From maurice at stanford.edu  Fri Dec  7 10:22:37 2012
From: maurice at stanford.edu (maurice stevens)
Date: Fri, 7 Dec 2012 10:22:37 -0800
Subject: epi forecast ???
In-Reply-To: <50C2299F.1060502@acorntech.com>
References: <50C222A6.7010602@acorntech.com> <0693F683-B70D-472A-ABF9-F99DA8780AB5@stanford.edu> <50C2299F.1060502@acorntech.com>
Message-ID: <2038EEC9-C585-41EC-B218-BBD69D39D42F@stanford.edu>

I am hoping for next Wed (optimistically).  

AMAT found deposition in the rotation assembly when they started the dome replacement.  They are having to rebuild the assembly.

We (and AMAT) had not expected to rebuild the rotation so they have been scrambling to get part numbers (some have changed) and we then scramble to get the parts ordered.

I have attached a photo of the chamber?removed chamber.  The upper left is the upper lamp assembly hinged to the frame.  The ring in the middle is where the chamber (upper dome, suscepter, suscepter support, pin supports, inner quartz and lower dome) normally sit.  The area below the ring and above the clear plastic bag is the spot for the lower lamp bank assembly, rotation assembly, pressure control valve and the exhaust piping.

All the lamps in the lower bank have been replace and it is ready to go back in.   We are now waiting for  a "Teflon Encapsulated O-ring"  for the lower dome install and a few parts for the rotation.  Everything else can be installed after the lower dome is in place.







On Dec 7, 2012, at 9:38 AM, Andreas Goebel <goebel at acorntech.com> wrote:

> Thanks Maurice, that's bad news.
> Is there a time horizon for when it will be up again?
> 
> Andreas
> 
> 
> On 12/7/12 9:33 AM, maurice stevens wrote:
>> System will not be up today.  AMAT is still gathering parts to rebuild the rotation.
>> 
>> 
>> -m
>> On Dec 7, 2012, at 9:08 AM, Andreas Goebel <goebel at acorntech.com> wrote:
>> 
>>> Hi Maurice, Ted,
>>> 
>>> is there an estimate on when the tool will be up and ready to run properly?
>>> I am scheduled for 4 pm today. Can I expect that this will work, or are there more problems?
>>> 
>>> Best,
>>> 
>>> Andreas
>>> 
>>> -- 
>>> Andreas Goebel
>>> cell 650-224-2690
>>> 
> 
> -- 
> Andreas Goebel
> cell 650-224-2690
> 

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From maurice at stanford.edu  Fri Dec  7 11:22:47 2012
From: maurice at stanford.edu (maurice stevens)
Date: Fri, 7 Dec 2012 11:22:47 -0800
Subject: epi forecast ???
In-Reply-To: <3ACE58A0-DAD4-4616-B76E-AFA2E93B129C@snow.stanford.edu>
References: <50C222A6.7010602@acorntech.com> <0693F683-B70D-472A-ABF9-F99DA8780AB5@stanford.edu> <50C2299F.1060502@acorntech.com> <2038EEC9-C585-41EC-B218-BBD69D39D42F@stanford.edu> <3ACE58A0-DAD4-4616-B76E-AFA2E93B129C@snow.stanford.edu>
Message-ID: <5A407CEF-39D7-4ECC-B6DC-482B82133785@stanford.edu>

We are looking closely at the rotation assembly.  There was much more deposition in that area than we and AMAT expected. 


-m
On Dec 7, 2012, at 10:33 AM, James Harris <harris at snow.stanford.edu> wrote:

