From cfchiang at stanford.edu  Tue Nov  1 15:46:29 2011
From: cfchiang at stanford.edu (Chia-Fang Chiang)
Date: Tue, 1 Nov 2011 15:46:29 -0700 (PDT)
Subject: epi2 free tomorrow noon to midnight
Message-ID: <1650766854.172030.1320187589783.JavaMail.root@zm06.stanford.edu>



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From maurice at stanford.edu  Fri Nov  4 11:15:15 2011
From: maurice at stanford.edu (maurice stevens)
Date: Fri, 04 Nov 2011 11:15:15 -0700
Subject: Epi2 Lower lamp replacement tomorrow
Message-ID: <4EB42BB3.70308@stanford.edu>

AMAT will be in tomorrow to replace the lower lamps on Epi2.

-- 
maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278



From maurice at stanford.edu  Fri Nov  4 12:12:07 2011
From: maurice at stanford.edu (maurice stevens)
Date: Fri, 4 Nov 2011 12:12:07 -0700
Subject: All epi recipes removed during shutdown!
References: <4E445DC4.5030503@snf.stanford.edu>
Message-ID: <B9623270-F2EE-493B-B4CD-07928ABA5DF8@stanford.edu>

The shutdown is 6 weeks away.  All your recipes should be moved to your floppies before Dec15.  



Go to Program Menu
Go to Recipe Dir
Touch ?Back up? at the bottom of the screen
Touch ?Save recipe to floppy?
Select recipes you want to save (selected recipes will turn red)
Touch ?Save selected to floppy?
Insert your floppy and touch ?touch here? (put your windows formatted 3.5? floppy in Epi2 floppy drive located in back service isle)
Hourglass will display while recipes is being saved?be patient.

Begin forwarded message:

> From: maurice <maurice at snf.stanford.edu>
> Date: August 11, 2011 3:55:00 PM PDT
> To: epi2 at snf.stanford.edu
> Cc: Krishna Saraswat <saraswat at stanford.edu>, Thomas Kenny <kenny at cdr.stanford.edu>, James Harris <harris at snow.stanford.edu>, David Miller <dabm at stanford.edu>, Ted Kamins <kamins at stanford.edu>
> Subject: All epi recipes removed during shutdown!
> 
> First Notice:
> 
> All user recipes will be removed from the Epi2 hard drive during the holiday shutdown in December.
> 
> Recipes should be moved to user's floppies before the shutdown.
> 
> Please spread this message to your group members.
> 
> (I would suggest that you always have copies of your recipes on a floppy...just in case ...)

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From maurice at stanford.edu  Fri Nov  4 13:34:09 2011
From: maurice at stanford.edu (maurice stevens)
Date: Fri, 04 Nov 2011 13:34:09 -0700
Subject: Epi down 2 weeks
Message-ID: <4EB44C41.90605@stanford.edu>

AMAT is asking for 2 weeks of time on Epi2 to finish the second chamber 
before the shutdown.

Many of you know that the Epi2 second chamber install has been 
proceeding slowly because AMAT has been installing several other 
systems.  Sean, our normal field service engineer has been coming in to 
work on our system on weekends.  The other installs are winding down and 
AMAT can now dedicate a few engineers to our tool solidly for at least 
two weeks.

This is not a great time for a two shutdown.  We only have 6 weeks 
before the long Christmas break and we have been limping along for a 
week waiting for the lamp change.   But the work needs to get done so we 
can do the gas line tie ins.  And we really don't know when the AMAT 
engineers will be free in the future.

We believe this work would begin the last two weeks of this month but it 
is not finalized.


-m

-- 
maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278



From kenny at cdr.stanford.edu  Fri Nov  4 14:36:55 2011
From: kenny at cdr.stanford.edu (thomas kenny)
Date: Fri, 4 Nov 2011 14:36:55 -0700
Subject: Epi down 2 weeks
In-Reply-To: <003001cc9b37$d1fd3280$75f79780$@stanford.edu>
References: <4EB44C41.90605@stanford.edu> <003001cc9b37$d1fd3280$75f79780$@stanford.edu>
Message-ID: <EF971037-1C90-4C77-8384-F79300D8A743@cdr.stanford.edu>

All -

I have to agree with David on this.  We have a significant project working through the lab, and we've had plans in place all along that assumed that we'd have access to this tool until the shutdown.  

