From cfchiang at stanford.edu Mon Oct 3 15:50:26 2011 From: cfchiang at stanford.edu (Chia-Fang Chiang) Date: Mon, 3 Oct 2011 15:50:26 -0700 (PDT) Subject: epi2 reservation free Wed. Oct. 5, 5-11pm Message-ID: <1310377238.2013393.1317682226068.JavaMail.root@zm06.stanford.edu> -------------- next part -------------- An HTML attachment was scrubbed... URL: From grahamab at snf.stanford.edu Tue Oct 4 09:14:14 2011 From: grahamab at snf.stanford.edu (Andrew Graham) Date: Tue, 4 Oct 2011 09:14:14 -0700 Subject: epi2 free 4pm-7pm today Message-ID: wafers not ready due to upstream equipment trouble. -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Oct 4 14:06:05 2011 From: tberg at stanford.edu (Ted Berg) Date: Tue, 04 Oct 2011 14:06:05 -0700 Subject: Reservations removed Message-ID: <4E8B753D.2010805@stanford.edu> Hello All, AMAT is finished for today so the tool is available. Ted From cfchiang at stanford.edu Tue Oct 4 21:59:31 2011 From: cfchiang at stanford.edu (Chia-Fang Chiang) Date: Tue, 4 Oct 2011 21:59:31 -0700 (PDT) Subject: epi2 free now to tomorrow 3:30 In-Reply-To: <309737775.2060266.1317790742022.JavaMail.root@zm06.stanford.edu> Message-ID: <998087481.2060289.1317790771149.JavaMail.root@zm06.stanford.edu> sorry for the short notice; was able to use the tool early plus tomorrow morning's reservation was released by other user -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Oct 6 09:38:21 2011 From: tberg at stanford.edu (Ted Berg) Date: Thu, 06 Oct 2011 09:38:21 -0700 Subject: Warning Low arsine Message-ID: <4E8DD97D.9070307@stanford.edu> Hello All, Just another warning. Arsine for Epi is very low scheduled delivery is mid next week. Use at your own discretion. Ted From cfchiang at stanford.edu Fri Oct 7 15:18:50 2011 From: cfchiang at stanford.edu (Chia-Fang Chiang) Date: Fri, 7 Oct 2011 15:18:50 -0700 (PDT) Subject: epi2 free now till tomorrow 9am Message-ID: <1541578353.2158974.1318025930269.JavaMail.root@zm06.stanford.edu> sorry for the short notice. upstream process did not go well and had to release the reservation. (midnight to 9am was open original) -------------- next part -------------- An HTML attachment was scrubbed... URL: From sclaussen at stanford.edu Tue Oct 11 11:07:44 2011 From: sclaussen at stanford.edu (Stephanie Claussen) Date: Tue, 11 Oct 2011 11:07:44 -0700 Subject: epi2 released Thursday, 8pm-8am Message-ID: Holding off for the new arsine bottle. -------------- next part -------------- An HTML attachment was scrubbed... URL: From junam at stanford.edu Tue Oct 11 22:12:51 2011 From: junam at stanford.edu (Ju Hyung Nam) Date: Tue, 11 Oct 2011 22:12:51 -0700 (PDT) Subject: epi2 free 0a~5a Message-ID: <1950774064.2194074.1318396371051.JavaMail.root@zm07.stanford.edu> From maurice at stanford.edu Thu Oct 13 08:27:25 2011 From: maurice at stanford.edu (maurice stevens) Date: Thu, 13 Oct 2011 08:27:25 -0700 Subject: Fwd: Re: Problem epi2 SNF 2011-10-06 10:00:13: DOP1 flow error Message-ID: <4E97035D.5040306@stanford.edu> from coral: -------- Original Message -------- Subject: Re: Problem epi2 SNF 2011-10-06 10:00:13: DOP1 flow error Date: Thu, 13 Oct 2011 07:55:22 -0700 From: tberg at snf.stanford.edu To: epi2-pcs at snf.stanford.edu Arsine has arrived and is installed and leak checked. Back