From maurice at stanford.edu Tue Feb 5 16:49:04 2013 From: maurice at stanford.edu (maurice stevens) Date: Tue, 5 Feb 2013 16:49:04 -0800 Subject: [epi2] epi update References: Message-ID: > > Hi All, > > At the bottom of this email I have included AMAT's last update. We are still having pump issues on both chambers. Both pumps have been rebuilt recently be different vendors. We will get our spare pump back in a day or two. While waiting for the pump AMAT is fixing a leak in the transfer chamber. > > -m > > > > > > System > Module > Problem > Actions > Next Actions > H179 EPI 2/4/2013 > Tranfer/LL > Major leak in Transfer > Replaced the slit valve orings for both LLA and LLB, LLA had smashed wafer bits in it. An order was submitted for the robot tube. > Helium leak check. Check the equalization valves. > Chamber A > Haze on wafers/dirty upper dome. Unable to pump to 15 Torr. > Max Vac came in and look at the pump. They were able to get it back up and running an hour after they left it died again. Ted called and they said they would be back to retrieve the pump and rebuild it. > Verify the foreline and reinstall the pump when it gets back from being rebuilt. Install the SST inserts. > Chamber B > Cannot pump under 300 mTorr > Isolated the issue down to a section of the foreline leaving our system before entering the floor. During this troubleshooting Ch.B's pump shutdown and will not restart. The pump is being removed to be look at by FMG. > Correct the foreline issue and reinstall the pump when it returns. > > > On Feb 2, 2013 -------------- next part -------------- An HTML attachment was scrubbed... URL: From maurice at stanford.edu Wed Feb 13 09:02:42 2013 From: maurice at stanford.edu (maurice stevens) Date: Wed, 13 Feb 2013 09:02:42 -0800 Subject: [epi2] Stanford EPI update References: <9AE1ACC06FA94D46BEDBCCDE1D39EB49227F308F@045-SN2MPN1-032.045d.mgd.msft.net> Message-ID: <78BF9A42-CE6E-41A6-91D1-BB09976465EF@stanford.edu> We are still waiting for the ChamberA pump to return. ChamberB pump came back at the end of last week and is installed. While waiting for the pumps, AMAT Sean has been getting us back on the recommended maint schedule. The transfer chamber robot has been replaced and is now being recalibrated (this was major and would have taken both chambers off line for a week sometime later this year). While working on system Sean also found that the transfer chamber and Chambe A shared the same overpressure vent. It should not have been installed this way. Ted has already had a contractor come in and separate the over pressure lines and reroute the transfer chamber line. Once the robot cal is complete we will continue with the Chamber B qual. We expect the Chamber A pump back this week. > > System > Module > Problem > Actions > Next Actions > H179 EPI 2/11/2013 > Tranfer/LL > Major leak in Transfer > Over pressure line hooked up into the general exhaust. After there was an issue with flowing and turning on the N2. After clearing the lead detect interlock everything ok. The screws set to be delivered today did not show up till 4:00 PM > Install the wrist screws and blade. Zero and calibrate the robot. > Chamber A > Haze on wafers/dirty upper dome. Unable to pump to 15 Torr. > No work done today. > Install the pump when it gets in. Leak check the chamber and the exhaust line. > Chamber B > Cannot pump under 300 mTorr > No work done today. > Check hand offs after robot is rebuilt. Check the clean. > > Sean Lovejoy > West NARA CE | Applied Materials > > > > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From maurice at stanford.edu Wed Feb 13 10:43:14 2013 From: maurice at stanford.edu (maurice stevens) Date: Wed, 13 Feb 2013 10:43:14 -0800 Subject: [epi2] Changes in recipes that use HCl. References: <3175B55F-4D47-4FBF-A45F-8C2B351AD00B@stanford.edu> Message-ID: <4E3088C0-8DDD-4698-A6F3-54B9FFB2DDBF@stanford.edu> Hi All, Every few years we have sent out an email letting users know (or reminding users) that the HCl flow controller is a 500 sccm meter but it is configured as 1 slm. The actual flow was half of the displayed value. We are correcting this configuration. With the second chamber coming on line, it is time to make the correction in the set up so that both chambers match and read correctly. The HCl will now show the correct value and have a full scale reading of 500 