From sclaussen at stanford.edu Sat Sep 3 18:08:44 2011 From: sclaussen at stanford.edu (Stephanie Claussen) Date: Sat, 3 Sep 2011 18:08:44 -0700 Subject: epi2 available now until 12:30am Message-ID: I finished early and the next user just deleted his reservation. -------------- next part -------------- An HTML attachment was scrubbed... URL: From grahamab at snf.stanford.edu Mon Sep 5 00:54:25 2011 From: grahamab at snf.stanford.edu (Andrew Graham) Date: Mon, 5 Sep 2011 00:54:25 -0700 Subject: epi2 reservations released tuesday AM and PM Message-ID: happy epi-ing. -------------- next part -------------- An HTML attachment was scrubbed... URL: From maurice at stanford.edu Wed Sep 7 08:12:05 2011 From: maurice at stanford.edu (maurice stevens) Date: Wed, 07 Sep 2011 08:12:05 -0700 Subject: AMAT not coming this week Message-ID: <4E6789C5.6030508@stanford.edu> The time reserved for AMAT has been released. Wed morning to Friday afternoon is now up for graps. -m -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From danielab at gmail.com Thu Sep 8 18:23:42 2011 From: danielab at gmail.com (Daniela Buchman) Date: Thu, 8 Sep 2011 18:23:42 -0700 Subject: reservation released Message-ID: noon until 3:30 -------------- next part -------------- An HTML attachment was scrubbed... URL: From hyungkyu at stanford.edu Thu Sep 8 22:29:03 2011 From: hyungkyu at stanford.edu (hyungkyu lee) Date: Fri, 9 Sep 2011 13:29:03 +0800 Subject: epi2 reservation released today Message-ID: <9E50E457-A1A6-4AD3-8CA3-3BECCCC90460@stanford.edu> sorry for the late notice. hyungkyu Sent from my iPhone From jasonlin at stanford.edu Fri Sep 9 12:26:14 2011 From: jasonlin at stanford.edu (J. Jason Lin) Date: Fri, 9 Sep 2011 12:26:14 -0700 Subject: epi2 released 6pm tonight Message-ID: No reservations until Sat 2pm -------------- next part -------------- An HTML attachment was scrubbed... URL: From sclaussen at stanford.edu Sun Sep 11 09:15:48 2011 From: sclaussen at stanford.edu (Stephanie Claussen) Date: Sun, 11 Sep 2011 09:15:48 -0700 Subject: epi2 available midnight tonight-noon tomorrow Message-ID: Wasn't able to get wafers ready in time. -------------- next part -------------- An HTML attachment was scrubbed... URL: From eldwin at stanford.edu Mon Sep 12 18:12:51 2011 From: eldwin at stanford.edu (Eldwin Ng) Date: Mon, 12 Sep 2011 18:12:51 -0700 Subject: epi2 reservation released tomorrow 2-8pm Message-ID: <4E6EAE13.5020304@stanford.edu> wafers not ready, epi2 looks free from now to tomorrow evening From jasonlin at stanford.edu Wed Sep 14 13:08:00 2011 From: jasonlin at stanford.edu (J. Jason Lin) Date: Wed, 14 Sep 2011 13:08:00 -0700 Subject: epi2 released 3pm - 3am Message-ID: No GeH4. -------------- next part -------------- An HTML attachment was scrubbed... URL: From maurice at stanford.edu Wed Sep 14 16:29:28 2011 From: maurice at stanford.edu (maurice stevens) Date: Wed, 14 Sep 2011 16:29:28 -0700 Subject: How do I download receipes from EPi tool In-Reply-To: References: <4E0A6620.2040209@stanford.edu> Message-ID: <4E7138D8.5060207@stanford.edu> Hi Bin, Good question. This is the perfect time to remind everyone that they should remove all their recipes from Epi2 because all recipes will be deleted over the long break. This is the second warning. Below is the process for copying recipes. Remember that the floppy drive is in the back service isle. 1. Go to Program Menu 2. Go to Recipe Dir 3. Touch "Back up" at the bottom of the screen 4. Touch "Save recipe to floppy" 5. Select recipes you want to save (selected recipes will turn red) 6. Touch "Save selected to floppy" 7. Insert your floppy and touch "touch here" (put your windows formatted 3.5' floppy in Epi2 floppy drive located in back service isle) 8. Hourglass will display while recipes is being saved...be patient. -m On 9/14/2011 4:05 PM, Yang, Bin wrote: > > Hi Maurice, > > I remember we are supposed to get the recipes off the tool, could you > let me know how to do it? > > Thanks, > > Bin > -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 -------------- next part -------------- An HTML attachment was scrubbed... URL: From eldwin at stanford.edu Wed Sep 14 17:48:39 2011 From: eldwin at stanford.edu (Eldwin Jiaqiang Ng) Date: Wed, 14 Sep 2011 17:48:39 -0700 (PDT) Subject: epi2 reservation released 11am-3pm tomorrow Message-ID: <332947898.362415.1316047719937.JavaMail.root@zm08.stanford.edu> Was able to get on the tool today eldwin From maurice at stanford.edu Thu Sep 15 13:26:50 2011 From: maurice at stanford.edu (maurice stevens) Date: Thu, 15 Sep 2011 13:26:50 -0700 Subject: GeH4 is installed Message-ID: <4E725F8A.9020800@stanford.edu> Hi All, Ted says Ge here and ready to run. This is a new bottle... you may need to adjust your recipes to get the same results as previous runs. As you always do after any change is made to the system, run tests before committing your real wafers. -m From jasonlin at stanford.edu Fri Sep 16 14:46:46 2011 From: jasonlin at stanford.edu (J. Jason Lin) Date: Fri, 16 Sep 2011 14:46:46 -0700 Subject: epi2 free now - 2:30am Message-ID: Didn't see that HCl finished installing, samples not ready. -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Sep 19 13:41:14 2011 From: tberg at stanford.edu (Ted Berg) Date: Mon, 19 Sep 2011 13:41:14 -0700 Subject: Reservations on Epi Message-ID: <4E77A8EA.9020203@stanford.edu> Hello All, You may have noticed large blocks of reservations, these are to accommodate AMAT working on installing the second chamber. All of their work for now will be non intrusive. You will see reservations change to accommodate their busy schedule. I am removing the reservations for this evening until tomorrow afternoon so this time is up for grabs. We appreciate your understanding as we move ahead on this install. Ted From tberg at stanford.edu Wed Sep 21 05:57:32 2011 From: tberg at stanford.edu (Ted Berg) Date: Wed, 21 Sep 2011 05:57:32 -0700 Subject: reservations cancelled Message-ID: <4E79DF3C.5000107@stanford.edu> Hello all, Ihave cancelled the early morning reservations. so epi is available until 10:00am From tberg at stanford.edu Wed Sep 21 11:38:38 2011 From: tberg at stanford.edu (Ted Berg) Date: Wed, 21 Sep 2011 11:38:38 -0700 Subject: Reservations released Message-ID: <4E7A2F2E.5070500@stanford.edu> Hello All, I am releasing reservation. Looks like AMAT is a no show. Ted From eldwin at stanford.edu Sat Sep 24 08:17:49 2011 From: eldwin at stanford.edu (Eldwin Ng) Date: Sat, 24 Sep 2011 08:17:49 -0700 Subject: reservation released 5:30-8pm today, 10am-3pm sun Message-ID: <4E7DF49D.6040703@stanford.edu> was able to finish processing wafers From maurice at stanford.edu Tue Sep 27 16:35:02 2011 From: maurice at stanford.edu (maurice stevens) Date: Tue, 27 Sep 2011 16:35:02 -0700 Subject: Arsine update In-Reply-To: <4E8246E5.6070303@stanford.edu> References: <01a801cc7d5a$6d588c30$4809a490$@stanford.edu> <4E8246E5.6070303@stanford.edu> Message-ID: <4E825DA6.9020100@stanford.edu> Hello John and Epi Users, We have arsine. The high side quarter turn valve on the arsine gas panel was off. We believe it has been off since the last shutdown. We have been using the pressure in the line since that time. The vavle is now open and we currently have 80 psi in the bottle. We believe this will get us to the end on the year if the usage rate is normal. Epi2 doesn't use much arsine...so when the pressure dropped on Sept 8th we were surprised and quickly ordered another bottle. The new bottle is still scheduled to arrive around Oct 14th (five weeks after we ordered it). We will schedule time to install the new bottle when it arrives. We know this incident has caused some of you to modify recipes and give up reserved time. We apologize for the inconveniences and will be putting policies in place to help prevent these type of incidents in the future. -m -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From wangss at stanford.edu Tue Sep 27 17:36:52 2011 From: wangss at stanford.edu (Shasha Wang) Date: Tue, 27 Sep 2011 17:36:52 -0700 (PDT) Subject: epi2 is free now to 7:30pm Message-ID: <835481034.1839715.1317170212930.JavaMail.root@zm06.stanford.edu> From eldwin at stanford.edu Wed Sep 28 20:58:10 2011 From: eldwin at stanford.edu (Eldwin Ng) Date: Wed, 28 Sep 2011 20:58:10 -0700 Subject: epi2 free from 11am-2pm tomorrow Message-ID: <4E83ECD2.6090008@stanford.edu> rescheduled reservation as wafers won't be ready From maurice at stanford.edu Thu Sep 29 13:19:29 2011 From: maurice at stanford.edu (maurice stevens) Date: Thu, 29 Sep 2011 13:19:29 -0700 Subject: etch reminder In-Reply-To: <20110929155250.E6A13556E@smtp-unencrypted.stanford.edu> References: <20110929155250.E6A13556E@smtp-unencrypted.stanford.edu> Message-ID: <4E84D2D1.4020403@stanford.edu> It is very important that the etch program runs to completion. Do not run your deposition if the etch does not finish. The last time the dome was coated it cost us a week of down time and $10k in parts. If you damage the system because you ran with an etch you will be held responsible for the cost of replacement parts. If you can't get the etch program to run after several tries, yellow light the system and send an email to the epi2 email list. If you normally use the Si etch program you can also use the Ge etch program. It will be longer but it will etch the dome. -m On 9/29/2011 8:52 AM, eldwin at snf.stanford.edu wrote: > Error encountered during cleaning recipe etchcoat and cleaning process was aborted. Subsequent user also had pressure setpoint warnings. > -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278