From maurice at stanford.edu Wed Jun 1 11:36:35 2011 From: maurice at stanford.edu (Maurice M Stevens) Date: Wed, 1 Jun 2011 11:36:35 -0700 (PDT) Subject: Important:Unload your own wafers/ epi up In-Reply-To: <626649553.27514.1306951054458.JavaMail.root@zm03.stanford.edu> Message-ID: <908970435.29445.1306953395198.JavaMail.root@zm03.stanford.edu> Important: Don't leave a note expecting the next user to unload your wafers. It should be etched and ready for the next user. Once your run is over and you have completed the etch, put the system in inert idle. It should not be sitting in active idle for hours because you don't want come in and unload your wafers (This uses up the life of the lamps). Repeated failure to follow this will result in you losing your qualification on the tool. This was the second time a wafer was broken when someone was unloading another users wafers. This downtime would have been avoided if the person enable unloaded there own wafers. Ted vented Xfer chamber, removed broken wafers, wiped out chamber, inspected wand, and pumped down chamber. Wafer drop from both LL were centered. Ran Ge etch twice. Epi up. From tberg at stanford.edu Thu Jun 2 12:44:34 2011 From: tberg at stanford.edu (Ted Berg) Date: Thu, 02 Jun 2011 12:44:34 -0700 Subject: Germane is low Message-ID: <4DE7E822.3050005@stanford.edu> Hello All, Just a heads up for all Germane users. Germane is at 9 pounds and will probably run out soon. It has dropped 80 pounds in the past 2 weeks. It is on order but we do not have a definite delivery date yet. Watch http://snf-gaugereader/wgrwebapp/Default_WGR.aspx number 22 to see the pressure. ted From kcbalram at stanford.edu Thu Jun 2 14:45:03 2011 From: kcbalram at stanford.edu (Krishna Coimbatore Balram) Date: Thu, 2 Jun 2011 14:45:03 -0700 (PDT) Subject: Epi is free from 7 PM to 6 AM Message-ID: <957224463.131056.1307051103698.JavaMail.root@zm06.stanford.edu> Germane not sufficient for run Krishna From dwnam at stanford.edu Thu Jun 2 16:22:33 2011 From: dwnam at stanford.edu (Donguk Nam) Date: Thu, 2 Jun 2011 16:22:33 -0700 Subject: Epi2 reservation is released Message-ID: On sat, from midnight to 3am and from 8:30am to 10am // 10:30pm on sunday to 5:30am on monday Cannot do the process due to insufficient germane. Thanks, Donguk -------------- next part -------------- An HTML attachment was scrubbed... URL: From jasonlin at stanford.edu Thu Jun 2 16:26:40 2011 From: jasonlin at stanford.edu (J. Jason Lin) Date: Thu, 2 Jun 2011 16:26:40 -0700 Subject: epi2 released Sunday midnight - noon Message-ID: -------------- next part -------------- An HTML attachment was scrubbed... URL: From cursive at ee.ucla.edu Thu Jun 2 21:27:17 2011 From: cursive at ee.ucla.edu (cursive at ee.ucla.edu) Date: Thu, 2 Jun 2011 21:27:17 -0700 (PDT) Subject: epi2 is free tomorrow from 6:30 to 10am Message-ID: <51662.128.12.213.43.1307075237.squirrel@webmail-ee.seas.ucla.edu> sample is not ready. From maurice at stanford.edu Fri Jun 3 08:50:29 2011 From: maurice at stanford.edu (maurice stevens) Date: Fri, 03 Jun 2011 08:50:29 -0700 Subject: Ge bottle change Message-ID: <4DE902C5.40303@stanford.edu> The Ge bottle is being changed and will be in leakcheck most of the day. If it passes leakcheck it will be back online late this afternoon. -m -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From dongrip at stanford.edu Sat Jun 4 20:49:21 2011 From: dongrip at stanford.edu (Dong Rip Kim) Date: Sat, 4 Jun 2011 20:49:21 -0700 Subject: epi2 tomorrow sunday night 10:30pm-4am released Message-ID: From maurice at stanford.edu Mon Jun 6 08:55:35 2011 From: maurice at stanford.edu (maurice stevens) Date: Mon, 06 Jun 2011 08:55:35 -0700 Subject: Epi2 free 2-4:00pm Today Message-ID: <4DECF877.5030403@stanford.edu> Training rescheduled to later in the week. -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From sclaussen at stanford.edu Tue Jun 7 00:27:28 2011 From: sclaussen at stanford.edu (Stephanie Claussen) Date: Tue, 7 Jun 2011 00:27:28 -0700 Subject: epi2 available now until 6am Message-ID: Got error "Global DOP2 flow deviated by 45%" and program aborted. -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Jun 7 06:22:09 2011 From: tberg at stanford.edu (Ted Berg) Date: Tue, 07 Jun 2011 06:22:09 -0700 Subject: Low concentration B2H6 is very low Message-ID: <4DEE2601.2040703@stanford.edu> Hello All, Low concentration B2H6 is very low. Another cylinder is due shortly. Please use caution on critical Runs of this gas since it may run out and users had flow issues last night. Ted From tberg at stanford.edu Wed Jun 8 11:37:29 2011 From: tberg at stanford.edu (Ted Berg) Date: Wed, 08 Jun 2011 11:37:29 -0700 Subject: Bad News B2H6 will not be here until tomorrow Message-ID: <4DEFC169.4050906@stanford.edu> Bad News B2H6 will not be here until tomorrow. According to the trucking company. ted From tberg at stanford.edu Wed Jun 8 12:41:38 2011 From: tberg at stanford.edu (Ted Berg) Date: Wed, 08 Jun 2011 12:41:38 -0700 Subject: B2H6 is here after all Message-ID: <4DEFD072.1050802@stanford.edu> Hello All, B2H6 100 PPM is here after all.Cylinder is changed and in leak check. From kcbalram at stanford.edu Wed Jun 8 22:26:40 2011 From: kcbalram at stanford.edu (Krishna Coimbatore Balram) Date: Wed, 8 Jun 2011 22:26:40 -0700 (PDT) Subject: Epi free till 2 AM Message-ID: <351682778.32252.1307597200194.JavaMail.root@zm06.stanford.edu> Finished early...... Krishna From fungus at snf.stanford.edu Sat Jun 11 06:43:45 2011 From: fungus at snf.stanford.edu (Tracy Fung) Date: Sat, 11 Jun 2011 06:43:45 -0700 Subject: Epi2 free Monday 12-4p Message-ID: <20110611064345.2e4e1a1cae0c11e8db06e7eefc1c8d4f.2417b21db8.wbe@email12.secureserver.net> An HTML attachment was scrubbed... URL: From dwnam at stanford.edu Mon Jun 13 00:04:44 2011 From: dwnam at stanford.edu (Donguk Nam) Date: Mon, 13 Jun 2011 00:04:44 -0700 Subject: Epi2 reservation is released due to centerfinder error Message-ID: Epi2 is free until noon. Donguk -------------- next part -------------- An HTML attachment was scrubbed... URL: From grahamab at snf.stanford.edu Mon Jun 13 17:30:59 2011 From: grahamab at snf.stanford.edu (Andrew Graham) Date: Mon, 13 Jun 2011 17:30:59 -0700 Subject: epi2 free tomorrow afternoon Message-ID: Wafers won't be ready in time. -------------- next part -------------- An HTML attachment was scrubbed... URL: From maurice at stanford.edu Mon Jun 13 17:40:18 2011 From: maurice at stanford.edu (maurice stevens) Date: Mon, 13 Jun 2011 17:40:18 -0700 Subject: reservation removed 9:30-11:30am tomorrow Message-ID: <89610800-EC70-4C0B-81CB-5DD355CAF3B8@stanford.edu> From ehe at stanford.edu Tue Jun 14 10:55:20 2011 From: ehe at stanford.edu (Elizabeth Edwards) Date: Tue, 14 Jun 2011 10:55:20 -0700 (PDT) Subject: epi2 free now, finished