From maurice at stanford.edu Fri Feb 3 08:03:27 2012 From: maurice at stanford.edu (maurice stevens) Date: Fri, 03 Feb 2012 08:03:27 -0800 Subject: Epi2 update Message-ID: <4F2C054F.8000202@stanford.edu> We got the lab back on Feb 1st and Ted scheduled AMAT to come in Feb 2nd to install the gas jungle for the second chamber. Then contractors will come in an wield the gas lines And then an outside company leak checks and certifies the wields. We don't have dates yet for the whole project but we will update you when we know more. -m -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From maurice at stanford.edu Thu Feb 9 09:02:54 2012 From: maurice at stanford.edu (maurice stevens) Date: Thu, 09 Feb 2012 09:02:54 -0800 Subject: Epi second chamber update Message-ID: <4F33FC3E.1000007@stanford.edu> This is from Teb Berg's coral update. We don't have a date for getting the tool back yet...but it is moving forward. -m -------- Original Message -------- Subject: Comment epi2 SNF 2012-02-09 06:11:14: Second chamber install in progress Date: Thu, 9 Feb 2012 06:11:14 -0800 From: tberg at snf.stanford.edu To: epi2-pcs at snf.stanford.edu Gases to second panel are tied in and certified. FS has hung the second gas panel and is making connections. FS working on completion of second chamber. -------------- next part -------------- An HTML attachment was scrubbed... URL: From maurice at stanford.edu Fri Feb 17 15:55:24 2012 From: maurice at stanford.edu (maurice stevens) Date: Fri, 17 Feb 2012 15:55:24 -0800 Subject: 2/17/`12 : Epi second chamber update In-Reply-To: <4F33FC3E.1000007@stanford.edu> References: <4F33FC3E.1000007@stanford.edu> Message-ID: <4F3EE8EC.9090506@stanford.edu> Hi All, Sean (AMAT FS) was here all week and expects to be here most of next week. He has been slowed today by a leak in the pumpline. From Sean: Completed pneumatics. Rotation positions verified. Installed lower shrouds. Installed part of the process kit torqued down the upper dome. I was able to clear all of the chamber interlocks. I was going to pump down the chamber but there seems to be an issue with the pump signals. -m On 2/9/2012 9:02 AM, maurice stevens wrote: > This is from Teb Berg's coral update. We don't have a date for > getting the tool back yet...but it is moving forward. > > -m > > -------- Original Message -------- > Subject: Comment epi2 SNF 2012-02-09 06:11:14: Second chamber install > in progress > Date: Thu, 9 Feb 2012 06:11:14 -0800 > From: tberg at snf.stanford.edu > To: epi2-pcs at snf.stanford.edu > > > > Gases to second panel are tied in and certified. FS has hung the second gas panel and is making connections. FS working on completion of second chamber. > -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 -------------- next part -------------- An HTML attachment was scrubbed... URL: From maurice at stanford.edu Wed Feb 29 10:04:55 2012 From: maurice at stanford.edu (maurice stevens) Date: Wed, 29 Feb 2012 10:04:55 -0800 Subject: Epi2 second chamber update Message-ID: <4F4E68C7.4070309@stanford.edu> We are pushing the Epi2 start update back a week. We had planned to turn on process gases tomorrow but there have been two big delays. First delay was caused by the failure of a pump while leak checking the chamber. After replacing the pump and continuing the leak checking we ran out of helium. Helium is schedule to arrive today. From AMAT FS this past week: Started leak checking the chamber, Found a few leaks in the gas lines. Today while working on leak checking the gas panel the pump failed. I went to the basement and found the pump powered down. The pump is tripping the breaker on the system controller. I cycled the power the fault cleared. I tried to manually turn on the pump and it tripped the breaker again. It looks like the pump is dead. After the pump replaced I continued with leak checking I found a few leaks and repaired them then I ran out of Helium. Install new 300sccm MFC in place of the 20L. The MFC was pumped and purged. There was no helium today so I just started leak rates on the lines. -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 -------------- next part -------------- An HTML attachment was scrubbed... URL: