From maurice at stanford.edu Fri Jan 11 09:37:51 2013 From: maurice at stanford.edu (maurice stevens) Date: Fri, 11 Jan 2013 09:37:51 -0800 Subject: [epi2] Epi2: Second Chamber Update References: Message-ID: Hi All, We haven't sent out a status update on the second chamber for a few months ?because there had not been anything new to report?until now. The permit has gone through the county (big cheer at this point) and we are now going through the follow up inspections. Ted had EH&S here this past Tuesday and they signed off on the system (smaller cheer here). Ted has the Fire inspector in today and if all goes well (there will be another big cheer and) then the building inspector will be here Monday. We can then turn on the gases to start temperature calibration and process development. We want to get a few recipes sent out for SIMS so we have clean baseline data. We will have an epi users meeting in the next few weeks to talk about how the two chambers share gas MFC's and what would be the best way to run two chambers at the same time. We are hopeful that Monday we will have good news. -m -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Jan 11 12:39:33 2013 From: tberg at stanford.edu (Ted Berg) Date: Fri, 11 Jan 2013 12:39:33 -0800 Subject: [epi2] Epi2: Second Chamber Update In-Reply-To: References: Message-ID: <50F07885.50908@stanford.edu> Hello All, Without sounding too optimistic, the plan is going like clockwork. Fire was in and signed off their portion of the permit and i have scheduled building for Monday so if we have no major glitches we should be signed off late Monday and then the real work of qualing begins.Stay tuned. Ted On 1/11/2013 9:37 AM, maurice stevens wrote: > > Hi All, > > We haven't sent out a status update on the second chamber for a few > months ...because there had not been anything new to report...until now. > > The permit has gone through the county (big cheer at this point) and > we are now going through the follow up inspections. > > Ted had EH&S here this past Tuesday and they signed off on the system > (smaller cheer here). Ted has the Fire inspector in today and if all > goes well (there will be another big cheer and) then the building > inspector will be here Monday. > > We can then turn on the gases to start temperature calibration and > process development. We want to get a few recipes sent out for SIMS > so we have clean baseline data. > > We will have an epi users meeting in the next few weeks to talk about > how the two chambers share gas MFC's and what would be the best way to > run two chambers at the same time. > > We are hopeful that Monday we will have good news. > > -m > > > > > _______________________________________________ > epi2 mailing list > epi2 at snf.stanford.edu > http://snf.stanford.edu/mailman/listinfo/epi2 -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Jan 14 12:56:36 2013 From: tberg at stanford.edu (Ted Berg) Date: Mon, 14 Jan 2013 12:56:36 -0800 Subject: [epi2] Epi2: Second Chamber Update In-Reply-To: <50F07885.50908@stanford.edu> References: <50F07885.50908@stanford.edu> Message-ID: <50F47104.1030607@stanford.edu> Hello All, OK now we can be optimistic. I just had the last inspection and the permit is totally signed off. Applied has a few checks to do and then the quals can begin. Ted On 1/11/2013 12:39 PM, Ted Berg wrote: Hello All, > Without sounding too optimistic, the plan is going like clockwork. > Fire was in and signed off their portion of the permit and i have > scheduled building for Monday so if we have no major glitches we > should be signed off late Monday and then the real work of qualing > begins.Stay tuned. Ted > > On 1/11/2013 9:37 AM, maurice stevens wrote: >> >> Hi All, >> >> We haven't sent out a status update on the second chamber for a few >> months ...because there had not been anything new to report...until now. >> >> The permit has gone through the county (big cheer at this point) and >> we are now going through the follow up inspections. >> >> Ted had EH&S here this past Tuesday and they signed off on the system >> (smaller cheer here). Ted has the Fire inspector in today and if all >> goes well (there will be another big cheer and) then the building >> inspector will be here Monday. >> >> We can then turn on the gases to start temperature calibration and >> process development. We want to get a few recipes sent out for SIMS >> so we have clean baseline data. >> >> We will have an epi users meeting in the next few weeks to talk about >> how the two chambers share gas MFC's and what would be the best way >> to run two chambers at the same time. >> >> We are hopeful that Monday we will have good news. >> >> -m >> >> >> >> >> _______________________________________________ >> epi2 mailing list >> epi2 at snf.stanford.edu >> http://snf.stanford.edu/mailman/listinfo/epi2 > -------------- next part -------------- An HTML attachment was scrubbed... URL: From maurice at stanford.edu Wed Jan 16 16:33:24 2013 From: maurice at stanford.edu (maurice stevens) Date: Wed, 16 Jan 2013 16:33:24 -0800 Subject: [epi2] Still having pressure problems Message-ID: The system is still having pressure issues after the throttle valve and pump change. Ted was out today. From maurice at stanford.edu Fri Jan 18 15:41:06 2013 From: maurice at stanford.edu (maurice stevens) Date: Fri, 18 Jan 2013 15:41:06 -0800 Subject: [epi2] Epi2 update 1/18/13 Message-ID: <4A024FC1-82DA-40CD-BBE5-C04E7E693036@stanford.edu> Ted found the blower on the pump had kicked off. Don't know why. That is why system was not pumping down on Wed afternoon. Today, the SIMS recipe is still giving a hazy surface. So we are taking a step back and running an intrinsic Ge deposition (thank you Krishna for the recipe). I have set the tool up to run several Ge deps and the several doped SiGe deps. I'll come in over the weekend and check the runs. -m From maurice at stanford.edu Wed Jan 23 14:43:50 2013 From: maurice at stanford.edu (maurice stevens) Date: Wed, 23 Jan 2013 14:43:50 -0800 Subject: [epi2] Epi2 Chamber A update 1/23/13 In-Reply-To: References: <50C222A6.7010602@acorntech.com> <0693F683-B70D-472A-ABF9-F99DA8780AB5@stanford.edu> <50C2299F.1060502@acorntech.com> <2038EEC9-C585-41EC-B218-BBD69D39D42F@stanford.edu> Message-ID: <6ED546B3-F85F-4078-A322-B93E8654E0C6@stanford.edu> We are still battle pressure issues. Initially the system was not pumping to 15 torr with process gases flowing. The pump was sent out the end of last week and we pulled the pump from Chamber B. We tried to run over the weekend but the pressure was not controlling?it would reach the 15 torr setpoint but would then oscillate out of control. Today Ted had Sean from AMAT back in and they have ruled out the throttle valve. They did find that voltage coming off the pressure manometer is not stable. Sean has ordered a new manometer and expects it to be here tomorrow. From tberg at stanford.edu Fri Jan 25 07:22:49 2013 From: tberg at stanford.edu (Ted Berg) Date: Fri, 25 Jan 2013 07:22:49 -0800 Subject: [epi2] Epi2: Update In-Reply-To: <50F47104.1030607@stanford.edu> References: <50F07885.50908@stanford.edu> <50F47104.1030607@stanford.edu> Message-ID: <5102A349.1000804@stanford.edu> Hello All, I just wanted to give everyone an update on where we are in Epi Land. Chamber B the second chamber is totally signed off by the county and Applied is doing some final checks. We hope to introduce gases today or Monday and then Maurice will do his Quals. On to Chamber A. The major PM with quartz and lamp change was accomplished by Applied Field service, we found the pump had died so it was replaced with a spare, system was leak checked and test runs were attempted to check for O2 contamination. These did not succeed due to pressure control issues. We have been working on trying to resolve this issue with Applied Field service for several days. Sorry for the inconvenience. Will keep you all updated. Ted From tberg at stanford.edu Tue Jan 29 16:51:18 2013 From: tberg at stanford.edu (Ted C. Berg) Date: Tue, 29 Jan 2013 16:51:18 -0800 (PST) Subject: [epi2] Epi2: Update In-Reply-To: <5102A349.1000804@stanford.edu> Message-ID: <85402340.1280225.1359507078138.JavaMail.root@stanford.edu> Hello once again. Still trying to keep all informed on status of epi.Pumps for chambers A and B were exchanged. this may have solved the pressure control issue for A. While troubleshooting chamber A's pressure issue we found a leak in a pump line and also at the rotation. The pump line has been ordered and the rotation leak addressed. We will do etches to try and cleanup A's dome once we have the pump line. It is coming from Germany and was ordered late last week. On to chamber B. The news is better here. we turned on HCl and DCS today and successfully ran Geetch coat B. Maurice will continue testing chamber B as we turn on the rest of the gases. As i said before Applied FS has been here every day to help resolve the issues. We appreciate your patience. Ted ----- Original Message ----- From: "Ted Berg" To: "maurice stevens" Cc: "Krishna Saraswat" , "Brett Huff" , "David Miller" , "James Harris" , "John Bumgarner" , "Roger T. Howe" , "epi2 mailing list" Sent: Friday, January 25, 2013 7:22:49 AM Subject: Re: [epi2] Epi2: Update Hello All, I just wanted to give everyone an update on where we are in Epi Land. Chamber B the second chamber is totally signed off by the county and Applied is doing some final checks. We hope to introduce gases today or Monday and then Maurice will do his Quals. On to Chamber A. The major PM with quartz and lamp change was accomplished by Applied Field service, we found the pump had died so it was replaced with a spare, system was leak checked and test runs were attempted to check for O2 contamination. These did not succeed due to pressure control issues. We have been working on trying to resolve this issue with Applied Field service for several days. Sorry for the inconvenience. Will keep you all updated. Ted _______________________________________________ epi2 mailing list epi2 at snf.stanford.edu http://snf.stanford.edu/mailman/listinfo/epi2