Epi2 up!!/ scrubber fault fixed

maurice stevens maurice at stanford.edu
Thu Sep 23 15:29:03 PDT 2010

  Elmer has found the scrubber leak and run the etch program.  System 
back up!

The tool is free until 12 midnight.


-------- Original Message --------
Subject: 	Re: Comment epi2 SNF 2010-09-22 16:08:28: Update scrubber fault
Date: 	Thu, 23 Sep 2010 14:12:12 -0700
From: 	eenriquez at snf.stanford.edu
To: 	epi2-pcs at snf.stanford.edu

Retightened leaky fitting.

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