From cachang at stanford.edu Thu Nov 1 16:09:22 2012 From: cachang at stanford.edu (Chia-Ming Chang) Date: Thu, 1 Nov 2012 16:09:22 -0700 (PDT) Subject: epi2 time release Nov 2 1:30pm-5pm Message-ID: <997881322.2068566.1351811362913.JavaMail.root@stanford.edu> Samples not ready From tberg at stanford.edu Fri Nov 2 13:47:16 2012 From: tberg at stanford.edu (Ted Berg) Date: Fri, 02 Nov 2012 13:47:16 -0700 Subject: Do NOT disable after running Message-ID: <50943154.8090104@stanford.edu> Apparently not everyone got this message>I have enabled in community service and the tool is available. Hello All, as we said we have a work around for the H2 problem . The Tool will stay in cold idle as long as it is enabled. so John has created a community service account that allows us to keep it up and not charge the users.In order to keep track there is a manual sheet that shows if you are using it or not. You must enable in your normal account when running and enable over yourself with community service when finished. DO NOT DISABLE From tberg at stanford.edu Mon Nov 5 13:42:37 2012 From: tberg at stanford.edu (Ted Berg) Date: Mon, 05 Nov 2012 13:42:37 -0800 Subject: Looks like creep is fixed Message-ID: <509832CD.8090303@stanford.edu> Replaced H2 stick leak checked watched regulator did not see creep in 10 minutes. Ran 2 Geetch coats with no problems. It is OK to operate in normal mode now. Happy processing. Ted From Toru.Ito at us.tel.com Wed Nov 7 17:06:35 2012 From: Toru.Ito at us.tel.com (Toru.Ito at us.tel.com) Date: Wed, 7 Nov 2012 18:06:35 -0700 Subject: Cancelled reservation 3am- 11/8 and 4am- 11/9 Message-ID: Best regards, Toru -------------- next part -------------- An HTML attachment was scrubbed... URL: From cachang at stanford.edu Thu Nov 8 16:02:44 2012 From: cachang at stanford.edu (Chia-Ming Chang) Date: Thu, 8 Nov 2012 16:02:44 -0800 (PST) Subject: Time release Nov 09 evening Message-ID: <752445183.8754379.1352419364576.JavaMail.root@stanford.edu> Samples won't be ready. From maurice at stanford.edu Fri Nov 9 10:50:03 2012 From: maurice at stanford.edu (maurice stevens) Date: Fri, 9 Nov 2012 10:50:03 -0800 Subject: Germaine getting low Message-ID: Hi Users, We are expecting to run out of Ge in the next week on epi and both poly tubes. We have been informed by our gas vendors that they are not getting shipment dates for the gases we have already ordered because of Hurricane Sandy. All toxic our gas bottles are filled in New Jersey and then trucked across country. We will update you as we get more information on the shipments and when we expect to run out of the gases. -m From junam at stanford.edu Sun Nov 11 22:53:31 2012 From: junam at stanford.edu (Ju Hyung Nam) Date: Sun, 11 Nov 2012 22:53:31 -0800 (PST) Subject: epi2 released: midnight~8am Message-ID: <14666352.13685855.1352703211916.JavaMail.root@stanford.edu> could not bring up the temperature above 300 oC From tberg at stanford.edu Mon Nov 12 12:34:25 2012 From: tberg at stanford.edu (Ted Berg) Date: Mon, 12 Nov 2012 12:34:25 -0800 Subject: GeH4 is very low. Do not run critical runs Message-ID: <50A15D51.7030007@stanford.edu> GeH4 is very low. Do not run critical runs. Cylinder should be here later this week. From sclaussen at stanford.edu Mon Nov 12 14:31:12 2012 From: sclaussen at stanford.edu (Stephanie Claussen) Date: Mon, 12 Nov 2012 14:31:12 -0800 Subject: epi2 released today 2pm-2am due to GeH4 status Message-ID: Sorry for the late notice. -------------- next part -------------- An