From maurice at stanford.edu Mon Oct 1 11:59:50 2012 From: maurice at stanford.edu (maurice stevens) Date: Mon, 1 Oct 2012 11:59:50 -0700 Subject: Epi up/bulbs replaced/may change your recipes References: <29026998.7.1349110830462.JavaMail.coral@shine> Message-ID: <6CFD6695-B4E5-4E3F-B354-9469C284A6CF@stanford.edu> 4 of the 20 upper lamps were replaced by Elmer and Ray this morning. The system will ramp to temperatures faster. Users should watch their recipes and may need to make recipe adjustments. Begin forwarded message: > From: eenriquez at snf.stanford.edu > Subject: Re: Shutdown epi2 SNF 2012-09-28 14:25:29: Ch A bulb failed in upper outer zone > Date: October 1, 2012 10:00:30 AM PDT > To: epi2-pcs at snf.stanford.edu > > Helped Ray replaced 4 upper zone lamps. Ran Ge Etchcoat recipe. -------------- next part -------------- An HTML attachment was scrubbed... URL: From junam at stanford.edu Mon Oct 1 17:17:12 2012 From: junam at stanford.edu (Ju Hyung Nam) Date: Mon, 1 Oct 2012 17:17:12 -0700 (PDT) Subject: epi2 released: 8pm to 12am EPM Message-ID: <290688999.219432608.1349137032710.JavaMail.root@zm07.stanford.edu> From andreas_goebel at sbcglobal.net Tue Oct 2 09:12:57 2012 From: andreas_goebel at sbcglobal.net (Andreas Goebel) Date: Tue, 2 Oct 2012 09:12:57 -0700 Subject: my wafers in LLA - andig - use wafers are in LLB? Message-ID: Last night, with the fire alarm, the scrubber went out and triggered the chamber interlock. So I could not unload my wafer in ChA; Apparently the scrubber was reset this morning - as per comment page on Coral; My wafers are still in LLA and ChA - I am scheduled to have the tool at 2 pm and will use that slot. If anyone uses the tool this morning, could you please unload my wafers in LLA to the corresponding slots in the box "Test wafers" sitting on the bench? Finally, whose wafers are sitting in LLB? Thank you, Andreas From junam at stanford.edu Sat Oct 6 16:58:46 2012 From: junam at stanford.edu (Ju Hyung Nam) Date: Sat, 6 Oct 2012 16:58:46 -0700 (PDT) Subject: epi2 released ~8pm In-Reply-To: <609546634.16125148.1349567906956.JavaMail.root@zm07.stanford.edu> Message-ID: <1005769577.16125260.1349567926022.JavaMail.root@zm07.stanford.edu> Sample not prepared. Sorry for the late notice. From ysyang88 at stanford.edu Sat Oct 6 17:56:30 2012 From: ysyang88 at stanford.edu (Yushi Yang) Date: Sat, 6 Oct 2012 17:56:30 -0700 (PDT) Subject: epi2 released from 8 to 12 Message-ID: <1723221435.6938097.1349571390959.JavaMail.root@zm02.stanford.edu> -- M.S. Candidate School of Mechanical Engineering Stanford University, CA email:ysyang88 at stanford.edu From junam at stanford.edu Sat Oct 6 21:55:08 2012 From: junam at stanford.edu (Ju Hyung Nam) Date: Sat, 6 Oct 2012 21:55:08 -0700 (PDT) Subject: epi2 released: from 1am to 8am Message-ID: <629132347.16255408.1349585708891.JavaMail.root@zm07.stanford.edu> sample still not ready... sorry... From jasonlin at stanford.edu Sun Oct 7 10:37:03 2012 From: jasonlin at stanford.edu (J. Jason Lin) Date: Sun, 7 Oct 2012 10:37:03 -0700 Subject: epi2 released noon - midnight today Message-ID: -------------- next part -------------- An HTML attachment was scrubbed... URL: From taotang at stanford.edu Tue Oct 9 10:18:01 2012 From: taotang at stanford.edu (Tao Tang) Date: Tue, 9 Oct 2012 10:18:01 -0700 Subject: epi2 released 11-2 today Message-ID: <000901cda642$096615f0$1c3241d0$@edu> There is a conflict in my schedule. Sorry for the late notice. From junam at stanford.edu Tue Oct 9 20:11:24 2012 From: junam at stanford.edu (Ju Hyung Nam) Date: Tue, 9 Oct 2012 20:11:24 -0700 (PDT) Subject: epi2 released: now~12a In-Reply-To: <9709345.20913240.1349838677919.JavaMail.root@zm07.stanford.edu> Message-ID: <1351292161.20913273.1349838684760.JavaMail.root@zm07.stanford.edu> last minute sample failure. From jasonlin at stanford.edu