From kcbalram at stanford.edu Mon Jul 2 06:45:59 2012 From: kcbalram at stanford.edu (Krishna Coimbatore Balram) Date: Mon, 2 Jul 2012 06:45:59 -0700 (PDT) Subject: Epi free till noon In-Reply-To: <255927046.648463.1341236580852.JavaMail.root@zm06.stanford.edu> Message-ID: <1962916609.649350.1341236759032.JavaMail.root@zm06.stanford.edu> Sorry for the late notice.... was mistaken about the time of the reservation Best, Krishna From sclaussen at stanford.edu Mon Jul 2 09:34:39 2012 From: sclaussen at stanford.edu (Stephanie Claussen) Date: Mon, 2 Jul 2012 09:34:39 -0700 Subject: epi2 available noon-4pm today Message-ID: Sorry for the late notice. From junam at stanford.edu Mon Jul 2 16:49:38 2012 From: junam at stanford.edu (Ju Hyung Nam) Date: Mon, 2 Jul 2012 16:49:38 -0700 (PDT) Subject: epi2 free: from 6pm to midnight In-Reply-To: <954760847.2279999.1341272975259.JavaMail.root@zm07.stanford.edu> Message-ID: <839965065.2280052.1341272978157.JavaMail.root@zm07.stanford.edu> Samples would not be ready by the time. From andreas_goebel at sbcglobal.net Mon Jul 2 17:18:26 2012 From: andreas_goebel at sbcglobal.net (Andreas Goebel) Date: Mon, 2 Jul 2012 17:18:26 -0700 Subject: epi2 free: from 6pm to midnight - grabbed it - Tuesday morning released instead! In-Reply-To: <839965065.2280052.1341272978157.JavaMail.root@zm07.stanford.edu> References: <839965065.2280052.1341272978157.JavaMail.root@zm07.stanford.edu> Message-ID: <0B206864-2F2B-4154-B32E-A1CF2F1048B0@sbcglobal.net> I grabbed it, and released my reservation from 5 am to 9:30 am Tuesday morning. On Jul 2, 2012, at 4:49 PM, Ju Hyung Nam wrote: > Samples would not be ready by the time. From junam at stanford.edu Sat Jul 7 16:37:02 2012 From: junam at stanford.edu (Ju Hyung Nam) Date: Sat, 7 Jul 2012 16:37:02 -0700 (PDT) Subject: epi2 free: from now~10pm In-Reply-To: <285223118.9071697.1341704214351.JavaMail.root@zm07.stanford.edu> Message-ID: <2083543056.9071704.1341704222525.JavaMail.root@zm07.stanford.edu> wbdiff down From dwnam at stanford.edu Sat Jul 7 17:27:17 2012 From: dwnam at stanford.edu (Donguk Nam) Date: Sat, 7 Jul 2012 17:27:17 -0700 (PDT) Subject: Epi2 is free from Midnight until 10am tomorrow In-Reply-To: <547076416.10386673.1341707229195.JavaMail.root@zm03.stanford.edu> Message-ID: <1715980918.10386702.1341707237344.JavaMail.root@zm03.stanford.edu> Wbdiff is down. From raisul at stanford.edu Sun Jul 8 20:49:25 2012 From: raisul at stanford.edu (Raisul Islam) Date: Sun, 8 Jul 2012 20:49:25 -0700 (PDT) Subject: epi2 free from 10:00pm today Message-ID: <322581812.7032058.1341805765942.JavaMail.root@zm04.stanford.edu> wbdiff down, sample wont be ready. From tberg at stanford.edu Mon Jul 9 09:53:23 2012 From: tberg at stanford.edu (Ted Berg) Date: Mon, 09 Jul 2012 09:53:23 -0700 Subject: Epi is back up Message-ID: <4FFB0C83.4010608@stanford.edu> Cleaned scrubber and burn box exhaust, ran geetch coat Epi is back up From andreas_goebel at sbcglobal.net Mon Jul 9 10:51:08 2012 From: andreas_goebel at sbcglobal.net (Andreas Goebel) Date: Mon, 9 Jul 2012 10:51:08 -0700 Subject: Epi free from 5 pm tonight; Message-ID: <17AE0BDC-DEAD-4530-8B30-2F78B9F20078@sbcglobal.net> Epi reservation released; Did not receive EAG analysis in time; Andreas From eldwin at stanford.edu Mon Jul 9 19:28:54 2012 From: eldwin at stanford.edu (Eldwin Ng) Date: Mon, 09 Jul 2012 19:28:54 -0700 Subject: epi2 