Epi Reactor Lower Dome update 11/23/11
Roger T. Howe
rthowe at stanford.edu
Wed Nov 23 16:12:45 PST 2011
That's great news! Thanks for commitment to epi by coming in on Friday
to bring it back up.
I assume that the user community is energized and ready to go. Their
Thanksgiving dinners should see them through the shutdown.
On 11/23/11 4:07 PM, maurice stevens wrote:
> We had a very good day!
> We will installed the upper quartz and dome, confirmed correct wafer
> placement in process chamber and pumped down system.
> System is now baking out. I will come in on Friday to etch the
> chamber, get temperature readings and run silicon depositions.
> We will update on you all on Friday.
> On 11/22/2011 4:32 PM, maurice stevens wrote:
>> Hi All,
>> We received the lower dome midday yesterday and were able to removed
>> the upper dome and all the upper quartz.
>> Today we (1) pulled the lower lamps, rotation assembly and the lower
>> dome (2) cleaned the upper/lower flanges, cleared inner rotation of
>> broken wafers/quartz (3) re-installed lower dome, lower lamps and
>> rotation assembly.
>> Tomorrow we will install the upper quartz and dome, calibrate wafer
>> placement in process chamber, pump down system and finally (if
>> everything goes well) start the bake out.
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