on line at 25PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Oct 18 09:55:43 2011 From: tberg at stanford.edu (Ted Berg) Date: Tue, 18 Oct 2011 09:55:43 -0700 Subject: GeH4 is low and will be changed tomorrow Message-ID: <4E9DAF8F.1020206@stanford.edu> Hello All, Just a heads up that the Germane is getting low and will be changed tomorrow. Ted From cfchiang at stanford.edu Tue Oct 18 14:36:38 2011 From: cfchiang at stanford.edu (Chia-Fang Chiang) Date: Tue, 18 Oct 2011 14:36:38 -0700 (PDT) Subject: epi2 free tomorrow 7pm - 12am Message-ID: <943116583.2483308.1318973798291.JavaMail.root@zm06.stanford.edu> Sorry but I have to release my reservation due to upstream process issues. -------------- next part -------------- An HTML attachment was scrubbed... URL: From maurice at stanford.edu Wed Oct 19 16:54:53 2011 From: maurice at stanford.edu (maurice stevens) Date: Wed, 19 Oct 2011 16:54:53 -0700 Subject: Fwd: Problem epi2 SNF 2011-10-19 14:01:10: Changing Germane Message-ID: <4E9F634D.9060206@stanford.edu> from coral -------- Original Message -------- Subject: Problem epi2 SNF 2011-10-19 14:01:10: Changing Germane Date: Wed, 19 Oct 2011 14:01:11 -0700 From: tberg at snf.stanford.edu To: epi2-pcs at snf.stanford.edu Germane is being changed it will be down until tomorrow for leak check. -------------- next part -------------- An HTML attachment was scrubbed... URL: From lennonl at stanford.edu Wed Oct 19 20:34:43 2011 From: lennonl at stanford.edu (Lennon Yao Ting Lee) Date: Wed, 19 Oct 2011 20:34:43 -0700 (PDT) Subject: epi2 reservation released In-Reply-To: <4E9F634D.9060206@stanford.edu> Message-ID: <556668034.1957506.1319081683028.JavaMail.root@zm09.stanford.edu> Epi reservation from 12am to 11:30am on Thurs released. Recipe needs Ge. Sorry for late notice -Lennon From jasonlin at stanford.edu Thu Oct 20 22:06:23 2011 From: jasonlin at stanford.edu (J. Jason Lin) Date: Thu, 20 Oct 2011 22:06:23 -0700 Subject: epi2 free until 4pm tomorrow Message-ID: Sorry for the late notice. -------------- next part -------------- An HTML attachment was scrubbed... URL: From eldwin at stanford.edu Fri Oct 21 15:03:39 2011 From: eldwin at stanford.edu (Eldwin Jiaqiang Ng) Date: Fri, 21 Oct 2011 15:03:39 -0700 (PDT) Subject: epi2 ChA error Message-ID: <46945884.2031834.1319234619843.JavaMail.root@zm08.stanford.edu> Hi All, I'm getting an error with epi2 on ChA. On the screen, ChA highlighted in red with the error: "Ch A main scrubber fault - manual gas flows not allowed" . It's not the usual ChA door opened error. I tried resetting chamber but error reappears. Does anybody know if how to fix this or if it's legitimate problem? Don't want epi to be down for the whole weekend. eldwin From amroy at stanford.edu Fri Oct 21 16:55:39 2011 From: amroy at stanford.edu (Arunanshu Roy) Date: Fri, 21 Oct 2011 16:55:39 -0700 (PDT) Subject: reservation released tonight Message-ID: <1753884046.1208050.1319241339615.JavaMail.root@zm03.stanford.edu> Sorry for the late notification From maurice at stanford.edu Tue Oct 25 20:16:52 2011 From: maurice at stanford.edu (maurice stevens) Date: Tue, 25 Oct 2011 20:16:52 -0700 Subject: make sure your temps are at setpoint before critical steps References: <20111025235122.5332F456F92@smtp-unencrypted.stanford.edu> Message-ID: <9A605E85-BB4D-494C-ABBA-366F79B7F769@stanford.edu> > > There was a slight coating on the dome. We have run 4 Ge etches and it looks better. I did notice that the system seems to be ramping up to temp slower than we installed the last set of 4 lamps. We could be getting close to a lamp falure (we can't see the lower lamps) > - > Watch your recipes and make sure your temps are at setpoint before critical steps (like Ge deps/anneals) > From maurice at stanford.edu Wed Oct 26 18:28:18 2011 From: maurice at stanford.edu (maurice stevens) Date: Wed, 26 Oct 2011 18:28:18 -0700 Subject: Epi2 reservation from now to midnight released. Message-ID: <7C5E2B3E-E05F-448F-98C4-B994152CF5CC@stanford.edu> From Ed Fei: Epi2 reservation from now to midnight released. First few wafers came out very hazy. Good luck! Ed From cfchiang at stanford.edu Thu Oct 27 14:00:21 2011 From: cfchiang at stanford.edu (Chia-Fang Chiang) Date: Thu, 27 Oct 2011 14:00:21 -0700 (PDT) Subject: epi2 free tonight 8pm to midnight (wafer won't be ready) Message-ID: <810216074.28942.1319749221361.JavaMail.root@zm06.stanford.edu> -------------- next part -------------- An HTML attachment was scrubbed... URL: From maurice at stanford.edu Fri Oct 28 08:44:26 2011 From: maurice at stanford.edu (maurice stevens) Date: Fri, 28 Oct 2011 08:44:26 -0700 Subject: Epi2 lower lamp replacement Message-ID: <4EAACDDA.4070500@stanford.edu> Hi All, The lower lamps in Epi2 are at the end of their recommended life so Ted has contacted AMAT Field Service about replacing them. It was very difficult to change the lower lamps with only one chamber but with the second chamber installed and all it's critical parts not fastened down we think it would be best to call in FS. If you are characterizing sensitive processes you may want to wait until the lamps are replaced ...so you don't have to do it again. Once we have a scheduled day for the lamp replacement we will let you know. -m -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From ehe at stanford.edu Fri Oct 28 21:59:39 2011 From: ehe at stanford.edu (Elizabeth Edwards) Date: Fri, 28 Oct 2011 21:59:39 -0700 (PDT) Subject: epi2 2am+ reservation released In-Reply-To: <2015818870.77832.1319863408467.JavaMail.root@zm06.stanford.edu> Message-ID: <1715122552.78012.1319864379914.JavaMail.root@zm06.stanford.edu> Test wafers came back hazy/temperature overshoot and stabilization issues - lamp problem? Use with caution. From ludwig.galambos at gmail.com Sat Oct 29 10:07:47 2011 From: ludwig.galambos at gmail.com (Ludwig G.) Date: Sat, 29 Oct 2011 10:07:47 -0700 Subject: remove EPI2 Sunday rez 9pm-3am Message-ID: -------------- next part -------------- An HTML attachment was scrubbed... URL: From wangss at stanford.edu Sat Oct 29 12:09:01 2011 From: wangss at stanford.edu (Shasha Wang) Date: Sat, 29 Oct 2011 12:09:01 -0700 (PDT) Subject: reservation released 1pm-8pm Message-ID: <1438231590.82949.1319915341212.JavaMail.root@zm06.stanford.edu> sorry for the late notice. From jasonlin at stanford.edu Sat Oct 29 22:25:02 2011 From: jasonlin at stanford.edu (J. Jason Lin) Date: Sat, 29 Oct 2011 22:25:02 -0700 Subject: epi2 released tomorrow 9am - 9pm Message-ID: -------------- next part -------------- An HTML attachment was scrubbed... URL: