Fwd: Comment epi2 SNF 2011-07-08 14:06:48: System is back together

Maurice M Stevens maurice at stanford.edu
Fri Jul 8 15:14:42 PDT 2011


System back up after 2nd chamber hung (see Ted's coral entry for details).
Ran several etches and a silicon deposition.
Wafer handling ok.
System up.


----- Forwarded Message -----
From: tberg at snf.stanford.edu
To: epi2-pcs at snf.stanford.edu
Sent: Friday, July 8, 2011 2:06:49 PM
Subject: Comment epi2 SNF 2011-07-08 14:06:48: System is back together

Chamber B is hung. System is back together. Contactor, circuit breaker and SCR pack for chamber B are installed. System is now running GEETCHCOAT. and then will be over to Maurice for testing. Thanks to all for your patience as we move ahead with the install.




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