Epi2 Chamber A up!
Roger T. Howe
rthowe at stanford.edu
Mon Apr 9 18:00:07 PDT 2012
Great that it's back in action -- look forward to the processes being
dialed in. (And, chamber B coming up!)
On 4/9/12 3:19 PM, maurice stevens wrote:
> Good News,
> We ran silicon tests this morning and they look good. No Haze and
> deposition rate is normal.
> The dopant gases are still off ( phos, arsine, diborane) until
> tomorrow morning.
> The Ge, silane, DCS and HCL are on.
> The system has been off for several months... so expect that you will
> need to recharacterize your processes.
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