Cylinder change of GeH4 completed
Ted Berg
tberg at stanford.edu
Fri Jul 27 13:10:25 PDT 2012
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GeH4 is getting low
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epi2 released: from 2a to 10a tomorrow
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Cylinder changed, leak checked, Flowed manually at the tool just fine GeH4 is back on line
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GeH4 is getting low
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epi2 released: from 2a to 10a tomorrow
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