free from 7:30a-3pm tomorrow Message-ID: <4FFB9366.9060703@stanford.edu> released 11a-3p. managed to grab some epi time today From junam at stanford.edu Thu Jul 12 16:53:42 2012 From: junam at stanford.edu (Ju Hyung Nam) Date: Thu, 12 Jul 2012 16:53:42 -0700 (PDT) Subject: epi2 released: from now to 10pm In-Reply-To: <1759706642.17323853.1342137210697.JavaMail.root@zm07.stanford.edu> Message-ID: <1526943672.17323990.1342137222694.JavaMail.root@zm07.stanford.edu> could not prepare the samples on time From andreas_goebel at sbcglobal.net Fri Jul 13 09:52:35 2012 From: andreas_goebel at sbcglobal.net (Andreas Goebel) Date: Fri, 13 Jul 2012 09:52:35 -0700 Subject: epi free from today 10 to 2 pm Message-ID: <48CA72C8-ED19-45A1-98FE-17DB0B1B9D43@sbcglobal.net> Sorry, I could not get the wafers ready. Best, Andreas From tberg at stanford.edu Wed Jul 18 06:08:37 2012 From: tberg at stanford.edu (Ted Berg) Date: Wed, 18 Jul 2012 06:08:37 -0700 Subject: 100 PPM B2H6 is back on line Message-ID: <5006B555.4060204@stanford.edu> 100 PPM B2H6 cylinder has been replaced , leak checked and is back on line From maurice at stanford.edu Wed Jul 18 10:39:32 2012 From: maurice at stanford.edu (maurice stevens) Date: Wed, 18 Jul 2012 10:39:32 -0700 Subject: Epi: don't let epi sit in active idle Message-ID: <5006F4D4.6010707@stanford.edu> Hi Epi Users, Just a reminder (or if I did not bring it up in your training): You are expected to shutdown the reactor when your your last etch is completed. Don't let the system sit in active idle more that an hour. The heating lamps have a finite life. The longer it is up a temperature the sooner we need to replace the lamps. The system will be down for days when we need to replace the lower lamps. You are responsible for unloading your own wafers and making sure the system is etched before the next user arrives. Do not leave a note for the next user to unload your wafers. You are required to fill out the log sheet. All these are required to keep your qualification on the tool. -m -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From junam at stanford.edu Thu Jul 19 15:07:15 2012 From: junam at stanford.edu (Ju Hyung Nam) Date: Thu, 19 Jul 2012 15:07:15 -0700 (PDT) Subject: epi released: 4p~10p Message-ID: <370277725.25645059.1342735635482.JavaMail.root@zm07.stanford.edu> sample not ready From tberg at stanford.edu Fri Jul 27 06:25:31 2012 From: tberg at stanford.edu (Ted Berg) Date: Fri, 27 Jul 2012 06:25:31 -0700 Subject: GeH4 is getting low Message-ID: <501296CB.2090706@stanford.edu> Hello All, Just a warning, GeH4 is getting low. if you are going to run a *critical run* check the gauge reader Node 22 for Germane pressure. URL is: http://snf-gaugereader/wgrwebapp/Default_WGR.aspx It will b e down for 24 hours after we change it. Ted -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Jul 27 13:10:25 2012 From: tberg at stanford.edu (Ted Berg) Date: Fri, 27 Jul 2012 13:10:25 -0700 Subject: Cylinder change of GeH4 completed Message-ID: <5012F5B1.90207@stanford.edu> Cylinder changed, leak checked, Flowed manually at the tool just fine GeH4 is back on line From junam at stanford.edu Mon Jul 30 19:25:00 2012 From: junam at stanford.edu (Ju Hyung Nam) Date: Mon, 30 Jul 2012 19:25:00 -0700 (PDT) Subject: epi2 released: from 2a to 10a tomorrow Message-ID: <536964886.38727239.1343701500489.JavaMail.root@zm07.stanford.edu> EOM