From junam at stanford.edu Fri Aug 3 14:49:03 2012 From: junam at stanford.edu (Ju Hyung Nam) Date: Fri, 3 Aug 2012 14:49:03 -0700 (PDT) Subject: epi released: 4p to 9p today Message-ID: <1904981009.44349880.1344030543956.JavaMail.root@zm07.stanford.edu> eom From sclaussen at stanford.edu Wed Aug 8 10:14:49 2012 From: sclaussen at stanford.edu (Stephanie Claussen) Date: Wed, 8 Aug 2012 10:14:49 -0700 Subject: epi2 available today, 2-8pm and 4-10am Message-ID: -------------- next part -------------- An HTML attachment was scrubbed... URL: From apal at stanford.edu Thu Aug 9 14:54:03 2012 From: apal at stanford.edu (Ashish Pal) Date: Thu, 9 Aug 2012 14:54:03 -0700 (PDT) Subject: Slot released Fri 6AM-10AM, SUN 10:30AM-3:00PM, MON 6:30AM-10AM In-Reply-To: <554046283.55894547.1344549240439.JavaMail.root@zm09.stanford.edu> Message-ID: <1571068855.55894761.1344549243815.JavaMail.root@zm09.stanford.edu> Best Regards Ashish From andreas_goebel at sbcglobal.net Wed Aug 15 16:10:08 2012 From: andreas_goebel at sbcglobal.net (Andreas Goebel) Date: Wed, 15 Aug 2012 16:10:08 -0700 Subject: released reservation from 7 am to 11 am tomorrow Message-ID: <5A853398-993E-47A9-BDB5-09A48415F4FB@sbcglobal.net> Wafers not ready From maurice at stanford.edu Thu Aug 16 09:52:45 2012 From: maurice at stanford.edu (maurice stevens) Date: Thu, 16 Aug 2012 09:52:45 -0700 Subject: Reservation vs enabled time Message-ID: <502D255D.4000208@stanford.edu> Hello Epi community, If you reserve time on the Epi system you are also expected to enable it during your reserved time...even if you are working with others on the same project. If you reserve time and then someone else enables the machine, it appears that you are helping someone get around the reservation limit. I am sure that you would try to get around the reservation limit because that would be wrong. If you enable the tube during another users reserved time, it appears that many people are doing work but the work is only charged to one person. I am sure that you would not do this because that would mean you were trying to avoid everyone paying for the time they used and that would be wrong. So, let me strongly stress that if you reserve the time you are expected to enable the tool. You cannot reserve time for others...even if they are in your group or working on the same project. You could be removed from the lab for up to a month for violating coral polices. Other users making the reservations for you use could also be removed from the lab. The next user not enabling over you will not be accepted as a valid excuse. You are responsible for your wafers and your time on the tool. Please come speak with me if you don't understand this email. I don't want you to lose access to the lab and precious research time because of this issue. -m -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From maurice at stanford.edu Mon Aug 20 08:57:24 2012 From: maurice at stanford.edu (maurice stevens) Date: Mon, 20 Aug 2012 08:57:24 -0700 Subject: Epi2 Contactor/water flow Issue update Message-ID: <50325E64.5080705@stanford.edu> Ted expects AMAT to be here at 10:00am today to investigate the contactor/water issue. -m -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From andreas_goebel at sbcglobal.net Mon Aug 20 16:13:40 2012 From: andreas_goebel at sbcglobal.net (Andreas Goebel) Date: Mon, 20 Aug 2012 16:13:40 -0700 Subject: reservation released - today from 3:30 pm Message-ID: <83BB6C17-D43C-49FE-98B0-A8E5625EAC0B@sbcglobal.net> Tool is still down for maintenance; From maurice at stanford.edu Mon Aug 20 17:38:46 2012 From: maurice at stanford.edu (maurice stevens) Date: Mon, 20 Aug 2012 17:38:46 -0700 Subject: Epi Up!