Epi Lower Dome complete 11/25/11

Maurice M Stevens maurice at stanford.edu
Fri Nov 25 12:08:52 PST 2011

Lower dome replacement complete.
System has been bake for 1.5 days.

Six long etches done on system.
Si depositions look clean and haze free.
(No water errors since Sunday)

Please! please! please run test wafers before committing your "real" wafers.  With both domes replaced and the new lower lamps (from 2 weeks ago) growth conditions will be different.  Many of you will need adjust your recipes.


----- Original Message -----
From: "maurice stevens" <maurice at stanford.edu>
To: "John Bumgarner" <jwb2005 at stanford.edu>, epi2 at snf.stanford.edu
Cc: "James Harris" <harris at snow.stanford.edu>, "Krishna Saraswat" <saraswat at stanford.edu>, "Roger T. Howe" <rthowe at stanford.edu>, "David Miller" <dabm at stanford.edu>, "Ted Kamins" <kamins at stanford.edu>, "Thomas Kenny" <kenny at cdr.stanford.edu>
Sent: Wednesday, November 23, 2011 4:07:41 PM
Subject: Epi Reactor Lower Dome update 11/23/11

We had a very good day!

We will installed the upper quartz and dome, confirmed correct wafer 
placement in process chamber and pumped down system.

System is now baking out.  I will come in on Friday to etch the chamber, 
get temperature readings and run silicon depositions.

We will update on you all on Friday.


On 11/22/2011 4:32 PM, maurice stevens wrote:
> Hi All,
> We received the lower dome midday yesterday and were able to removed 
> the upper dome and all the upper quartz.
> Today we (1) pulled the lower lamps, rotation assembly and the lower 
> dome (2) cleaned the upper/lower flanges, cleared inner rotation of 
> broken wafers/quartz (3) re-installed lower dome, lower lamps and 
> rotation assembly.
> Tomorrow we will install the upper quartz and dome, calibrate wafer 
> placement in process chamber, pump down system and finally (if 
> everything goes well) start the bake out.

maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278

More information about the epi2 mailing list