Epi2 up!!/ scrubber fault fixed

[maurice stevens]

  Elmer has found the scrubber leak and run the etch program.  System 
back up!

The tool is free until 12 midnight.

-m

-------- Original Message --------
Subject: 	Re: Comment epi2 SNF 2010-09-22 16:08:28: Update scrubber fault
Date: 	Thu, 23 Sep 2010 14:12:12 -0700
From: 	eenriquez at snf.stanford.edu
To: 	epi2-pcs at snf.stanford.edu



Retightened leaky fitting.


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