Epi2 Chamber A up!

maurice stevens maurice at stanford.edu
Mon Apr 9 15:19:48 PDT 2012

Good News,

We ran silicon tests this morning and they look good.  No Haze and 
deposition rate is normal.

The dopant gases are still off ( phos, arsine, diborane) until tomorrow 

The Ge, silane, DCS and HCL are on.

The system has been off for several months... so expect that you will 
need to recharacterize your processes.

maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278

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