We all know that things break sometimes, and the life of SNF is filled with uncertainty.  However, in this case, since it is a question of plans and not Acts of God, I think we need to do everything we can to keep the tool available until the planned shutdown.  

tk
On Nov 4, 2011, at 2:22 PM, David A.B Miller wrote:

> Maurice
> Thanks for the information on this proposal. I think we are at a critical
> stage with our work using the epi tool and desperately need to finish off
> some work before the winter break. This will directly impact the
> graduation of two students. If we cannot finish this work, it will likely
> delay their graduation by a quarter. It will also make it impossible to
> meet contract goals on a major contract that is up for renewal at the end
> of this year, jeopardizing the renewal and potentially eliminating the
> funding for these two students to finish their Ph. D.s.
> So I am strongly asking us to reconsider this shutdown at this time.\
> Thanks
> David
> 
> ====================================================
> David Miller
> Room 203, Ginzton Laboratory, Nano Building
> 348 Via Pueblo Mall, Stanford CA 94305, USA.  650 723 0111
> dabm at ee.stanford.edu     http://www-ee.stanford.edu/~dabm/
> Assistant: Ingrid Tarien, 650 723 0206, ingrid at ee.stanford.edu
> ====================================================
> 
> 
> -----Original Message-----
> From: maurice stevens [mailto:maurice at stanford.edu]
> Sent: Friday, November 04, 2011 1:34 PM
> To: epi2 at snf.stanford.edu
> Cc: Krishna Saraswat; David Miller; James Harris; Thomas Kenny; John
> Bumgarner; Ed Myers; Roger T. Howe
> Subject: Epi down 2 weeks
> 
> AMAT is asking for 2 weeks of time on Epi2 to finish the second chamber
> before the shutdown.
> 
> Many of you know that the Epi2 second chamber install has been proceeding
> slowly because AMAT has been installing several other systems.  Sean, our
> normal field service engineer has been coming in to work on our system on
> weekends.  The other installs are winding down and AMAT can now dedicate a
> few engineers to our tool solidly for at least two weeks.
> 
> This is not a great time for a two shutdown.  We only have 6 weeks before
> the long Christmas break and we have been limping along for a
> week waiting for the lamp change.   But the work needs to get done so we
> can do the gas line tie ins.  And we really don't know when the AMAT
> engineers will be free in the future.
> 
> We believe this work would begin the last two weeks of this month but it
> is not finalized.
> 
> 
> -m
> 
> --
> maurice at stanford.edu
> 
> Maurice Stevens
> Stanford Nanofabrication Facility
> CIS Room 142, Mail Code 4070
> Stanford, CA  94305
> P. (650)725-3660
> F. (650)725.6278



From rthowe at stanford.edu  Fri Nov  4 16:04:36 2011
From: rthowe at stanford.edu (Roger T Howe)
Date: Fri, 4 Nov 2011 16:04:36 -0700
Subject: Epi down 2 weeks
In-Reply-To: <163F1E42-A805-458D-9406-5694AEDC4237@snow.stanford.edu>
References: <4EB44C41.90605@stanford.edu> <163F1E42-A805-458D-9406-5694AEDC4237@snow.stanford.edu>
Message-ID: <B8DEF750-0E92-4832-97A7-4D6BF42D6914@stanford.edu>

Maurice,

We have to postpone the epi work until after the shutdown.  Let AMAT know why.

I'm standing outside John Bumgarner's office -- he's up at SLAC and so I'm making the decision solo.

Roger

On Nov 4, 2011, at 2:50 PM, James Harris <harris at snow.stanford.edu> wrote:

