Epi Reactor lower Dome update

maurice stevens maurice at stanford.edu
Tue Nov 22 16:32:08 PST 2011


Hi All,

We received the lower dome midday yesterday and were able to removed the 
upper dome and all the upper quartz.

Today we (1) pulled the lower lamps, rotation assembly and the lower 
dome (2) cleaned the upper/lower flanges, cleared inner rotation of 
broken wafers/quartz (3) re-installed lower dome, lower lamps and 
rotation assembly.

Tomorrow we will install the upper quartz and dome, calibrate wafer 
placement in process chamber, pump down system and finally (if 
everything goes well) start the bake out.


-- 
maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278




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