epi up/siline MFC issue

Maurice M Stevens maurice at stanford.edu
Wed Apr 18 15:45:18 PDT 2012


HCl Issue:
Setpoint for hi side pressure transducer adjusted
.
HCl bottle changed
.

Contactor Issue:
Step 7 time reduced from 120 sec to 100sec

Step 7 time reduced from 120 sec to 100sec

Step 8 temp reduced from 1100c to 950c

Program is now running without waferflow/contactor error


New problem:
Silane MFC is not working properly.  New MFC ordered.
 (Thanks Ed for your help on this)

-m



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