> Maurice,
> This is somewhat of a killer in our case as we have to make a BIG TIME presentation for a large DoD contract on Dec, 1, so we need to make as much progress as insanely possible between now and Nov 30 and shutting down Epi2 for two weeks just about does us in. We have enough trouble working around nominal machine failures and down time, so I hope in a  case that seems like elective surgery, we can postpone until the nominal shutdown in mid-Dec.  Many thanks for the advance waning and opportunity to respond before it happnes.
> Regards,
> Jim
> On Nov 4, 2011, at 1:34 PM, maurice stevens wrote:
> 
>> AMAT is asking for 2 weeks of time on Epi2 to finish the second chamber before the shutdown.
>> 
>> Many of you know that the Epi2 second chamber install has been proceeding slowly because AMAT has been installing several other systems.  Sean, our normal field service engineer has been coming in to work on our system on weekends.  The other installs are winding down and AMAT can now dedicate a few engineers to our tool solidly for at least two weeks.
>> 
>> This is not a great time for a two shutdown.  We only have 6 weeks before the long Christmas break and we have been limping along for a week waiting for the lamp change.   But the work needs to get done so we can do the gas line tie ins.  And we really don't know when the AMAT engineers will be free in the future.
>> 
>> We believe this work would begin the last two weeks of this month but it is not finalized.
>> 
>> 
>> -m
>> 
>> -- 
>> maurice at stanford.edu
>> 
>> Maurice Stevens
>> Stanford Nanofabrication Facility
>> CIS Room 142, Mail Code 4070
>> Stanford, CA  94305
>> P. (650)725-3660
>> F. (650)725.6278
>> 
>> 
>> !DSPAM:4eb44be5235051483517596!
>> 
> 
> 
> James S. Harris    '64
> James & Ellenor Chesebrough Professor        E-Mail:Harris at snow.stanford.edu
> Department of Electrical Engineering            http://www-ee.stanford.edu/~harris/
> ALLEN Rm 328, 420 Via Palou Mall            Ph:  (650)723-9775
> Stanford, CA 94305-4075                        Fax: (650)723-4659                                   
> Adm. Asst.: Gail Chun-Creech                    Ph:  (650)723-0983
> 


From wangss at stanford.edu  Sun Nov  6 11:10:32 2011
From: wangss at stanford.edu (Shasha Wang)
Date: Sun, 6 Nov 2011 11:10:32 -0800 (PST)
Subject: epi2 error
Message-ID: <1385040965.309003.1320606632887.JavaMail.root@zm06.stanford.edu>

Hi all,

Has anyone seen this error before? "Heater Contactor off", "CHA Low Water flow"? Anyone know how to fix it?

Thanks,
Shasha


From tberg at stanford.edu  Mon Nov  7 07:30:13 2011
From: tberg at stanford.edu (Ted Berg)
Date: Mon, 07 Nov 2011 07:30:13 -0800
Subject: Epi is available
Message-ID: <4EB7F985.9090406@stanford.edu>

Hello All,
     Resolved water flow issues ran GEETCH coat. No problem. Its 
available. Teed


From jwb2005 at stanford.edu  Mon Nov  7 09:11:39 2011
From: jwb2005 at stanford.edu (John Bumgarner)
Date: Mon, 07 Nov 2011 09:11:39 -0800
Subject: Epi down 2 weeks
In-Reply-To: <EF971037-1C90-4C77-8384-F79300D8A743@cdr.stanford.edu>
References: <4EB44C41.90605@stanford.edu> <003001cc9b37$d1fd3280$75f79780$@stanford.edu> <EF971037-1C90-4C77-8384-F79300D8A743@cdr.stanford.edu>
Message-ID: <4EB8114B.8020006@stanford.edu>

Dear all,

After hearing from our customers and Roger, we are reversing ourselves 
and we will shut the epi tool down to do the second chamber hookup until 
after our extended shutdown for renovation.

Thank you all for your input.

Please note that we are not able to do the installation during the 
shutdown as SU turns over the keys to the fab to the contractor for the 
renovation.  This means we will be doing the epi 2nd chamber install 
likely in February and as such the Epi tool will not be up to use until 
late February or early March.