HTML attachment was scrubbed... URL: From maurice at stanford.edu Thu Nov 15 10:37:57 2012 From: maurice at stanford.edu (Maurice M Stevens) Date: Thu, 15 Nov 2012 10:37:57 -0800 (PST) Subject: Ge delivery now scheduled for Fri Message-ID: <1804291242.12327550.1353004677390.JavaMail.root@stanford.edu> Hi All, Ted got a message from Praxair updating the delivery date of the Ge bottle. Bottle will not arrive today. It is in Sacramento. Praxair expects delivery tomorrow. -m From maurice at stanford.edu Thu Nov 15 14:35:24 2012 From: maurice at stanford.edu (maurice stevens) Date: Thu, 15 Nov 2012 14:35:24 -0800 Subject: stopusing community service account Message-ID: <2F2CD0B9-1A46-40CE-A88D-98473611BEBB@stanford.edu> Hi All, The H2 regulator has been replaced. The machine can now be disabled without any problems. You should stop using the community service account for epi. -m From maurice at stanford.edu Fri Nov 16 16:48:32 2012 From: maurice at stanford.edu (maurice stevens) Date: Fri, 16 Nov 2012 16:48:32 -0800 Subject: Epi Germaine replace/Poly Low In-Reply-To: References: Message-ID: H All, The Ge bottle on the epi was replaced today. We are still waiting for the bottle for the poly tubes. -m On Nov 9, 2012, at 10:50 AM, maurice stevens wrote: > Hi Users, > > We are expecting to run out of Ge in the next week on epi and both poly tubes. > > We have been informed by our gas vendors that they are not getting shipment dates for the gases we have already ordered because of Hurricane Sandy. > All toxic our gas bottles are filled in New Jersey and then trucked across country. > > We will update you as we get more information on the shipments and when we expect to run out of the gases. > > > > -m > > > > > From junam at stanford.edu Sun Nov 18 01:09:06 2012 From: junam at stanford.edu (Ju Hyung Nam) Date: Sun, 18 Nov 2012 01:09:06 -0800 (PST) Subject: epi2 released: now~10am Message-ID: <1928508048.366590.1353229746780.JavaMail.root@stanford.edu> samples not ready From andreas_goebel at sbcglobal.net Mon Nov 19 18:46:09 2012 From: andreas_goebel at sbcglobal.net (Andreas Goebel) Date: Mon, 19 Nov 2012 18:46:09 -0800 Subject: EPI free Tuesday afternoon ~ 3pm to 9 pm Message-ID: <8B31F260-5BF4-43B4-909A-1302FFCE6F15@sbcglobal.net> Results from previous runs are delayed. From sclaussen at stanford.edu Tue Nov 20 12:38:41 2012 From: sclaussen at stanford.edu (Stephanie Claussen) Date: Tue, 20 Nov 2012 12:38:41 -0800 Subject: epi2 available 10pm tonight Message-ID: -------------- next part -------------- An HTML attachment was scrubbed... URL: From maurice at stanford.edu Mon Nov 26 11:50:39 2012 From: maurice at stanford.edu (maurice stevens) Date: Mon, 26 Nov 2012 11:50:39 -0800 Subject: lower dome coated Message-ID: <36FBEC9A-F80C-4827-B21E-D75AFE7135F7@stanford.edu> Hi All, Bad news. The lower dome is coated. AMAT will be in sometime this week to replace the dome and replace and any blown lamps in the lower lamp bank. We will also have them investigate the higher than normal chamber leak rate. We are still working on the timing but hope they come in tomorrow so the tool will be back up by the weekend. More info to come. -m From cachang at stanford.edu Mon Nov 26 12:00:47 2012 From: cachang at stanford.edu (Chia-Ming Chang) Date: Mon, 26 Nov 2012 12:00:47 -0800 (PST) Subject: epi2 time release 2:30pm-5pm today Message-ID: <1525829088.1599854.1353960047034.JavaMail.root@stanford.edu> Samples not ready. From andreas_goebel at sbcglobal.net Mon Nov 