From maurice at stanford.edu Fri Jul 8 15:14:42 2011 From: maurice at stanford.edu (Maurice M Stevens) Date: Fri, 8 Jul 2011 15:14:42 -0700 (PDT) Subject: Fwd: Comment epi2 SNF 2011-07-08 14:06:48: System is back together In-Reply-To: <20110708210649.CDDAD5462@smtp-unencrypted.stanford.edu> Message-ID: <1245809004.16724.1310163282653.JavaMail.root@zm03.stanford.edu> System back up after 2nd chamber hung (see Ted's coral entry for details). Ran several etches and a silicon deposition. Wafer handling ok. System up. ----- Forwarded Message ----- From: tberg at snf.stanford.edu To: epi2-pcs at snf.stanford.edu Sent: Friday, July 8, 2011 2:06:49 PM Subject: Comment epi2 SNF 2011-07-08 14:06:48: System is back together Chamber B is hung. System is back together. Contactor, circuit breaker and SCR pack for chamber B are installed. System is now running GEETCHCOAT. and then will be over to Maurice for testing. Thanks to all for your patience as we move ahead with the install. From maurice at stanford.edu Fri Jul 8 15:16:08 2011 From: maurice at stanford.edu (Maurice M Stevens) Date: Fri, 8 Jul 2011 15:16:08 -0700 (PDT) Subject: Epi2 free until 7:30pm tonight Message-ID: <1923573215.16826.1310163368132.JavaMail.root@zm03.stanford.edu> get your epi on From lennonl at stanford.edu Sun Jul 10 22:52:53 2011 From: lennonl at stanford.edu (Lennon Yao Ting Lee) Date: Sun, 10 Jul 2011 22:52:53 -0700 (PDT) Subject: Epi2 reservation released no DCS In-Reply-To: <1923573215.16826.1310163368132.JavaMail.root@zm03.stanford.edu> Message-ID: <1864576487.25182.1310363573857.JavaMail.root@zm09.stanford.edu> DCS flow deviated by 100% -Lennon From dwnam at stanford.edu Mon Jul 11 12:21:17 2011 From: dwnam at stanford.edu (Donguk Nam) Date: Mon, 11 Jul 2011 12:21:17 -0700 Subject: Epi2 is free from 2pm to 5pm today Message-ID: Samples are not ready. Donguk -------------- next part -------------- An HTML attachment was scrubbed... URL: From kcbalram at stanford.edu Mon Jul 18 01:47:30 2011 From: kcbalram at stanford.edu (Krishna Coimbatore Balram) Date: Mon, 18 Jul 2011 01:47:30 -0700 (PDT) Subject: Epi2 process error Message-ID: <569663148.71917.1310978850332.JavaMail.root@zm06.stanford.edu> Just noticed that user biyang's process has aborted with an error message: "Ch A SiD rp pressure not stabilized" Krishna From andrew.blake.graham at gmail.com Wed Jul 20 00:00:53 2011 From: andrew.blake.graham at gmail.com (Andrew Graham) Date: Wed, 20 Jul 2011 00:00:53 -0700 Subject: epi2 free 3am-11am Message-ID: I won't need my early morning reservation and there was already a large opening in the reservations. -------------- next part -------------- An HTML attachment was scrubbed... URL: From dwnam at stanford.edu Wed Jul 20 00:49:14 2011 From: dwnam at stanford.edu (Donguk Nam) Date: Wed, 20 Jul 2011 00:49:14 -0700 Subject: Epi2 is free from midnight to 10am on Friday Message-ID: Just released the reservation. Thanks, Donguk -------------- next part -------------- An HTML attachment was scrubbed... URL: From fungus at snf.stanford.edu Wed Jul 20 10:31:10 2011 From: fungus at snf.stanford.edu (Tracy Fung) Date: Wed, 20 Jul 2011 10:31:10 -0700 Subject: Epi free today until 2pm, Friday released 4-8pm Message-ID: <20110720103110.2e4e1a1cae0c11e8db06e7eefc1c8d4f.e8b2d52b4d.wbe@email12.secureserver.net> An HTML attachment was scrubbed... URL: From sclaussen at stanford.edu Thu Jul 21 15:46:17 2011 From: sclaussen at stanford.edu (Stephanie Claussen) Date: Thu, 21 Jul 2011 15:46:17 -0700 Subject: reservation released saturday 7:30pm-7:30am Message-ID: -------------- next part -------------- An HTML attachment was scrubbed... URL: From dwnam at stanford.edu Sat Jul 23 22:29:18 2011 From: dwnam at stanford.edu (Donguk Nam) Date: Sat, 23 Jul 2011 22:29:18 -0700 Subject: Epi2 is free from 8pm tomorrow until 10am on Mon(EOM) Message-ID: -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Jul 29 10:08:04 2011 From: tberg at stanford.edu (Ted Berg) Date: Fri, 29 Jul 2011 10:08:04 -0700 Subject: Reservations cancelled Message-ID: <4E32E8F4.5010704@stanford.edu> Hello All, The work on epi 2 chamber B is finished for now tool is now available. Ted