Regards,

john b



On 11/4/11 2:36 PM, thomas kenny wrote:
> All -
>
> I have to agree with David on this.  We have a significant project working through the lab, and we've had plans in place all along that assumed that we'd have access to this tool until the shutdown.
>
> We all know that things break sometimes, and the life of SNF is filled with uncertainty.  However, in this case, since it is a question of plans and not Acts of God, I think we need to do everything we can to keep the tool available until the planned shutdown.
>
> tk
> On Nov 4, 2011, at 2:22 PM, David A.B Miller wrote:
>
>> Maurice
>> Thanks for the information on this proposal. I think we are at a critical
>> stage with our work using the epi tool and desperately need to finish off
>> some work before the winter break. This will directly impact the
>> graduation of two students. If we cannot finish this work, it will likely
>> delay their graduation by a quarter. It will also make it impossible to
>> meet contract goals on a major contract that is up for renewal at the end
>> of this year, jeopardizing the renewal and potentially eliminating the
>> funding for these two students to finish their Ph. D.s.
>> So I am strongly asking us to reconsider this shutdown at this time.\
>> Thanks
>> David
>>
>> ====================================================
>> David Miller
>> Room 203, Ginzton Laboratory, Nano Building
>> 348 Via Pueblo Mall, Stanford CA 94305, USA.  650 723 0111
>> dabm at ee.stanford.edu     http://www-ee.stanford.edu/~dabm/
>> Assistant: Ingrid Tarien, 650 723 0206, ingrid at ee.stanford.edu
>> ====================================================
>>
>>
>> -----Original Message-----
>> From: maurice stevens [mailto:maurice at stanford.edu]
>> Sent: Friday, November 04, 2011 1:34 PM
>> To: epi2 at snf.stanford.edu
>> Cc: Krishna Saraswat; David Miller; James Harris; Thomas Kenny; John
>> Bumgarner; Ed Myers; Roger T. Howe
>> Subject: Epi down 2 weeks
>>
>> AMAT is asking for 2 weeks of time on Epi2 to finish the second chamber
>> before the shutdown.
>>
>> Many of you know that the Epi2 second chamber install has been proceeding
>> slowly because AMAT has been installing several other systems.  Sean, our
>> normal field service engineer has been coming in to work on our system on
>> weekends.  The other installs are winding down and AMAT can now dedicate a
>> few engineers to our tool solidly for at least two weeks.
>>
>> This is not a great time for a two shutdown.  We only have 6 weeks before
>> the long Christmas break and we have been limping along for a
>> week waiting for the lamp change.   But the work needs to get done so we
>> can do the gas line tie ins.  And we really don't know when the AMAT
>> engineers will be free in the future.
>>
>> We believe this work would begin the last two weeks of this month but it
>> is not finalized.
>>
>>
>> -m
>>
>> --
>> maurice at stanford.edu
>>
>> Maurice Stevens
>> Stanford Nanofabrication Facility
>> CIS Room 142, Mail Code 4070
>> Stanford, CA  94305
>> P. (650)725-3660
>> F. (650)725.6278


From grahamab at snf.stanford.edu  Thu Nov 10 10:50:22 2011
From: grahamab at snf.stanford.edu (Andrew Graham)
Date: Thu, 10 Nov 2011 10:50:22 -0800
Subject: epi2 free until 3:30pm
Message-ID: <CAFF=Xs+kCDGprw0VR=eVscwPkxp_j2KzQpduiy9z4CU2_r_0Hw@mail.gmail.com>

finished early.
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From maurice at stanford.edu  Thu Nov 10 19:05:44 2011
From: maurice at stanford.edu (maurice stevens)
Date: Thu, 10 Nov 2011 19:05:44 -0800
Subject: epi free til noon tomorrow
Message-ID: <5AF7DB06-A6AB-4BBE-9706-B55D688369A9@stanford.edu>



From wangss at stanford.edu  Fri Nov 11 15:04:21 2011
From: wangss at stanford.edu (Shasha Wang)
Date: Fri, 11 Nov 2011 15:04:21 -0800
Subject: epi2 free Sunday 2pm to midnight
Message-ID: <E9329820-749D-4EB0-B06F-85764C187B60@stanford.edu>

wafers are not ready due to ASML failure

-------------------
Shasha Wang
PhD Candidate
Electrical Engineering Department
Stanford Micro Structures and Sensors Lab
Stanford University, California, USA






From Toru.Ito at us.tel.com  Fri Nov 11 15:27:04 2011
From: Toru.Ito at us.tel.com (Toru.Ito at us.tel.com)
Date: Fri, 11 Nov 2011 16:27:04 -0700
Subject: epi2 free from now (15:30) today
Message-ID: <FE3C1722D9AB194D8DB58A5FA3DE6E4C8EE7226403@TEAIS6525.us.tel.com>


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From dwnam at stanford.edu  Sun Nov 13 16:52:09 2011
From: dwnam at stanford.edu (Donguk Nam)
Date: Sun, 13 Nov 2011 16:52:09 -0800
Subject: Epi2 is free from 6:30pm until midnight today(EOM)
Message-ID: <CAE+TuhpNjrGUYUAa5t1+R6jgUwDTXYcDexZ5=jTMRNv0r0wwjw@mail.gmail.com>


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From kcbalram at stanford.edu  Mon Nov 14 00:02:40 2011
From: kcbalram at stanford.edu (Krishna Coimbatore Balram)
Date: Mon, 14 Nov 2011 00:02:40 -0800 (PST)
Subject: Epi free until 10:30 AM
Message-ID: <1646822800.27476.1321257760231.JavaMail.root@zm06.stanford.edu>

Wafers are not ready..... 

