From maurice at stanford.edu Tue Mar 6 08:12:18 2012 From: maurice at stanford.edu (maurice stevens) Date: Tue, 06 Mar 2012 08:12:18 -0800 Subject: 2nd chamber install update Message-ID: <4F563762.5080002@stanford.edu> The 2nd chamber gas lines, pump lines and chamber have passed leak check. The process gases are now connected and in leak check. The lamps check out ok and fired up by zone. -------- Original Message -------- Subject: Comment epi2 SNF 2012-03-06 08:01:40: 2nd chamber install update Date: Tue, 6 Mar 2012 08:01:41 -0800 From: maurice at snf.stanford.edu To: epi2-pcs at snf.stanford.edu Gases in leakcheck. - From Sean: Completed resistance checks on the lamps also I was able fire off the lamps by zones. -------------- next part -------------- An HTML attachment was scrubbed... URL: From maurice at stanford.edu Thu Mar 8 16:43:53 2012 From: maurice at stanford.edu (maurice stevens) Date: Thu, 08 Mar 2012 16:43:53 -0800 Subject: 2nd chamber install update Message-ID: <4F595249.6000601@stanford.edu> Ready to turn of H2 to 2nd chamber but the new AMAT scrubber has a burned out motor. AMAT expects part to arrive Monday. From maurice at stanford.edu Thu Mar 15 08:01:04 2012 From: maurice at stanford.edu (maurice stevens) Date: Thu, 15 Mar 2012 08:01:04 -0700 Subject: Epi2 l update Message-ID: <4F620430.4070503@stanford.edu> AMAT FS was in last night and have identified the general location of a leak in the chamber A foreline. They will return today to pinpoint the location. Chamber A maybe back to us soon. Permit package is being submitted for the Chamber B burnbox. -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From maurice at stanford.edu Mon Mar 19 08:19:01 2012 From: maurice at stanford.edu (maurice stevens) Date: Mon, 19 Mar 2012 08:19:01 -0700 Subject: Epi2 update chamber A Message-ID: <4F674E65.9000004@stanford.edu> Sean from AMAT FS was in on Sat and found the source of the chamber A leaks. We will need to pull the gate valve and replace some flanges. Ted is out today and Sean won't be back until tomorrow. We will gather the parts today and plan on pulling the valve tomorrow. From Sean: I had a little time on Saturday to pin point the leaks in chamber A. I believe the leak is bigger than the 30 mTorr the system is reporting because the gate valve is leaking by. Pretty much every kf40 from the exhaust port to the below the T/V got some sort of hit on the leak detector. The worst one was at the bottom of the manometer tree and between the gate and t/v they got double decade rise on the leak detector. I would suggest changing the gate valve and the KF40s. -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 -------------- next part -------------- An HTML attachment was scrubbed... URL: From rthowe at stanford.edu Mon Mar 19 08:20:06 2012 From: rthowe at stanford.edu (Roger T. Howe) Date: Mon, 19 Mar 2012 08:20:06 -0700 Subject: Epi2 update chamber A In-Reply-To: <4F674E65.9000004@stanford.edu> References: <4F674E65.9000004@stanford.edu> Message-ID: <4F674EA6.1010900@stanford.edu> Maurice, Thanks for the update -- nice to know that we had someone from AMAT in the SNF on Saturday. Roger On 3/19/12 8:19 AM, maurice stevens wrote: > Sean from AMAT FS was in on Sat and found the source of the chamber A > leaks. We will need to pull the gate valve and replace some flanges. > Ted is out today and Sean won't be back until tomorrow. We will > gather the parts today and plan on pulling the valve tomorrow. > > From Sean: > I had a little time on Saturday to pin point the leaks in chamber A. I > believe the leak is bigger than the 30 mTorr the system is reporting > because the gate valve is leaking by. Pretty much every kf40 from the > exhaust port to the below the T/V got some sort of hit on the leak > detector. The worst one was at the bottom of the manometer tree and > between the gate and t/v they got double decade rise on the leak > detector. I would suggest changing the gate valve and the KF40s. > -- > maurice at stanford.edu > > Maurice Stevens > Stanford Nanofabrication Facility > CIS Room 142, Mail Code 4070 > Stanford, CA 94305 > P. (650)725-3660 > F. (650)725.6278 -------------- next part -------------- An HTML attachment was scrubbed... URL: From maurice at stanford.edu Thu Mar 22 16:23:54 2012 From: maurice at stanford.edu (maurice stevens) Date: Thu, 22 Mar 2012 16:23:54 -0700 Subject: Epi2 update chamber A In-Reply-To: <4F674E65.9000004@stanford.edu> References: <4F674E65.9000004@stanford.edu> Message-ID: <4F6BB48A.2090802@stanford.edu> Ray and Ted replaced isolation valve and cleaned/replaced all KF flanges between the chamber and the floor. System is set up for long cycle purges overnight. AMAT will be in in the morning to leakcheck system. -m On 3/19/2012 8:19 AM, maurice stevens wrote: > Sean from AMAT FS was in on Sat and found the source of the chamber A > leaks. We will need to pull the gate valve and replace some flanges. > Ted is out today and Sean won't be back until tomorrow. We will > gather the parts today and plan on pulling the valve tomorrow. > > From Sean: > I had a little time on Saturday to pin point the leaks in chamber A. I > believe the leak is bigger than the 30 mTorr the system is reporting > because the gate valve is leaking by. Pretty much every kf40 from the > exhaust port to the below the T/V got some sort of hit on the leak > detector. The worst one was at the bottom of the manometer tree and > between the gate and t/v they got double decade rise on the leak > detector. I would suggest changing the gate valve and the KF40s. > -- > maurice at stanford.edu > > Maurice Stevens > Stanford Nanofabrication Facility > CIS Room 142, Mail Code 4070 > Stanford, CA 94305 > P. (650)725-3660 > F. (650)725.6278 -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 -------------- next part -------------- An HTML attachment was scrubbed... URL: From maurice at stanford.edu Mon Mar 26 12:00:35 2012 From: maurice at stanford.edu (maurice stevens) Date: Mon, 26 Mar 2012 12:00:35 -0700 Subject: Epi2 update Message-ID: <4F70BCD3.7050703@stanford.edu> Sean, AMAT FS, was here Sat and the last of the leaks in Chamber A has been resolved. We have some burn box issues. They are sending their abatement guru tomorrow morning to look at both burn boxes. The burn box is our only hold up on Chamber A. Chamber B is ready for temperature calibration. From Sean: Chamber A The leak rate is now below the 5 mTorr/min spec around 3.3. On a side note to the leak issue Anthony was looking at the Guardian on Ch.A and does not recommend running it till it has had some maintenance done it. We had Ch.A online and running H2 when we noticed the exhaust temp was very high close to the shutdown temp. I recommend calling Joe and have one of the guys from the abatement group come and look at maybe even PM the Guardian before running Chamber A. Chamber B Saturday I started working on Ch.B again. I wired the scrubber units to the system. I did have issues with the guardian so Anthony come over and found that the H2 into the guardian was way too high and said a regulator needs to be installed so 30psi can be the incoming pressure vs the 100 psi now which seems to be causing and error and shutting down the guardian. I have the temp kit install so make sure no one moves the lift on B up or down DAMAGE will occur. -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 -------------- next part -------------- An HTML attachment was scrubbed... URL: From maurice at stanford.edu Thu Mar 29 08:18:00 2012 From: maurice at stanford.edu (maurice stevens) Date: Thu, 29 Mar 2012 08:18:00 -0700 Subject: Epi2 Update Message-ID: <4F747D28.7060606@stanford.edu> Cahmber A: AMAT's abatement guys were here on Tues to inspect the Chamber A burn box. They will return today with parts to do a major PM. They believe the PM will take ~4 hrs. I am not that optimistic. Once the PM is complete we can start testing Chamber A Chamber B: The Chamber B burn box had a regulator installed in the H2 line yesterday by our contractor.. The older style burn box (like the Chamber A box) have the regulator built into the system. This difference in the new AMAT supplied burn box was discovered last week by AMAT FS. We expect Sean to be back out today to complete the temperature calibration. -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278