From maurice at stanford.edu Fri Apr 8 11:43:21 2011 From: maurice at stanford.edu (maurice stevens) Date: Fri, 8 Apr 2011 11:43:21 -0700 Subject: HCl flowmeter calibration In-Reply-To: <440573722.97221.1302217188618.JavaMail.root@zm07.stanford.edu> References: <440573722.97221.1302217188618.JavaMail.root@zm07.stanford.edu> Message-ID: <3175B55F-4D47-4FBF-A45F-8C2B351AD00B@stanford.edu> Hi Ted, You are remembering correctly. The HCl flow meter is a 500sccm but it it is configured on the tool as 1slm. We should make all users aware of this so that they can papers will be accurate. -m On Apr 7, 2011, at 3:59 PM, Ted Kamins wrote: > > Maurice, > > A few days ago Takashi showed me a manuscript that he is preparing to submit to a journal. It describes some of his selective/lateral epi work and cites the flows of HCl in the results and discussion. > > That reminded me of the miscalibration of the HCl flowmeter that AMAT found when they examined the reactor for the new chamber last autumn. If I remember correctly, the CRT shows full scale of 1 slm, but the actual flowmeter is 500 sccm full scale. > > If the values of HCl flow indicated on the screen are off by a factor of 2, Takashi should correct the values in his manuscript. > > He said that he used the values indicated on the CRT in his manuscript. Can you tell him if he needs to correct the values cited in his manuscript? > > Thanks, > > Ted From rthowe at stanford.edu Sat Apr 9 17:26:28 2011 From: rthowe at stanford.edu (Roger T. Howe) Date: Sat, 09 Apr 2011 17:26:28 -0700 Subject: 2nd chamber ETA: June 1 Message-ID: <4DA0F934.7060406@stanford.edu> Epi users, It occurred that you may not all have heard that the 2nd chamber will arrive from AMAT on June 1. Installation will require several weeks, most likely. Plan accordingly. Roger From shott at stanford.edu Tue Apr 12 14:52:45 2011 From: shott at stanford.edu (John Shott) Date: Tue, 12 Apr 2011 14:52:45 -0700 Subject: DCS Problems .... Message-ID: <4DA4C9AD.6010702@stanford.edu> DCS Users: As you may be aware, we currently do not have DCS available for these critical tools. Yesterday morning, we found that the cylinder heater that keeps the DCS sufficiently warm to keep adequate vapor pressure had gotten too hot ... 28C rather than 18C. That was enough that when DCS got into the regulator and gas panel (which is closer to 18C) we got liquid condensation. In these cases, it is best to use the onboard venturi vacuum generator to pump this out to make sure that there is no liquid trapped in the delivery line (which will result in erratic flow and flow faults). Unfortunately, the burn box that treats the effluent from the venturi has developed blockage and is in need of a thorough cleaning. We will take that opportunity to replace the quartz liner and heater element that will avoid a future problem. We are currently dis-assembling, thoroughly cleaning, and reassembling that burn box. We are hopeful that we may have this unit fully cleaned and rebuilt by the end of business tomorrow. We apologize for this outage, but will hope to be back in service soon. Let me know if you have any questions, John From maurice at stanford.edu Tue Apr 12 16:41:30 2011 From: maurice at stanford.edu (maurice stevens) Date: Tue, 12 Apr 2011 16:41:30 -0700 Subject: Epi update Message-ID: <4DA4E32A.2070200@stanford.edu> from coral -------- Original Message -------- Subject: Problem epi2 SNF 2011-04-12 14:43:11: No DCS Date: Tue, 12 Apr 2011 14:43:11 -0700 From: maurice at snf.stanford.edu To: epi2-pcs at snf.stanford.edu DCS still down...but new etch/coat recipes have been written that uses silane instead of DCS - Ge Etch coat-Si Etchcoat-cha-Si - If your recipes don't require DCS then the tool is usable. -------------- next part -------------- An HTML attachment was scrubbed... URL: From shott at stanford.edu Wed Apr 13 15:51:24 2011 From: shott at stanford.edu (John Shott) Date: Wed, 13 Apr 2011 15:51:24 -0700 Subject: DCS service restored .... Message-ID: <4DA628EC.4080907@stanford.edu> Fans of tools that use DCS: I am pleased to report that the DCS service has been restored following a complete rebuild of the burn box that services the toxic/flammable gas vault. I'd like to thank Mike Dickey, Ray Seymour, Ted Berg, Maurice Stevens, and Mary Tang for all jumping in to help with various aspect of this project so that we could effect this rebuild in a timely fashion. If you have never seen or dealt with the insides of a burn box that is used as an abatement system for a facility such as ours, you should know that this is unpleasant and potentially hazardous work. The materials found inside a burn box are typically toxic, corrosive, and often burst into flames when exposed to air. I'm sure that the above members of "Team Burn Box" would appreciate a word of thanks the next time that you see them. Happy processing, John From cfchiang at stanford.edu Thu Apr 14 09:23:45 2011 From: cfchiang at stanford.edu (Chia-Fang Chiang) Date: Thu, 14 Apr 2011 09:23:45 -0700 (PDT) Subject: epi2 released now to 2pm Message-ID: <1301140564.278705.1302798225785.JavaMail.root@zm06.stanford.edu> Sorry for the short notice. Process was done early. From cfchiang at stanford.edu Sat Apr 16 18:08:12 2011 From: cfchiang at stanford.edu (Chia-Fang Chiang) Date: Sat, 16 Apr 2011 18:08:12 -0700 (PDT) Subject: epi2 available from now to 11pm, sorry for short notice Message-ID: <1996031065.8712.1303002492638.JavaMail.root@zm06.stanford.edu> From maurice at stanford.edu Tue Apr 19 09:19:30 2011 From: maurice at stanford.edu (maurice stevens) Date: Tue, 19 Apr 2011 09:19:30 -0700 Subject: free today from 2 to 4:00pm Message-ID: <4DADB612.4050804@stanford.edu> I won't need this training time. -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From maurice at stanford.edu Tue Apr 19 10:29:16 2011 From: maurice at stanford.edu (Maurice M Stevens) Date: Tue, 19 Apr 2011 10:29:16 -0700 (PDT) Subject: B2H6 1% and GeH4 cylinders Changed In-Reply-To: <20110419172518.4DAB6516B@smtp-unencrypted.stanford.edu> Message-ID: <1496697088.74300.1303234156527.JavaMail.root@zm03.stanford.edu> >From coral. If they pass the leakcheck they should be up midday tomorrow. -m ----- Forwarded Message ----- From: tberg at snf.stanford.edu To: epi2-pcs at snf.stanford.edu Sent: Tuesday, April 19, 2011 10:25:17 AM Subject: Problem epi2 SNF 2011-04-19 10:25:17: B2H6 1% and GeH4 cylinders Changed B2H6 1% and GeH4 cylinders Changed in leak test now From maurice at stanford.edu Wed Apr 20 09:17:11 2011 From: maurice at stanford.edu (maurice stevens) Date: Wed, 20 Apr 2011 09:17:11 -0700 Subject: B2H6 1% and GeH4 cylinders online Message-ID: <4DAF0707.3090701@stanford.edu> Both cylinders look good after the leak checks. Both are back online. From maurice at stanford.edu Mon Apr 25 08:49:26 2011 From: maurice at stanford.edu (maurice stevens) Date: Mon, 25 Apr 2011 08:49:26 -0700 Subject: Epi2: PH3 gas is back on Message-ID: <4DB59806.3000508@stanford.edu> From Ray: Cylinder arrived. The cylinder was placed on leak check which it passed. The Phosphine is ready to use. From dwnam at stanford.edu Tue Apr 26 00:42:12 2011 From: dwnam at stanford.edu (Donguk Nam) Date: Tue, 26 Apr 2011 00:42:12 -0700 Subject: Epi2 is free from 7am to 9am today Message-ID: Sorry for the late notice. -------------- next part -------------- An HTML attachment was scrubbed... URL: From maurice at stanford.edu Thu Apr 28 17:03:51 2011 From: maurice at stanford.edu (maurice stevens) Date: Thu, 28 Apr 2011 17:03:51 -0700 Subject: epi free from midnight til 5:00am Message-ID: <4DBA0067.4020906@stanford.edu> User had fewer wafers than planned ready for epi -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278