My apologies for the late notice

Krishna


From kcbalram at stanford.edu  Mon Nov 14 00:41:17 2011
From: kcbalram at stanford.edu (Krishna Coimbatore Balram)
Date: Mon, 14 Nov 2011 00:41:17 -0800 (PST)
Subject: Ignore previous email
Message-ID: <1676199030.27911.1321260077667.JavaMail.root@zm06.stanford.edu>

Decided to run some dummies for process characterization

Krishna


From wangss at stanford.edu  Mon Nov 14 09:01:36 2011
From: wangss at stanford.edu (Shasha Wang)
Date: Mon, 14 Nov 2011 09:01:36 -0800 (PST)
Subject: epi2 free 4~10pm
Message-ID: <1061018286.33208.1321290096954.JavaMail.root@zm06.stanford.edu>

Wafers are not ready due to ASML failure


From maurice at stanford.edu  Thu Nov 17 10:10:43 2011
From: maurice at stanford.edu (maurice stevens)
Date: Thu, 17 Nov 2011 10:10:43 -0800
Subject: Epi Reactor lower Dome coated
In-Reply-To: <99E72A42-5C63-4703-AA1A-AA43F5BDEFFE@stanford.edu>
References: <99E72A42-5C63-4703-AA1A-AA43F5BDEFFE@stanford.edu>
Message-ID: <4EC54E23.8090703@stanford.edu>

Good morning John B,

We are pulling the lower dome .  We had the tool already reserved for 
this weekend but have contacted AMAT this morning to see if they are 
free on Friday start a day earlier.  This will give us the weekend to 
bake out.

Harris/Miller students with Ted Kamins, Ted Berg and I have tried just 
about everything to compensate for the coating and to clean it up.  It 
has cleaned up some but the temperature is still an issue.

Our hesitation in pulling the dome out sooner has been that many other 
users are still getting good deposition and are also pushing to meet 
deadlines.  We also hoped we could clean up the dome with out pulling it 
from the system.  And we always fear that other things get disturbed 
and/or it takes much longer to bring the tool back up.

We hope to have the system up by Monday afternoon and will update you on 
our progress tomorrow.



-m

-- 
maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278



From felixcho2010 at gmail.com  Thu Nov 17 15:56:18 2011
From: felixcho2010 at gmail.com (Seongjae Cho)
Date: Thu, 17 Nov 2011 15:56:18 -0800
Subject: Epi2 free
Message-ID: <CAKfN9G-3QKvGVJSKDat=mN1JThw3kqFb=XUyDtoXHv9oUVHL+A@mail.gmail.com>

Reservation released from 10 pm today to 2 am tomorrow. Sorry for a late
notice.
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From maurice at stanford.edu  Fri Nov 18 11:43:28 2011
From: maurice at stanford.edu (Maurice M Stevens)
Date: Fri, 18 Nov 2011 11:43:28 -0800 (PST)
Subject: Dome replacement Monday/free this weekend
In-Reply-To: <4EC6AE97.3090702@stanford.edu>
Message-ID: <864140904.186895.1321645408658.JavaMail.root@zm03.stanford.edu>

We have moved the dome replacement to Monday.  I am releasing my reservations for this weekend.

We expect Epi come back up late Wed.

-m

----- Forwarded Message -----
From: "John Bumgarner" <jwb2005 at stanford.edu>
To: "James Harris" <harris at snow.stanford.edu>
Cc: "maurice stevens" <maurice at stanford.edu>, "Krishna Saraswat" <saraswat at stanford.edu>, "Roger T. Howe" <rthowe at stanford.edu>, "David Miller" <dabm at stanford.edu>, "Ted Kamins" <kamins at stanford.edu>, "Thomas Kenny" <kenny at cdr.stanford.edu>
Sent: Friday, November 18, 2011 11:14:31 AM
Subject: Re: Epi Reactor lower Dome coated

Professors Harris, Saraswat, Kenny, Miller, Kamins and Howe,

We have hit a snag in replacing the Epi lower dome.  When we gathered 
spares on Thur for today's replacement, we found the spare dome had 
never been cleaned from the last replacement 18 months ago.

Reacting to that setback, the spare dome has been sent out for cleaning 
Thur afternoon and will be returned to SNF on Monday, when we will make 
the swap followed by bake-out.  We also checked with AMAT to see if they 
had a spare we could get on short notice, but they did not.

So the tool will be up over the weekend for users who can still use it 
with the current coated dome.  It will then go down on Monday for the 
dome replacement.

Needless to say, we will be doing an audit of our spares for the epi 
tool to make sure we have a logical set available and I will propagate 
that audit to the other highly utilized/critical path tools over time to 
help increase our tool up times.

