Fwd: Re: Shutdown epi2 SNF 2012-05-02 01:31:12: No HCl flow

[maurice stevens]

HCl is back on line.

-------- Original Message --------
Subject: 	Re: Shutdown epi2 SNF 2012-05-02 01:31:12: No HCl flow
Date: 	Thu, 3 May 2012 11:37:17 -0700
From: 	tberg at snf.stanford.edu
To: 	epi2-pcs at snf.stanford.edu



replaced gas cabinet display board and brought gas cabinet back on
  line. Ran Geetch coat no problem


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