/water flow meter replaced In-Reply-To: <13359250.63.1345509136758.JavaMail.coral@shine> References: <13359250.63.1345509136758.JavaMail.coral@shine> Message-ID: <5032D896.7080900@stanford.edu> from Coral: -------- Original Message -------- Subject: Re: Problem epi2 SNF 2012-08-16 22:22:12: Heater Contactor problems Date: Mon, 20 Aug 2012 17:32:17 -0700 (PDT) From: maurice at snf.stanford.edu To: epi2-pcs at snf.stanford.edu Center H2O water flow meter replaced by AMAT after checking flows in each leg. Increased etch temperatures back to 1150c. Ran 4 etch with more errors. This was the first AMAT call under the new service contract. Good results! -------------- next part -------------- An HTML attachment was scrubbed... URL: From maurice at stanford.edu Thu Aug 23 16:41:59 2012 From: maurice at stanford.edu (maurice stevens) Date: Thu, 23 Aug 2012 16:41:59 -0700 Subject: Epi2 down : Problem epi2 SNF 2012-08-23 09:18:11: Ch A DC Motor Hardware Interlock In-Reply-To: <23252986.77.1345738692377.JavaMail.coral@shine> References: <23252986.77.1345738692377.JavaMail.coral@shine> Message-ID: <5036BFC7.6000008@stanford.edu> Hi All, Eldwin reported a rotation error this morning. Ted ran the rotation in manual and found that the system does not give the error when run manually...only when running a recipe. Ted called AMAT (because we have a bright shiny new service contract) and they came in after lunch and confirmed that we have a rotation interlock issue. The rotation is turning on but some interlock is shutting the system down. They went back to the office to do some research on the tool interlocks. We expect to hear from them tomorrow. -m -------- Original Message -------- Subject: Problem epi2 SNF 2012-08-23 09:18:11: Ch A DC Motor Hardware Interlock Date: Thu, 23 Aug 2012 09:18:13 -0700 (PDT) From: eldwin at snf.stanford.edu To: epi2-pcs at snf.stanford.edu Getting the error above and process aborted during clean cycle -------------- next part -------------- An HTML attachment was scrubbed... URL: From maurice at stanford.edu Fri Aug 24 15:34:57 2012 From: maurice at stanford.edu (maurice stevens) Date: Fri, 24 Aug 2012 15:34:57 -0700 Subject: Epi2 update : Problem epi2 SNF 2012-08-23 09:18:11: Ch A DC Motor Hardware Interlock In-Reply-To: <5036BFC7.6000008@stanford.edu> References: <23252986.77.1345738692377.JavaMail.coral@shine> <5036BFC7.6000008@stanford.edu> Message-ID: <50380191.4060907@stanford.edu> AMAT believes they have identified the rotation problem. They have seen this on other systems in the field and have a fix (a capacitor on the rotation control board). We expect them in on Monday morning to either replace or repair the board. So the system will be down over the weekend. -m On 8/23/2012 4:41 PM, maurice stevens wrote: > Hi All, > > Eldwin reported a rotation error this morning. > > Ted ran the rotation in manual and found that the system does not give > the error when run manually...only when running a recipe. > > Ted called AMAT (because we have a bright shiny new service contract) > and they came in after lunch and confirmed that we have a rotation > interlock issue. The rotation is turning on but some interlock is > shutting the system down. They went back to the office to do some > research on the tool interlocks. > > We expect to hear from them tomorrow. > > -m > > > -------- Original Message -------- > Subject: Problem epi2 SNF 2012-08-23 09:18:11: Ch A DC Motor Hardware > Interlock > Date: Thu, 23 Aug 2012 09:18:13 -0700 (PDT) > From: eldwin at snf.stanford.edu > To: epi2-pcs at snf.stanford.edu > > > > Getting the error above and process aborted during clean cycle > > > -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 -------------- next part -------------- An HTML attachment was scrubbed... URL: From maurice at stanford.edu Mon Aug 27 16:08:30 2012 From: maurice at stanford.edu (maurice stevens) Date: Mon, 27 Aug 2012 16:08:30 -0700 Subject: Epi2 update 8/27/12: rotation interlock In-Reply-To: <50380191.4060907@stanford.edu> References: <23252986.77.1345738692377.JavaMail.coral@shine> <5036BFC7.6000008@stanford.edu> <50380191.4060907@stanford.edu> Message-ID: <503BFDEE.2060900@stanford.edu> Hello, AMAT has been here most of the day trying to resolve the rotation issue. Adding the capacitor to the control board did not solve the interlock problem. They have found that the rotation board is not getting it's required 24volts. We don't have a estimate of how long this will take to fix. AMAT continues to work on it and we will update you tomorrow. -m On 8/24/2012 3:34 PM, maurice stevens wrote: > AMAT believes they have identified the rotation problem. They have > seen this on other systems in the field and have a fix (a capacitor on > the rotation control board). We expect them in on Monday morning to > either replace or repair the board. > > So the system will be down over the weekend. > > -m > > > On 8/23/2012 4:41 PM, maurice stevens wrote: >> Hi All, >> >> Eldwin