Regards,

john b



On 11/17/11 10:23 AM, James Harris wrote:
> Maurice,
> Great news if we can get this done before the weekend and then bake so we're ready to go on Monday.  If there are any jobs that experienced machine users, but not experienced in the repair, could usefully help with to speed up the operation, I'm sure some of the most experienced growers could be enlisted help with this operation--maybe even if mostly observing this time, but could help with a more scheduled and routine maintenance of the system in the future, we could possibly avoid this kind of panic and maintain a higher level of performance over longer time periods as it seems to me one of our problems is almost complete lack of routine maintenance and then having to fix things when broken, which always takes longer than a bit more preventive action.  Probably not the time to address this when are again in the quick, get it fixed mode, but certainly something I think you, John Schott, John Bumgarner, Roger, Ted and major users should put our heads together and see if we can't come up with a better long term strategy, especially with a second chamber to be added over the break.
> Many thanks,
> Jim
> On Nov 17, 2011, at 10:10 AM, maurice stevens wrote:
>
>> Good morning John B,
>>
>> We are pulling the lower dome .  We had the tool already reserved for this weekend but have contacted AMAT this morning to see if they are free on Friday start a day earlier.  This will give us the weekend to bake out.
>>
>> Harris/Miller students with Ted Kamins, Ted Berg and I have tried just about everything to compensate for the coating and to clean it up.  It has cleaned up some but the temperature is still an issue.
>>
>> Our hesitation in pulling the dome out sooner has been that many other users are still getting good deposition and are also pushing to meet deadlines.  We also hoped we could clean up the dome with out pulling it from the system.  And we always fear that other things get disturbed and/or it takes much longer to bring the tool back up.
>>
>> We hope to have the system up by Monday afternoon and will update you on our progress tomorrow.
>>
>>
>>
>> -m
>>
>> -- 
>> maurice at stanford.edu
>>
>> Maurice Stevens
>> Stanford Nanofabrication Facility
>> CIS Room 142, Mail Code 4070
>> Stanford, CA  94305
>> P. (650)725-3660
>> F. (650)725.6278
>>
>>
>> !DSPAM:4ec54dc2135914694112671!
>>
>
> James S. Harris    '64
> James&  Ellenor Chesebrough Professor		E-Mail:Harris at snow.stanford.edu
>   Department of Electrical Engineering			http://www-ee.stanford.edu/~harris/
>   ALLEN Rm 328, 420 Via Palou Mall			Ph:  (650)723-9775
>   Stanford, CA 94305-4075						Fax: (650)723-4659
>   Adm. Asst.: Gail Chun-Creech					Ph:  (650)723-0983
>



From dwnam at stanford.edu  Sat Nov 19 17:41:55 2011
From: dwnam at stanford.edu (Donguk Nam)
Date: Sat, 19 Nov 2011 17:41:55 -0800
Subject: Epi2 is free from 6pm until 10pm
Message-ID: <CAE+TuhrK6A5yyBthyO+ngHnkmvaQ86kBFYi2h-vDu+AX726brw@mail.gmail.com>

Sorry for the late notice.

Donguk
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From maurice at stanford.edu  Tue Nov 22 16:32:08 2011
From: maurice at stanford.edu (maurice stevens)
Date: Tue, 22 Nov 2011 16:32:08 -0800
Subject: Epi Reactor lower Dome update
In-Reply-To: <4EC6AE97.3090702@stanford.edu>
References: <99E72A42-5C63-4703-AA1A-AA43F5BDEFFE@stanford.edu> <4EC54E23.8090703@stanford.edu> <BA674AEB-963B-4501-ADDE-419B8A22D304@snow.stanford.edu> <4EC6AE97.3090702@stanford.edu>
Message-ID: <4ECC3F08.3070102@stanford.edu>

Hi All,

We received the lower dome midday yesterday and were able to removed the 
upper dome and all the upper quartz.

Today we (1) pulled the lower lamps, rotation assembly and the lower 
dome (2) cleaned the upper/lower flanges, cleared inner rotation of 
broken wafers/quartz (3) re-installed lower dome, lower lamps and 
rotation assembly.

Tomorrow we will install the upper quartz and dome, calibrate wafer 
placement in process chamber, pump down system and finally (if 
everything goes well) start the bake out.


