From tberg at stanford.edu  Thu Sep  6 11:22:38 2012
From: tberg at stanford.edu (Ted Berg)
Date: Thu, 06 Sep 2012 11:22:38 -0700
Subject: rotation issues
Message-ID: <5048E9EE.4060207@stanford.edu>

hello all,
     Wafer lift position has changed and Field service is in to adjust and
check it out. Rotation not working correctly.


From maurice at stanford.edu  Thu Sep  6 14:43:37 2012
From: maurice at stanford.edu (Maurice M Stevens)
Date: Thu, 6 Sep 2012 14:43:37 -0700 (PDT)
Subject: Fill out epi logbook
In-Reply-To: <542EFE28-ABC1-4ADC-B496-C0DAF8C795F5@stanford.edu>
Message-ID: <928223623.25667782.1346967817393.JavaMail.root@zm03.stanford.edu>

I sent this out in June but have trained more users since then.  Many of them aren't filling out the log.  It must be a issue with the trainer not stressing that filling out the logbook is required.

So this is now everyone's first warning.  If you don't log your runs you will be removed for the qualified users list for a week and any reservation you have during that time will be removed.


-m

----- Forwarded Message -----
From: "maurice stevens" <maurice at stanford.edu>
To: epi2 at snf.stanford.edu
Sent: Wednesday, June 20, 2012 10:54:22 AM
Subject: Fill out logbook

Epi Users,

It is required that you put your run information in the logbook.  You will get one warning.  It you fail to log your run data your qualification from the tool will be removed.

-m


From maurice at stanford.edu  Thu Sep  6 14:45:23 2012
From: maurice at stanford.edu (Maurice M Stevens)
Date: Thu, 6 Sep 2012 14:45:23 -0700 (PDT)
Subject: Epi up
In-Reply-To: <23047852.59.1346966860477.JavaMail.coral@shine>
Message-ID: <1187882449.25668879.1346967923879.JavaMail.root@zm03.stanford.edu>



----- Forwarded Message -----
From: maurice at snf.stanford.edu
To: epi2-pcs at snf.stanford.edu
Sent: Thursday, September 6, 2012 2:27:40 PM
Subject: Re: Problem epi2 SNF 2012-09-06 07:06:44: DC motor hardware interlock fault

Adjusted lift hard stop, lift speeds and water flow sensor. running etch coat rotation is fine at this time
Ran Si deposition (kentest2  110sec  ~1.54um) and Si etch.  No rotation problem.


From andreas_goebel at sbcglobal.net  Thu Sep  6 16:54:20 2012
From: andreas_goebel at sbcglobal.net (Andreas Goebel)
Date: Thu, 6 Sep 2012 16:54:20 -0700
Subject: Reservation released Fri 3:00pm to 8pm
Message-ID: <4D7AF4F7-35B6-414C-BA23-2AEF671FDABB@sbcglobal.net>

Cheers,
Andreas




From maurice at stanford.edu  Sun Sep  9 19:26:09 2012
From: maurice at stanford.edu (maurice stevens)
Date: Sun, 9 Sep 2012 19:26:09 -0700
Subject: wafer stuck in transfer chamber/fixed
References: <6772150.3.1347243871385.JavaMail.coral@shine>
Message-ID: <A521AC0A-9365-4A35-BE23-3F78256942C3@stanford.edu>



Begin forwarded message:

> From: maurice at snf.stanford.edu
> Subject: Re: Shutdown epi2 SNF 2012-09-09 08:24:11: wafer stuck in transfer chamber
> Date: September 9, 2012 7:24:31 PM PDT
> To: epi2-pcs at snf.stanford.edu
> 
> Eldwin retrieved wafer.  Good save Eldwin!

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From eldwin at stanford.edu  Thu Sep 13 08:28:29 2012
From: eldwin at stanford.edu (Eldwin Ng)
Date: Thu, 13 Sep 2012 08:28:29 -0700
Subject: epi2 reservation released tonight
Message-ID: <5051FB9D.9040502@stanford.edu>

wafers won't be ready, epi2 free until tomorrow morning


From ahn1229 at stanford.edu  Tue Sep 18 07:35:46 2012
From: ahn1229 at stanford.edu (Chae Hyuck Ahn)
Date: Tue, 18 Sep 2012 07:35:46 -0700 (PDT)
Subject: released the reservation today morning
In-Reply-To: <883146640.204898610.1347978911062.JavaMail.root@zm08.stanford.edu>
Message-ID: <835787546.204899146.1347978946837.JavaMail.root@zm08.stanford.edu>

I just released the reservation since the pre-process hasn't done yet.

chae


From andreas_goebel at sbcglobal.net  Tue Sep 18 10:03:46 2012
From: andreas_goebel at sbcglobal.net (Andreas Goebel)
Date: Tue, 18 Sep 2012 10:03:46 -0700
Subject: epi free tonight and tomorrow night
Message-ID: <F15B0920-864D-410B-8B54-D659F783EADB@sbcglobal.net>

I deleted my reservations for tonight and tomorrow night, because we could not get enough overlap with other tools;

Best,
Andreas



From junam at stanford.edu  Tue Sep 18 20:22:10 2012
From: junam at stanford.edu (Ju Hyung Nam)
Date: Tue, 18 Sep 2012 20:22:10 -0700 (PDT)
Subject: epi2 released from 2am to 12am took later slot EOM
Message-ID: <1177107086.39433410.1348024930665.JavaMail.root@zm07.stanford.edu>



From ahn1229 at stanford.edu  Tue Sep 25 11:26:06 2012
From: ahn1229 at stanford.edu (Chae Hyuck Ahn)
Date: Tue, 25 Sep 2012 11:26:06 -0700
Subject: epi2 reservation released today
Message-ID: <8EE9D202-8E53-4048-A31F-D8A66791ED78@stanford.edu>

wafers won't be ready by tonight, so I released the reservation tonight. thanks!

Chae

From eldwin at stanford.edu  Thu Sep 27 14:27:28 2012
From: eldwin at stanford.edu (Eldwin Ng)
Date: Thu, 27 Sep 2012 14:27:28 -0700
Subject: epi reservations released this weekend
Message-ID: <5064C4C0.3020605@stanford.edu>

upstream equipment down