epi up/siline MFC issue
Maurice M Stevens
maurice at stanford.edu
Wed Apr 18 15:45:18 PDT 2012
HCl Issue:
Setpoint for hi side pressure transducer adjusted
.
HCl bottle changed
.
Contactor Issue:
Step 7 time reduced from 120 sec to 100sec
Step 7 time reduced from 120 sec to 100sec
Step 8 temp reduced from 1100c to 950c
Program is now running without waferflow/contactor error
New problem:
Silane MFC is not working properly. New MFC ordered.
(Thanks Ed for your help on this)
-m
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