-- 
maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278



From maurice at stanford.edu  Wed Nov 23 16:07:41 2011
From: maurice at stanford.edu (maurice stevens)
Date: Wed, 23 Nov 2011 16:07:41 -0800
Subject: Epi Reactor Lower Dome update 11/23/11
In-Reply-To: <4ECC3F08.3070102@stanford.edu>
References: <99E72A42-5C63-4703-AA1A-AA43F5BDEFFE@stanford.edu> <4EC54E23.8090703@stanford.edu> <BA674AEB-963B-4501-ADDE-419B8A22D304@snow.stanford.edu> <4EC6AE97.3090702@stanford.edu> <4ECC3F08.3070102@stanford.edu>
Message-ID: <4ECD8ACD.1000507@stanford.edu>

We had a very good day!

We will installed the upper quartz and dome, confirmed correct wafer 
placement in process chamber and pumped down system.

System is now baking out.  I will come in on Friday to etch the chamber, 
get temperature readings and run silicon depositions.

We will update on you all on Friday.

-m



On 11/22/2011 4:32 PM, maurice stevens wrote:
> Hi All,
>
> We received the lower dome midday yesterday and were able to removed 
> the upper dome and all the upper quartz.
>
> Today we (1) pulled the lower lamps, rotation assembly and the lower 
> dome (2) cleaned the upper/lower flanges, cleared inner rotation of 
> broken wafers/quartz (3) re-installed lower dome, lower lamps and 
> rotation assembly.
>
> Tomorrow we will install the upper quartz and dome, calibrate wafer 
> placement in process chamber, pump down system and finally (if 
> everything goes well) start the bake out.
>
>

-- 
maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278



From rthowe at stanford.edu  Wed Nov 23 16:12:45 2011
From: rthowe at stanford.edu (Roger T. Howe)
Date: Wed, 23 Nov 2011 16:12:45 -0800
Subject: Epi Reactor Lower Dome update 11/23/11
In-Reply-To: <4ECD8ACD.1000507@stanford.edu>
References: <99E72A42-5C63-4703-AA1A-AA43F5BDEFFE@stanford.edu> <4EC54E23.8090703@stanford.edu> <BA674AEB-963B-4501-ADDE-419B8A22D304@snow.stanford.edu> <4EC6AE97.3090702@stanford.edu> <4ECC3F08.3070102@stanford.edu> <4ECD8ACD.1000507@stanford.edu>
Message-ID: <4ECD8BFD.3040309@stanford.edu>

Maurice,

That's great news!  Thanks for commitment to epi by coming in on Friday 
to bring it back up.

I assume that the user community is energized and ready to go.  Their 
Thanksgiving dinners should see them through the shutdown.

Roger

On 11/23/11 4:07 PM, maurice stevens wrote:
> We had a very good day!
>
> We will installed the upper quartz and dome, confirmed correct wafer 
> placement in process chamber and pumped down system.
>
> System is now baking out.  I will come in on Friday to etch the 
> chamber, get temperature readings and run silicon depositions.
>
> We will update on you all on Friday.
>
> -m
>
>
>
> On 11/22/2011 4:32 PM, maurice stevens wrote:
>> Hi All,
>>
>> We received the lower dome midday yesterday and were able to removed 
>> the upper dome and all the upper quartz.
>>
>> Today we (1) pulled the lower lamps, rotation assembly and the lower 
>> dome (2) cleaned the upper/lower flanges, cleared inner rotation of 
>> broken wafers/quartz (3) re-installed lower dome, lower lamps and 
>> rotation assembly.
>>
>> Tomorrow we will install the upper quartz and dome, calibrate wafer 
>> placement in process chamber, pump down system and finally (if 
>> everything goes well) start the bake out.
>>
>>
>



From kamins at stanford.edu  Thu Nov 24 09:47:11 2011
From: kamins at stanford.edu (Ted Kamins)
Date: Thu, 24 Nov 2011 09:47:11 -0800 (PST)
Subject: Epi Reactor Lower Dome update 11/23/11
In-Reply-To: <4ECD8ACD.1000507@stanford.edu>
Message-ID: <227871637.100204.1322156831511.JavaMail.root@zm07.stanford.edu>

Maurice,

That's great!

Thanks very much for your efforts to get the Centura running again for work requiring a critically pure ambient.  A number of students will be happy to complete depositions before the SNF shutdown, especially those needed just a few high-quality depositions to complete the experimental work for a thesis.

Have an enjoyable Thanksgiving celebration.