> Maurice,
> Many thanks for the update. A key issue from the samples and SIMS work that Ed Fei has helped with shows high level of O in the Si layers, so has AMAT found any type of leak in the chamber?
> Jim
> 
> On Dec 7, 2012, at 10:22 AM, maurice stevens wrote:
> 
>> I am hoping for next Wed (optimistically).  
>> 
>> AMAT found deposition in the rotation assembly when they started the dome replacement.  They are having to rebuild the assembly.
>> 
>> We (and AMAT) had not expected to rebuild the rotation so they have been scrambling to get part numbers (some have changed) and we then scramble to get the parts ordered.
>> 
>> I have attached a photo of the chamber?removed chamber.  The upper left is the upper lamp assembly hinged to the frame.  The ring in the middle is where the chamber (upper dome, suscepter, suscepter support, pin supports, inner quartz and lower dome) normally sit.  The area below the ring and above the clear plastic bag is the spot for the lower lamp bank assembly, rotation assembly, pressure control valve and the exhaust piping.
>> 
>> All the lamps in the lower bank have been replace and it is ready to go back in.   We are now waiting for  a "Teflon Encapsulated O-ring"  for the lower dome install and a few parts for the rotation.  Everything else can be installed after the lower dome is in place.
>> 
>> 
>> 
>> 
>> !DSPAM:50c233f558811307216671!
>> <epi_chamber.JPG>
>> 
>> 
>> On Dec 7, 2012, at 9:38 AM, Andreas Goebel <goebel at acorntech.com> wrote:
>> 
>>> Thanks Maurice, that's bad news.
>>> Is there a time horizon for when it will be up again?
>>> 
>>> Andreas
>>> 
>>> 
>>> On 12/7/12 9:33 AM, maurice stevens wrote:
>>>> System will not be up today.  AMAT is still gathering parts to rebuild the rotation.
>>>> 
>>>> 
>>>> -m
>>>> On Dec 7, 2012, at 9:08 AM, Andreas Goebel <goebel at acorntech.com> wrote:
>>>> 
>>>>> Hi Maurice, Ted,
>>>>> 
>>>>> is there an estimate on when the tool will be up and ready to run properly?
>>>>> I am scheduled for 4 pm today. Can I expect that this will work, or are there more problems?
>>>>> 
>>>>> Best,
>>>>> 
>>>>> Andreas
>>>>> 
>>>>> -- 
>>>>> Andreas Goebel
>>>>> cell 650-224-2690
>>>>> 
>>> 
>>> -- 
>>> Andreas Goebel
>>> cell 650-224-2690
>>> 
>> 
>> !DSPAM:50c233f558811307216671!
> 
> 
> James S. Harris    '64
> James & Ellenor Chesebrough Professor		E-Mail:Harris at snow.stanford.edu
>  Department of Electrical Engineering			http://www-ee.stanford.edu/~harris/
>  ALLEN Rm 328, 420 Via Palou Mall			Ph:  (650)723-9775
>  Stanford, CA 94305-4075						Fax: (650)723-4659                                   
>  Adm. Asst.: Gail Chun-Creech					Ph:  (650)723-0983
> 

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From maurice at stanford.edu  Fri Dec  7 12:11:01 2012
From: maurice at stanford.edu (maurice stevens)
Date: Fri, 7 Dec 2012 12:11:01 -0800
Subject: All epi recipes removed during shutdown!
In-Reply-To: <4E445DC4.5030503@snf.stanford.edu>
References: <4E445DC4.5030503@snf.stanford.edu>
Message-ID: <A7498ECC-FBFE-4719-9FA2-CCC3874D25E3@stanford.edu>



> First Notice:
> 
> All user recipes will be removed from the Epi2 hard drive during the holiday shutdown in December.
> 
> Recipes should be moved to user's floppies before the shutdown.
> 
> Please spread this message to your group members.
> 
> (I would suggest that you always have copies of your recipes on a floppy...just in case ...)



From maurice at stanford.edu  Tue Dec 11 08:24:50 2012
From: maurice at stanford.edu (maurice stevens)
Date: Tue, 11 Dec 2012 08:24:50 -0800
Subject: Copy your epi recipes before shutdown!  2nd notice
In-Reply-To: <A7498ECC-FBFE-4719-9FA2-CCC3874D25E3@stanford.edu>
References: <4E445DC4.5030503@snf.stanford.edu> <A7498ECC-FBFE-4719-9FA2-CCC3874D25E3@stanford.edu>
Message-ID: <4D5D8169-089B-4FC4-8E8A-7F9192B43E36@stanford.edu>

>> Second Notice:
>> 
>> All user recipes will be removed from the Epi2 hard drive during the holiday shutdown in December.
>> 
>> Recipes should be moved to user's floppies before the shutdown.  Only eight days left.
>> 
>> (This would be a really good time to remove your recipes while the chamber is out.)