26 12:17:52 2012 From: andreas_goebel at sbcglobal.net (Andreas Goebel) Date: Mon, 26 Nov 2012 12:17:52 -0800 Subject: epi released today from 5 pm to 9 pm Message-ID: <00DCE1F9-C6EB-4939-9999-79392F44518B@sbcglobal.net> Tool not ready... From junam at stanford.edu Tue Nov 27 17:37:55 2012 From: junam at stanford.edu (Ju Hyung Nam) Date: Tue, 27 Nov 2012 17:37:55 -0800 (PST) Subject: epi2 released: now~12a Message-ID: <256066049.4163328.1354066675506.JavaMail.root@stanford.edu> test wafers came out very hazy. From andreas_goebel at sbcglobal.net Tue Nov 27 18:10:36 2012 From: andreas_goebel at sbcglobal.net (Andreas Goebel) Date: Tue, 27 Nov 2012 18:10:36 -0800 Subject: epi2 released: now~12a In-Reply-To: <256066049.4163328.1354066675506.JavaMail.root@stanford.edu> References: <256066049.4163328.1354066675506.JavaMail.root@stanford.edu> Message-ID: <2A08B642-D744-4C4B-B636-EED90279B25B@sbcglobal.net> Hello epi group, I am wondering whether the tool status and repair plans and repair confirmations could be shared more extensively than they commonly are in the maintenance logs. For example, was there a test wafer run after the repairs? If so, did it come out hazy? Maurice had mentioned the lower dome being coated and having to be replaced. I have not found an update on that, and would also be curious to what extent this is known to cause problems and what kind they are. Thanks, Best, Andreas On Nov 27, 2012, at 5:37 PM, Ju Hyung Nam wrote: > test wafers came out very hazy. From ahn1229 at stanford.edu Wed Nov 28 11:49:51 2012 From: ahn1229 at stanford.edu (Chae Hyuck Ahn) Date: Wed, 28 Nov 2012 11:49:51 -0800 Subject: epi released today Message-ID: <10728708-E5D5-4355-8EFC-A26F9667282D@stanford.edu> samples not ready. Thanks From maurice at stanford.edu Wed Nov 28 15:23:06 2012 From: maurice at stanford.edu (maurice stevens) Date: Wed, 28 Nov 2012 15:23:06 -0800 Subject: lower dome coated In-Reply-To: <36FBEC9A-F80C-4827-B21E-D75AFE7135F7@stanford.edu> References: <36FBEC9A-F80C-4827-B21E-D75AFE7135F7@stanford.edu> Message-ID: <876C470F-90DA-4315-BF72-82BF3F1DC8C1@stanford.edu> AMAT has pushed back the dome replacement to Friday. We don't expect to have the tool back up until next Wed at the earliest. Please plan your reservations accordingly. -m On Nov 26, 2012, at 11:50 AM, maurice stevens wrote: > Hi All, > > Bad news. The lower dome is coated. > > AMAT will be in sometime this week to replace the dome and replace and any blown lamps in the lower lamp bank. > We will also have them investigate the higher than normal chamber leak rate. > > We are still working on the timing but hope they come in tomorrow so the tool will be back up by the weekend. > > More info to come. > > -m > > > > From raisul at stanford.edu Wed Nov 28 17:54:43 2012 From: raisul at stanford.edu (Raisul Islam) Date: Wed, 28 Nov 2012 17:54:43 -0800 (PST) Subject: reservation released from 10:00pm Message-ID: <1780660049.4909570.1354154083426.JavaMail.root@stanford.edu> Epi quality is still bad. From tberg at stanford.edu Fri Nov 30 13:30:20 2012 From: tberg at stanford.edu (Ted Berg) Date: Fri, 30 Nov 2012 13:30:20 -0800 Subject: Major PM to begin on Monday Message-ID: <50B9256C.4090009@stanford.edu> Hello All, Parts have been ordered for completion of a major PM on Epi. The PM will begin on Monday and may last several days. The domes which have been coated and are not coming clean will be replaced as well as lamps and suceptor and process kit. trying to make life better. Ted