Tue Oct 9 21:39:31 2012 From: jasonlin at stanford.edu (J. Jason Lin) Date: Tue, 9 Oct 2012 21:39:31 -0700 Subject: epi2 Ch A in isolated Message-ID: Could not get it back to Inert Idle. -------------- next part -------------- An HTML attachment was scrubbed... URL: From andreas_goebel at sbcglobal.net Wed Oct 10 15:08:58 2012 From: andreas_goebel at sbcglobal.net (Andreas Goebel) Date: Wed, 10 Oct 2012 15:08:58 -0700 Subject: Can we leave epi2 in "cold idle" flowing H2? Message-ID: <1FB7A0FE-4DC9-4D18-8D54-10207861881D@sbcglobal.net> Maurice, Ted, Would it be ok to leave the chamber in "cold idle" and continuously enabled by Maurice? That should get around the H2 overpressure faulting out. When do you expect the H2 pressure regulator to become available? Andreas From maurice at stanford.edu Thu Oct 11 23:23:44 2012 From: maurice at stanford.edu (maurice stevens) Date: Thu, 11 Oct 2012 23:23:44 -0700 Subject: Epi2 up/do not disable tool Message-ID: <460B206F-6F7A-4B44-8D59-D81ADA5265BC@stanford.edu> From Ted: Hello All, DO NOT DISABLE EPI2 until we resolve the regulator issue. As we said we have a work around for the H2 problem. The Epi2 will stay in cold idle as long as it is enabled. So John has created a community service account that allows us to keep it up and not charge the users. All of you now have a community service account for epi. When you now enable Epi2 on Coral you will have a choice of your normal account and the new community service account (in the drop down menu). In order to keep track of the status of the machine the there is now a manual sheet on the front of Epi2 that shows if you are using it or not. You must enable in your normal account when running and enable over yourself with community service when finished. Again, DO NOT DISABLE EPI2 until we resolve the regulator issue. If it is disable the H2 regulator will creep above the tool set point, the tool will shut itself down and the next user will not be able to start the tool. If you aren't sure how to do this, please talk to a staff member before using the tool. From andreas_goebel at sbcglobal.net Fri Oct 12 01:09:49 2012 From: andreas_goebel at sbcglobal.net (Andreas Goebel) Date: Fri, 12 Oct 2012 01:09:49 -0700 Subject: Epi2 up/do not disable tool In-Reply-To: <460B206F-6F7A-4B44-8D59-D81ADA5265BC@stanford.edu> References: <460B206F-6F7A-4B44-8D59-D81ADA5265BC@stanford.edu> Message-ID: Worked well for me this evening. Thank you for making the tool available in this pragmatic manner. Andreas On Oct 11, 2012, at 11:23 PM, maurice stevens wrote: > From Ted: > > Hello All, > > DO NOT DISABLE EPI2 until we resolve the regulator issue. As we said we have a work around for the H2 problem. > > The Epi2 will stay in cold idle as long as it is enabled. So John has created a community service account that allows us to keep it up and not charge the users. > > All of you now have a community service account for epi. When you now enable Epi2 on Coral you will have a choice of your normal account and the new community service account (in the drop down menu). > > In order to keep track of the status of the machine the there is now a manual sheet on the front of Epi2 that shows if you are using it or not. You must enable in your normal account when running and enable over yourself with community service when finished. > > Again, DO NOT DISABLE EPI2 until we resolve the regulator issue. If it is disable the H2 regulator will creep above the tool set point, the tool will shut itself down and the next user will not be able to start the tool. > > If you aren't sure how to do this, please talk to a staff member before using the tool. > > > From junam at stanford.edu Fri Oct 12 03:03:35 2012 From: junam at stanford.edu (Ju Hyung Nam) Date: Fri, 12 Oct 2012 03:03:35 -0700 (PDT) Subject: epi2 released: until 7am. Message-ID: <865370151.26193094.1350036215458.JavaMail.root@zm07.stanford.edu> From raisul at stanford.edu Sun Oct 14 05:03:36 2012 From: raisul at stanford.edu (Raisul Islam) Date: Sun, 14 Oct 2012 05:03:36 -0700 (PDT) Subject: epi 2 released from 7:00am to 12:00pm Message-ID: <1336316361.696446.1350216216927.JavaMail.root@stanford.edu> Sorry for being late. Samples wont be ready. From maurice at stanford.edu Tue Oct 16 16:42:35 2012 From: maurice at stanford.edu (maurice stevens) Date: Tue, 16 Oct 2012 16:42:35 -0700 Subject: Replacing H2 regulator assembly References: <5553705.56.1350430904133.JavaMail.coral@shine> Message-ID: System will be down overnight. -m Begin forwarded message: > From: maurice at snf.stanford.edu > Subject: Shutdown epi2 SNF 2012-10-16 16:41:43: Replacing H2 regulator assembly > Date: October 16, 2012 4:41:44 PM PDT > To: epi2-pcs at snf.stanford.edu > > The regulator assemply has been replaced be AMAT FS but the pressure transducer connector doesn't match our system. AMAT will return tomorrow with new parts. -------------- next part -------------- An HTML attachment was scrubbed... URL: From maurice at stanford.edu Wed Oct 17 18:56:53 2012 From: maurice at stanford.edu (maurice stevens) Date: Wed, 17 Oct 2012 18:56:53 -0700 Subject: Fwd: Still running in cold idle References: <507EF8C7.70704@stanford.edu> Message-ID: Begin forwarded message: > From: Ted Berg > Subject: Still running in cold idle > Date: October 17, 2012 11:28:23 AM PDT > To: epi-pcs at snf.stanford.edu, epi at snf.stanford.edu > > Hello All, > The regulator assembly was replaced but it still has issues so we will continue to run by NOT DISABLING and keeping it in cold idle and using the community service account when finished. Thanks, Ted -------------- next part -------------- An HTML attachment was scrubbed... URL: From junam at stanford.edu Thu Oct 18 16:11:57 2012 From: junam at stanford.edu (Ju Hyung Nam) Date: Thu, 18 Oct 2012 16:11:57 -0700 (PDT) Subject: epi2 released: 4pm~12pm Message-ID: <1554410101.6268674.1350601917303.JavaMail.root@stanford.edu> samples not prepared From Toru.Ito at us.tel.com Fri Oct 19 08:16:04 2012 From: Toru.Ito at us.tel.com (Toru.Ito at us.tel.com) Date: Fri, 19 Oct 2012 08:16:04 -0700 Subject: epi2 released 1pm-5pm Message-ID: -------------- next part -------------- An HTML attachment was scrubbed... URL: From maurice at stanford.edu Sun Oct 21 09:27:57 2012 From: maurice at stanford.edu (maurice stevens) Date: Sun, 21 Oct 2012 09:27:57 -0700 Subject: HCL pressure getting low Message-ID: <809E705B-5D3E-412B-A89A-E74FBCAF83EC@stanford.edu> The HCl pressure is getting low. Maint will switch to new bottle Monday morning. Users may want to move reservation to times after the bottle is switched. -m From junam at stanford.edu Wed Oct 24 00:17:37 2012 From: junam at stanford.edu (Ju Hyung Nam) Date: Wed, 24 Oct 2012 00:17:37 -0700 (PDT) Subject: epi2 released: today 2am to 11am Message-ID: <1694786917.11506571.1351063057275.JavaMail.root@stanford.edu> Woo Shik asks me to send out this notification instead. His e-mails keep bouncing back. From maurice at stanford.edu Fri Oct 26 14:41:13 2012 From: maurice at stanford.edu (maurice stevens) Date: Fri, 26 Oct 2012 14:41:13 -0700 Subject: Who left there wafers in the load lock? Message-ID: <598BCD44-074C-4BC7-86A3-1BCC6F4D7989@stanford.edu> There is no no note on the system or in coral. We don't know if any want these wafers. Ted had the tool reserved so AMAT could work on the system. Leaving your wafers in the system without a not is a really really good way for your wafers to end up in some dirty lost and found box. From tberg at stanford.edu Wed Oct 31 07:31:08 2012 From: tberg at stanford.edu (Ted Berg) Date: Wed, 31 Oct 2012 07:31:08 -0700 Subject: Epi is available Message-ID: <5091362C.2050708@stanford.edu>