early Message-ID: <732531141.142814.1308074120563.JavaMail.root@zm06.stanford.edu> From zpatel at silexos.com Wed Jun 15 14:59:26 2011 From: zpatel at silexos.com (zpatel at silexos.com) Date: Wed, 15 Jun 2011 14:59:26 -0700 Subject: Epi2 reservations released Message-ID: <20110615145926.7d5b09db91ee661a40199bea22afa819.ec9e1f0ef6.wbe@email12.secureserver.net> An HTML attachment was scrubbed... URL: From fungus at snf.stanford.edu Wed Jun 15 16:40:23 2011 From: fungus at snf.stanford.edu (Tracy Fung) Date: Wed, 15 Jun 2011 16:40:23 -0700 Subject: Epi release Thurs / Friday afternoon Message-ID: <20110615164023.2e4e1a1cae0c11e8db06e7eefc1c8d4f.764048e8cb.wbe@email12.secureserver.net> An HTML attachment was scrubbed... URL: From junam at stanford.edu Sun Jun 19 23:12:51 2011 From: junam at stanford.edu (Ju Hyung Nam) Date: Sun, 19 Jun 2011 23:12:51 -0700 (PDT) Subject: Epi2 free midnight to 7am Message-ID: <84813569.172902.1308550371167.JavaMail.root@zm07.stanford.edu> Previous user's run took more time and not enough time left for my run. From fungus at snf.stanford.edu Tue Jun 21 14:57:55 2011 From: fungus at snf.stanford.edu (Tracy Fung) Date: Tue, 21 Jun 2011 14:57:55 -0700 Subject: epi2 free now to 6p Message-ID: <20110621145755.2e4e1a1cae0c11e8db06e7eefc1c8d4f.599eba04b0.wbe@email12.secureserver.net> An HTML attachment was scrubbed... URL: From sclaussen at stanford.edu Tue Jun 21 15:23:17 2011 From: sclaussen at stanford.edu (Stephanie Claussen) Date: Tue, 21 Jun 2011 15:23:17 -0700 Subject: epi2 available 6pm-6am Message-ID: Sorry for the short notice- wafers not ready. -------------- next part -------------- An HTML attachment was scrubbed... URL: From zpatel at silexos.com Wed Jun 22 10:59:49 2011 From: zpatel at silexos.com (zpatel at silexos.com) Date: Wed, 22 Jun 2011 10:59:49 -0700 Subject: Epi reservation released Message-ID: <20110622105949.7d5b09db91ee661a40199bea22afa819.fd272de516.wbe@email12.secureserver.net> An HTML attachment was scrubbed... URL: From maurice at stanford.edu Tue Jun 28 16:39:12 2011 From: maurice at stanford.edu (maurice stevens) Date: Tue, 28 Jun 2011 16:39:12 -0700 Subject: dome replaced/2nd chamber update Message-ID: <4E0A6620.2040209@stanford.edu> The dome has been replaced and the system is back up. Chamber B has arrived!! We have reserved the system July 6-8th so AMAT can placed it in the body of the system. This will not change anything in the old chamber...chamber A will stay closed and the gas lines will not be touched. We will update you in a few weeks with the next reserved time for the chamber B install. -m -------- Original Message -------- Subject: Re: Comment epi2 SNF 2011-06-28 07:37:58: dome is installed Date: Tue, 28 Jun 2011 15:57:57 -0700 From: maurice at snf.stanford.edu To: epi2-pcs at snf.stanford.edu complete -------------- next part -------------- An HTML attachment was scrubbed... URL: From dongrip at stanford.edu Tue Jun 28 16:51:50 2011 From: dongrip at stanford.edu (Dong Rip Kim) Date: Tue, 28 Jun 2011 16:51:50 -0700 Subject: Epi2 reservation released (Wed 3:30pm-12am) Message-ID: From zpatel at snf.stanford.edu Wed Jun 29 11:45:32 2011 From: zpatel at snf.stanford.edu (Zubin) Date: Wed, 29 Jun 2011 11:45:32 -0700 Subject: EPI2 reservation released Message-ID: <20110629114532.7d5b09db91ee661a40199bea22afa819.769490e3e4.wbe@email12.secureserver.net> An HTML attachment was scrubbed... URL: