From maurice at stanford.edu Wed Jan 5 17:12:03 2011 From: maurice at stanford.edu (maurice stevens) Date: Wed, 05 Jan 2011 17:12:03 -0800 Subject: epi2 update Message-ID: <4D2516E3.3010107@stanford.edu> HCl is under 24 hour leakcheck. If it passes tomorrow we will continue testing. My be up by tomorrow afternoon. -m -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From maurice at stanford.edu Fri Jan 7 17:09:29 2011 From: maurice at stanford.edu (maurice) Date: Fri, 07 Jan 2011 17:09:29 -0800 Subject: Pressure deviation errors Message-ID: <4D27B949.3090804@stanford.edu> from coral -------- Original Message -------- Subject: Problem epi2 SNF 2011-01-07 17:07:48: Pressure deviation errors Date: Fri, 7 Jan 2011 17:07:48 -0800 From: maurice at snf.stanford.edu To: epi2-pcs at snf.stanford.edu Standard test came out haze free. I had several pressure deviation errors that put system in isolation. I had an overpressure error on my last GeEtch. The three GeEtches earlier in the day had no problems. _ I am yellow lighting the system. Users may have pressure issues. Please make comments on coral if you have problems so we can address them next week. -------------- next part -------------- An HTML attachment was scrubbed... URL: From zpatel at snf.stanford.edu Sun Jan 9 14:56:03 2011 From: zpatel at snf.stanford.edu (Zubin) Date: Sun, 09 Jan 2011 15:56:03 -0700 Subject: Login and password for EPI2 Message-ID: <20110109155603.7d5b09db91ee661a40199bea22afa819.a382bb2c10.wbe@email12.secureserver.net> An HTML attachment was scrubbed... URL: From maurice at stanford.edu Thu Jan 13 10:47:28 2011 From: maurice at stanford.edu (maurice) Date: Thu, 13 Jan 2011 10:47:28 -0800 Subject: epi2 free until 2:00 Message-ID: <4D2F48C0.2070302@stanford.edu> From zpatel at snf.stanford.edu Fri Jan 14 18:09:28 2011 From: zpatel at snf.stanford.edu (Zubin) Date: Fri, 14 Jan 2011 19:09:28 -0700 Subject: Dopant flow gas valves Message-ID: <20110114190928.7d5b09db91ee661a40199bea22afa819.9436e2d3d6.wbe@email12.secureserver.net> An HTML attachment was scrubbed... URL: From maurice at stanford.edu Fri Jan 28 15:20:22 2011 From: maurice at stanford.edu (maurice) Date: Fri, 28 Jan 2011 15:20:22 -0800 Subject: recipes with pressure below 40 torr is not recommended until blower is fixed Message-ID: <4D434F36.8040707@stanford.edu> from coral -------- Original Message -------- Subject: Comment epi2 SNF 2011-01-28 15:18:50: blower not working/ Date: Fri, 28 Jan 2011 15:18:51 -0800 From: maurice at snf.stanford.edu To: epi2-pcs at snf.stanford.edu Ted reports: Blower on pump is not functional again...FS scheduled to come in Monday. - Running recipes with pressure below 40 torr is not recommended until blower is fixed. -------------- next part -------------- An HTML attachment was scrubbed... URL: From maurice at stanford.edu Mon Jan 31 09:51:33 2011 From: maurice at stanford.edu (maurice stevens) Date: Mon, 31 Jan 2011 09:51:33 -0800 Subject: Epi reactor update In-Reply-To: <4D46E10D.6010305@stanford.edu> References: <2ADD5A50-8135-4A5D-B365-84DB464CE839@stanford.edu> <8DA1CF83-A8F6-4544-AE33-5E1DDD0A9DC5@stanford.edu> <4D46E10D.6010305@stanford.edu> Message-ID: <4D46F6A5.2030008@stanford.edu> The pump rebuild vendor visited this morning and the pump is going out for rebuild. They say the may be able to get it back to us in a day...so Wed may be possible. Our other pump went out for rebuild ( another vendor) last week. We are asking them to get it back to us asap. We will update you when we have more information. -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278