Epi Reactor Lower Dome update 11/23/11

Roger T. Howe rthowe at stanford.edu
Wed Nov 23 16:12:45 PST 2011


Maurice,

That's great news!  Thanks for commitment to epi by coming in on Friday 
to bring it back up.

I assume that the user community is energized and ready to go.  Their 
Thanksgiving dinners should see them through the shutdown.

Roger

On 11/23/11 4:07 PM, maurice stevens wrote:
> We had a very good day!
>
> We will installed the upper quartz and dome, confirmed correct wafer 
> placement in process chamber and pumped down system.
>
> System is now baking out.  I will come in on Friday to etch the 
> chamber, get temperature readings and run silicon depositions.
>
> We will update on you all on Friday.
>
> -m
>
>
>
> On 11/22/2011 4:32 PM, maurice stevens wrote:
>> Hi All,
>>
>> We received the lower dome midday yesterday and were able to removed 
>> the upper dome and all the upper quartz.
>>
>> Today we (1) pulled the lower lamps, rotation assembly and the lower 
>> dome (2) cleaned the upper/lower flanges, cleared inner rotation of 
>> broken wafers/quartz (3) re-installed lower dome, lower lamps and 
>> rotation assembly.
>>
>> Tomorrow we will install the upper quartz and dome, calibrate wafer 
>> placement in process chamber, pump down system and finally (if 
>> everything goes well) start the bake out.
>>
>>
>




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