reported a rotation error this morning. >> >> Ted ran the rotation in manual and found that the system does not >> give the error when run manually...only when running a recipe. >> >> Ted called AMAT (because we have a bright shiny new service contract) >> and they came in after lunch and confirmed that we have a rotation >> interlock issue. The rotation is turning on but some interlock is >> shutting the system down. They went back to the office to do some >> research on the tool interlocks. >> >> We expect to hear from them tomorrow. >> >> -m >> >> >> -------- Original Message -------- >> Subject: Problem epi2 SNF 2012-08-23 09:18:11: Ch A DC Motor >> Hardware Interlock >> Date: Thu, 23 Aug 2012 09:18:13 -0700 (PDT) >> From: eldwin at snf.stanford.edu >> To: epi2-pcs at snf.stanford.edu >> >> >> >> Getting the error above and process aborted during clean cycle >> >> >> > > -- > maurice at stanford.edu > > Maurice Stevens > Stanford Nanofabrication Facility > CIS Room 142, Mail Code 4070 > Stanford, CA 94305 > P. (650)725-3660 > F. (650)725.6278 -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 -------------- next part -------------- An HTML attachment was scrubbed... URL: From maurice at stanford.edu Tue Aug 28 15:34:23 2012 From: maurice at stanford.edu (maurice stevens) Date: Tue, 28 Aug 2012 15:34:23 -0700 Subject: Epi2 up! rotation interlock resolved In-Reply-To: <503BFDEE.2060900@stanford.edu> References: <23252986.77.1345738692377.JavaMail.coral@shine> <5036BFC7.6000008@stanford.edu> <50380191.4060907@stanford.edu> <503BFDEE.2060900@stanford.edu> Message-ID: <503D476F.6080004@stanford.edu> Hi All, Epi is back up. AMAT resolved the interlock issue (installed capacitor on rotation, blown fuse replaced, cable connector repaired...) and Ted ran several etches on the tool to verify the fix. -m On 8/27/2012 4:08 PM, maurice stevens wrote: > Hello, > > AMAT has been here most of the day trying to resolve the rotation issue. > Adding the capacitor to the control board did not solve the interlock > problem. > They have found that the rotation board is not getting it's required > 24volts. > > We don't have a estimate of how long this will take to fix. > > AMAT continues to work on it and we will update you tomorrow. > > > > > -m > > On 8/24/2012 3:34 PM, maurice stevens wrote: >> AMAT believes they have identified the rotation problem. They have >> seen this on other systems in the field and have a fix (a capacitor >> on the rotation control board). We expect them in on Monday morning >> to either replace or repair the board. >> >> So the system will be down over the weekend. >> >> -m >> >> >> On 8/23/2012 4:41 PM, maurice stevens wrote: >>> Hi All, >>> >>> Eldwin reported a rotation error this morning. >>> >>> Ted ran the rotation in manual and found that the system does not >>> give the error when run manually...only when running a recipe. >>> >>> Ted called AMAT (because we have a bright shiny new service >>> contract) and they came in after lunch and confirmed that we have a >>> rotation interlock issue. The rotation is turning on but some >>> interlock is shutting the system down. They went back to the office >>> to do some research on the tool interlocks. >>> >>> We expect to hear from them tomorrow. >>> >>> -m >>> >>> >>> -------- Original Message -------- >>> Subject: Problem epi2 SNF 2012-08-23 09:18:11: Ch A DC Motor >>> Hardware Interlock >>> Date: Thu, 23 Aug 2012 09:18:13 -0700 (PDT) >>> From: eldwin at snf.stanford.edu >>> To: epi2-pcs at snf.stanford.edu >>> >>> >>> >>> Getting the error above and process aborted during clean cycle >>> >>> >>> >> >> -- >> maurice at stanford.edu >> >> Maurice Stevens >> Stanford Nanofabrication Facility >> CIS Room 142, Mail Code 4070 >> Stanford, CA 94305 >> P. (650)725-3660 >> F. (650)725.6278 > > -- > maurice at stanford.edu > > Maurice Stevens > Stanford Nanofabrication Facility > CIS Room 142, Mail Code 4070 > Stanford, CA 94305 > P. (650)725-3660 > F. (650)725.6278 -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Aug 29 13:55:33 2012 From: tberg at stanford.edu (Ted Berg) Date: Wed, 29 Aug 2012 13:55:33 -0700 Subject: No Phosphine overnight Message-ID: <503E81C5.7010005@stanford.edu> Hello All, we are doing some testing on the phosphine panel so there will be no phosphine to the epi overnight. Ted