Epi2 water flow update

maurice stevens maurice at stanford.edu
Thu May 24 16:19:50 PDT 2012

Both the new water flow switch and the new quick disconnects have been 
ordered.  We have also ordered new water hose to replaced the old 
cracking hose.  We expect everything to arrive tomorrow.


On 5/21/2012 10:28 AM, maurice stevens wrote:
> We are working on few of things to resolve the contactor/water flow 
> faults .  We are replacing the cooling water flow switch,  looking for 
> a better type of quick disconnect and looking for a spot in the system 
> to put in water filter(s).
> The flow switch could be replaced as soon as tomorrow afternoon (we 
> don't have a delivery date yet).  That may get to the point were the 
> system is not kicking off.
> Our current style of quick disconnects in the various water loops in 
> the chamber dramatically reduce the water flow and have been 
> problematic for years.  We are looking for a less restrictive design.  
> AMAT field service is also looking for a connector different than the 
> one they originally supplied to us.
> Long term, we are also looking at installing water filters to reduce 
> the amount of "gunk" that can get into the Epi's internal cooling 
> loops and cause flow restrictions.
> -m

maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278

More information about the epi2 mailing list