Epi up/bulbs replaced/may change your recipes

maurice stevens maurice at stanford.edu
Mon Oct 1 11:59:50 PDT 2012

4 of the 20 upper lamps were replaced by Elmer and Ray this morning.   The system will ramp to temperatures faster.  Users should watch their recipes and may need to make recipe adjustments.

Begin forwarded message:

> From: eenriquez at snf.stanford.edu
> Subject: Re: Shutdown epi2 SNF 2012-09-28 14:25:29: Ch A bulb failed in upper outer zone
> Date: October 1, 2012 10:00:30 AM PDT
> To: epi2-pcs at snf.stanford.edu
> Helped Ray replaced 4 upper zone lamps.  Ran Ge Etchcoat recipe.

-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/epi2/attachments/20121001/8f2e44b2/attachment.html>

More information about the epi2 mailing list