, Ge Coat Etch program cannot go through. I cannot do the run though my recipe doesn't have DCS.
Left with Inert Idle.

Best Regards

Ze Yuan

----- Original Message -----
From: "Chia-Fang Chiang" <cfchiang at stanford.edu>
To: epi2 at snf.stanford.edu
Sent: Thursday, September 2, 2010 5:02:27 PM
Subject: epi2 reservation release from now to 8pm

My process needs DCS whose flow deviated wildly thus I couldn't proceed.



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