Epi2 Chamber A up!

maurice stevens maurice at stanford.edu
Mon Apr 9 15:19:48 PDT 2012


Good News,

We ran silicon tests this morning and they look good.  No Haze and 
deposition rate is normal.

The dopant gases are still off ( phos, arsine, diborane) until tomorrow 
morning.

The Ge, silane, DCS and HCL are on.

The system has been off for several months... so expect that you will 
need to recharacterize your processes.


-- 
maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278




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