Epi2 silane, HCl deviation

J. Jason Lin jasonlin at stanford.edu
Tue Apr 10 15:57:05 PDT 2012


Deviation error for silane (during Ed's recipe), and HCl (during Ge Etch
Coat).  Looks like a valve's closed or out of gas?

It doesn't seem usable, but not shutting it down so Ed can retrieve his
wafers from LL.
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