sccm. I will make the changes in the standard etch recipes but you will need to make the changes in any of your recipes that use HCl. Contact me if you don't understand this message or need help changing your recipes. -m -------------- next part -------------- An HTML attachment was scrubbed... URL: From maurice at stanford.edu Mon Feb 25 17:56:57 2013 From: maurice at stanford.edu (maurice stevens) Date: Mon, 25 Feb 2013 17:56:57 -0800 Subject: [epi2] Chamber B up Message-ID: <0163D7EA-B8D3-448D-8807-17ACAC01131E@stanford.edu> Hi all, Visually the deposition from both Chamber A and Chamber B look clean and haze free. We have grown samples that are going out for SIMS analysis. I expect the SIMS data back on Friday of this week or Monday and will send it out to you all. We plan to send out samples quarterly in the future. The pump on Chamber A died after we grew the samples so it is still down. But Chamber B is up. If you are doing non critical work (H2 anneals, thick silicon?), you may want to start reserving time on the tool. If your work is critical you may want to wait for the SIMS data. With this new chamber (and the completely rebuilt Chamber A ) you will need to recalibrate your recipes. The lamps are new and domes are clean so expect the tool to heat up faster. Your old recipes are just a starting point. We will now being taking advantage of our service contract with AMAT and will schedule routine tool maintenance as recommended by AMAT. You can expect to see a summary of all the work that was done on the tool since it went down for this major service in the next few days. If you run across anything new (good or bad) as we start ramping up, please let Ted and I know. -m From andrew.blake.graham at gmail.com Mon Feb 25 18:02:40 2013 From: andrew.blake.graham at gmail.com (Andrew Graham) Date: Mon, 25 Feb 2013 18:02:40 -0800 Subject: [epi2] Chamber B up In-Reply-To: <0163D7EA-B8D3-448D-8807-17ACAC01131E@stanford.edu> References: <0163D7EA-B8D3-448D-8807-17ACAC01131E@stanford.edu> Message-ID: Hi Maurice, I know I've asked this before, but is the plan: Chamber A = Chamber B (meaning we can run any recipes, dopants, etc. in one chamber that we can run in the other)? I've heard many rumors on possible plans for differentiation between the two since the acquisition of the new chamber was first announced. Thanks, Andrew On Mon, Feb 25, 2013 at 5:56 PM, maurice stevens wrote: > Hi all, > > Visually the deposition from both Chamber A and Chamber B look clean and > haze free. We have grown samples that are going out for SIMS analysis. I > expect the SIMS data back on Friday of this week or Monday and will send it > out to you all. We plan to send out samples quarterly in the future. > > The pump on Chamber A died after we grew the samples so it is still down. > But Chamber B is up. If you are doing non critical work (H2 anneals, thick > silicon?), you may want to start reserving time on the tool. If your work > is critical you may want to wait for the SIMS data. > > With this new chamber (and the completely rebuilt Chamber A ) you will > need to recalibrate your recipes. The lamps are new and domes are clean so > expect the tool to heat up faster. Your old recipes are just a starting > point. > > We will now being taking advantage of our service contract with AMAT and > will schedule routine tool maintenance as recommended by AMAT. You can > expect to see a summary of all the work that was done on the tool since it > went down for this major service in the next few days. > > If you run across anything new (good or bad) as we start ramping up, > please let Ted and I know. > > > -m > > _______________________________________________ > epi2 mailing list > epi2 at snf.stanford.edu > http://snf.stanford.edu/mailman/listinfo/epi2 > -------------- next part -------------- An HTML attachment was scrubbed... URL: From maurice at stanford.edu Thu Feb 28 11:29:47 2013 From: maurice at stanford.edu (maurice stevens) Date: Thu, 28 Feb 2013 11:29:47 -0800 Subject: [epi2] Epi users meeting tomorrow 11:00 AllenX101 Message-ID: Epi users meeting Friday, March 1st 11:00am AllenX101 Sorry for the short notice but some of the key voices are out next week. We will talk about how to divide processes on the two chambers, the major work done on the system, qualifying the chambers and anything else the group brings up.