Epi2 status

maurice stevens maurice at stanford.edu
Wed May 2 08:09:24 PDT 2012


The new HCl cabbinet died last night.  The display screen is blank.  Ted 
has already contacted  the vendor and they are sending a replacement 
screen and board.  We  expect it to arrive  tomorrow afternoon.

We are replacing the the silane gas panel in the gas cabinet and the 
silane MFC in the tool.  We don't expect to have silane for a week and a 
half to two weeks.


-m


-- 
maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278




More information about the epi2 mailing list