Ted K


----- Original Message -----
From: "maurice stevens" <maurice at stanford.edu>
To: "John Bumgarner" <jwb2005 at stanford.edu>, epi2 at snf.stanford.edu
Cc: "James Harris" <harris at snow.stanford.edu>, "Krishna Saraswat" <saraswat at stanford.edu>, "Roger T. Howe" <rthowe at stanford.edu>, "David Miller" <dabm at stanford.edu>, "Ted Kamins" <kamins at stanford.edu>, "Thomas Kenny" <kenny at cdr.stanford.edu>
Sent: Wednesday, November 23, 2011 4:07:41 PM
Subject: Epi Reactor Lower Dome update 11/23/11

We had a very good day!

We will installed the upper quartz and dome, confirmed correct wafer 
placement in process chamber and pumped down system.

System is now baking out.  I will come in on Friday to etch the chamber, 
get temperature readings and run silicon depositions.

We will update on you all on Friday.

-m



On 11/22/2011 4:32 PM, maurice stevens wrote:
> Hi All,
>
> We received the lower dome midday yesterday and were able to removed 
> the upper dome and all the upper quartz.
>
> Today we (1) pulled the lower lamps, rotation assembly and the lower 
> dome (2) cleaned the upper/lower flanges, cleared inner rotation of 
> broken wafers/quartz (3) re-installed lower dome, lower lamps and 
> rotation assembly.
>
> Tomorrow we will install the upper quartz and dome, calibrate wafer 
> placement in process chamber, pump down system and finally (if 
> everything goes well) start the bake out.
>
>

-- 
maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278



From maurice at stanford.edu  Fri Nov 25 12:08:52 2011
From: maurice at stanford.edu (Maurice M Stevens)
Date: Fri, 25 Nov 2011 12:08:52 -0800 (PST)
Subject: Epi Lower Dome complete 11/25/11
In-Reply-To: <4ECD8ACD.1000507@stanford.edu>
Message-ID: <1050014679.57200.1322251732123.JavaMail.root@zm03.stanford.edu>

Lower dome replacement complete.
System has been bake for 1.5 days.

Six long etches done on system.
Si depositions look clean and haze free.
(No water errors since Sunday)

Please! please! please run test wafers before committing your "real" wafers.  With both domes replaced and the new lower lamps (from 2 weeks ago) growth conditions will be different.  Many of you will need adjust your recipes.

-m



----- Original Message -----
From: "maurice stevens" <maurice at stanford.edu>
To: "John Bumgarner" <jwb2005 at stanford.edu>, epi2 at snf.stanford.edu
Cc: "James Harris" <harris at snow.stanford.edu>, "Krishna Saraswat" <saraswat at stanford.edu>, "Roger T. Howe" <rthowe at stanford.edu>, "David Miller" <dabm at stanford.edu>, "Ted Kamins" <kamins at stanford.edu>, "Thomas Kenny" <kenny at cdr.stanford.edu>
Sent: Wednesday, November 23, 2011 4:07:41 PM
Subject: Epi Reactor Lower Dome update 11/23/11

We had a very good day!

We will installed the upper quartz and dome, confirmed correct wafer 
placement in process chamber and pumped down system.

System is now baking out.  I will come in on Friday to etch the chamber, 
get temperature readings and run silicon depositions.

We will update on you all on Friday.

-m



On 11/22/2011 4:32 PM, maurice stevens wrote:
> Hi All,
>
> We received the lower dome midday yesterday and were able to removed 
> the upper dome and all the upper quartz.
>
> Today we (1) pulled the lower lamps, rotation assembly and the lower 
> dome (2) cleaned the upper/lower flanges, cleared inner rotation of 
> broken wafers/quartz (3) re-installed lower dome, lower lamps and 
> rotation assembly.
>
> Tomorrow we will install the upper quartz and dome, calibrate wafer 
> placement in process chamber, pump down system and finally (if 
> everything goes well) start the bake out.
>
>

-- 
maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278



From dwnam at stanford.edu  Tue Nov 29 16:48:16 2011
From: dwnam at stanford.edu (Donguk Nam)
Date: Tue, 29 Nov 2011 16:48:16 -0800
Subject: Epi2 is free until 11pm from now
Message-ID: <CAE+Tuho3nXv8qFSJ+F_8_tdCAbS3Xt=x1U-dfa0KMoPPQEHZFg@mail.gmail.com>

Sorry for the late notice.

Thanks,
Donguk
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From junam at stanford.edu  Tue Nov 29 21:16:40 2011
From: junam at stanford.edu (Ju Hyung Nam)
Date: Tue, 29 Nov 2011 21:16:40 -0800 (PST)
Subject: epi2 free 11/30 (Wed) 2a-9a (eom)
Message-ID: <150937583.283632.1322630200459.JavaMail.root@zm07.stanford.edu>