> 

On Dec 7, 2012, at 12:11 PM, maurice stevens <maurice at stanford.edu> wrote:

> 
> 
>> First Notice:
>> 
>> All user recipes will be removed from the Epi2 hard drive during the holiday shutdown in December.
>> 
>> Recipes should be moved to user's floppies before the shutdown.
>> 
>> Please spread this message to your group members.
>> 
>> (I would suggest that you always have copies of your recipes on a floppy...just in case ...)
> 



From maurice at stanford.edu  Tue Dec 11 11:33:46 2012
From: maurice at stanford.edu (maurice stevens)
Date: Tue, 11 Dec 2012 11:33:46 -0800
Subject: procedure: How to copy your epi recipes to a floppy
In-Reply-To: <E739829C-2299-4D77-8FE4-1B9CF7B7CB1C@sbcglobal.net>
References: <4E445DC4.5030503@snf.stanford.edu> <A7498ECC-FBFE-4719-9FA2-CCC3874D25E3@stanford.edu> <4D5D8169-089B-4FC4-8E8A-7F9192B43E36@stanford.edu> <E739829C-2299-4D77-8FE4-1B9CF7B7CB1C@sbcglobal.net>
Message-ID: <E1AFB8DF-D780-4D36-B3BD-CAD062EDC542@stanford.edu>

This is a very very slow process.  I recommend only doing a few recipes at a time.


Go to Program Menu
Go to Recipe Dir
Touch ?Back up? at the bottom of the screen
Touch ?Save recipe to floppy?
Select recipes you want to save (selected recipes will turn red)
Touch ?Save selected to floppy?
Insert your floppy (put your windows formatted 3.5? floppy in Epi2 floppy drive located in back service isle)
Touch ?touch here? 
Hourglass will display while recipes is being saved?be patient.

> 
> 
>>>> Second Notice:
>>>> 
>>>> All user recipes will be removed from the Epi2 hard drive during the holiday shutdown in December.
>>>> 
>>>> Recipes should be moved to user's floppies before the shutdown.  Only eight days left.
>>>> 
>>>> (This would be a really good time to remove your recipes while the chamber is out.)
>> 
>> 
>>> 
>> 
>> On Dec 7, 2012, at 12:11 PM, maurice stevens <maurice at stanford.edu> wrote:
>> 
>>> 
>>> 
>>>> First Notice:
>>>> 
>>>> All user recipes will be removed from the Epi2 hard drive during the holiday shutdown in December.
>>>> 
>>>> Recipes should be moved to user's floppies before the shutdown.
>>>> 
>>>> Please spread this message to your group members.
>>>> 
>>>> (I would suggest that you always have copies of your recipes on a floppy...just in case ...)
>>> 
>> 
> 



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From tberg at stanford.edu  Wed Dec 12 14:01:40 2012
From: tberg at stanford.edu (Ted Berg)
Date: Wed, 12 Dec 2012 14:01:40 -0800
Subject: System is going back together
Message-ID: <50C8FEC4.2040900@stanford.edu>

All parts are in house now and assembly has begun. Lower dome is
on and lower lamp module is going back on next . Still a long way to go. Ted


From tberg at stanford.edu  Thu Dec 13 12:32:01 2012
From: tberg at stanford.edu (Ted Berg)
Date: Thu, 13 Dec 2012 12:32:01 -0800
Subject: Current Epi status
Message-ID: <50CA3B41.6020204@stanford.edu>

Hello,
     Applied has installed the lower dome and lower lamp module. They 
are working on rebuilding the rotation assembly. Progress has been 
somewhat slow waiting for parts and personnel. If things go smoothly 
there is a chance it will be up but just barely before  the shutdown. I 
would not count on it as we will have to do some testing before it is 
released.Ted


From tberg at stanford.edu  Mon Dec 17 06:40:19 2012
From: tberg at stanford.edu (Ted Berg)
Date: Mon, 17 Dec 2012 06:40:19 -0800
Subject: Epi Status
Message-ID: <50CF2ED3.3010507@stanford.edu>

Hello All,
     Just a brief update on Epi Status.

Applied was able to complete the rebuild of the Rotation assembly but was unable to perform leak testing. One item (a Fastener & its Nut Rotation Assembly) from the Dome Clamp was lost in the MF during disassembly/removal of the Rotation and they were unable to locate it Friday. The parts were ordered and they will be on-site Monday Dec. 17. Once the Rotation passes leak testing, assembly of the chamber can be completed.